9/8/2010	12:16:58 AM	Helium valve closed
9/8/2010	12:16:58 AM	H2 valve closed
9/8/2010	12:16:58 AM	BCl3 valve closed
9/8/2010	12:16:58 AM	PH3 valve closed
9/8/2010	12:16:58 AM	SiCl4 pre valve closed
9/8/2010	12:16:58 AM	SiCl4 post valve closed
9/8/2010	12:16:58 AM	Main Vac valve closed
9/8/2010	12:16:58 AM	Bypass valve closed
9/8/2010	12:16:58 AM	Bubbler valve closed
9/8/2010	12:16:58 AM	Helium MFC set to  0.000000
9/8/2010	12:16:58 AM	H2 MFC set to  0.000000
9/8/2010	12:16:58 AM	BCl3 MFC set to  0.000000
9/8/2010	12:16:58 AM	PHl3 MFC set to  0.000000
9/8/2010	12:16:58 AM	SiCl4 MFC set to  0.000000
9/8/2010	12:16:58 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	12:16:59 AM	Tube furnace set to 0
9/8/2010	12:16:59 AM	Run finished at 12:16 AM
9/8/2010	12:37:49 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/8/2010	12:37:50 AM	Recipe started at 12:37 AM
9/8/2010	12:37:50 AM	H2 valve closed
9/8/2010	12:37:50 AM	BCl3 valve closed
9/8/2010	12:37:50 AM	PH3 valve closed
9/8/2010	12:37:50 AM	SiCl4 pre valve closed
9/8/2010	12:37:50 AM	SiCl4 post valve closed
9/8/2010	12:37:50 AM	Main Vac valve closed
9/8/2010	12:37:50 AM	Bypass valve closed
9/8/2010	12:37:50 AM	Bubbler valve closed
9/8/2010	12:37:50 AM	Helium valve opened
9/8/2010	12:37:50 AM	Helium MFC set to  500.000000
9/8/2010	12:37:50 AM	H2 MFC set to  0.000000
9/8/2010	12:37:50 AM	BCl3 MFC set to  0.000000
9/8/2010	12:37:50 AM	PHl3 MFC set to  0.000000
9/8/2010	12:37:50 AM	SiCl4 MFC set to  0.000000
9/8/2010	12:37:50 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	12:37:50 AM	Tube furnace set to 0
9/8/2010	12:37:56 AM	Helium valve closed
9/8/2010	12:37:56 AM	H2 valve closed
9/8/2010	12:37:56 AM	BCl3 valve closed
9/8/2010	12:37:56 AM	PH3 valve closed
9/8/2010	12:37:56 AM	SiCl4 pre valve closed
9/8/2010	12:37:56 AM	SiCl4 post valve closed
9/8/2010	12:37:56 AM	Main Vac valve closed
9/8/2010	12:37:56 AM	Bypass valve closed
9/8/2010	12:37:56 AM	Bubbler valve closed
9/8/2010	12:37:56 AM	Helium MFC set to  0.000000
9/8/2010	12:37:56 AM	H2 MFC set to  0.000000
9/8/2010	12:37:56 AM	BCl3 MFC set to  0.000000
9/8/2010	12:37:56 AM	PHl3 MFC set to  0.000000
9/8/2010	12:37:56 AM	SiCl4 MFC set to  0.000000
9/8/2010	12:37:56 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	12:37:56 AM	Tube furnace set to 0
9/8/2010	12:37:56 AM	Run finished at 12:37 AM
9/8/2010	12:37:56 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/8/2010	12:57:37 AM	Recipe started at 12:57 AM
9/8/2010	12:57:37 AM	Helium valve closed
9/8/2010	12:57:37 AM	H2 valve closed
9/8/2010	12:57:37 AM	BCl3 valve closed
9/8/2010	12:57:37 AM	PH3 valve closed
9/8/2010	12:57:37 AM	SiCl4 pre valve closed
9/8/2010	12:57:37 AM	SiCl4 post valve closed
9/8/2010	12:57:37 AM	Main Vac valve closed
9/8/2010	12:57:37 AM	Bubbler valve closed
9/8/2010	12:57:37 AM	Bypass valve opened
9/8/2010	12:57:37 AM	Helium MFC set to  0.000000
9/8/2010	12:57:37 AM	H2 MFC set to  0.000000
9/8/2010	12:57:37 AM	BCl3 MFC set to  0.000000
9/8/2010	12:57:37 AM	PHl3 MFC set to  0.000000
9/8/2010	12:57:37 AM	SiCl4 MFC set to  0.000000
9/8/2010	12:57:37 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	12:57:37 AM	Tube furnace set to 0
9/8/2010	12:58:19 AM	Helium valve closed
9/8/2010	12:58:19 AM	H2 valve closed
9/8/2010	12:58:19 AM	BCl3 valve closed
9/8/2010	12:58:19 AM	PH3 valve closed
9/8/2010	12:58:19 AM	SiCl4 pre valve closed
9/8/2010	12:58:19 AM	SiCl4 post valve closed
9/8/2010	12:58:19 AM	Bubbler valve closed
9/8/2010	12:58:19 AM	Main Vac valve opened
9/8/2010	12:58:19 AM	Bypass valve opened
9/8/2010	12:58:19 AM	Helium MFC set to  0.000000
9/8/2010	12:58:19 AM	H2 MFC set to  0.000000
9/8/2010	12:58:19 AM	BCl3 MFC set to  0.000000
9/8/2010	12:58:19 AM	PHl3 MFC set to  0.000000
9/8/2010	12:58:19 AM	SiCl4 MFC set to  0.000000
9/8/2010	12:58:19 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	12:58:19 AM	Tube furnace set to 0
9/8/2010	12:59:19 AM	H2 valve closed
9/8/2010	12:59:19 AM	BCl3 valve closed
9/8/2010	12:59:19 AM	PH3 valve closed
9/8/2010	12:59:19 AM	SiCl4 pre valve closed
9/8/2010	12:59:19 AM	SiCl4 post valve closed
9/8/2010	12:59:19 AM	Bubbler valve closed
9/8/2010	12:59:19 AM	Helium valve opened
9/8/2010	12:59:19 AM	Main Vac valve opened
9/8/2010	12:59:19 AM	Bypass valve opened
9/8/2010	12:59:19 AM	Helium MFC set to  100.000000
9/8/2010	12:59:19 AM	H2 MFC set to  0.000000
9/8/2010	12:59:19 AM	BCl3 MFC set to  0.000000
9/8/2010	12:59:19 AM	PHl3 MFC set to  0.000000
9/8/2010	12:59:19 AM	SiCl4 MFC set to  0.000000
9/8/2010	12:59:19 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	12:59:19 AM	Tube furnace set to 0
9/8/2010	1:00:19 AM	Helium valve closed
9/8/2010	1:00:19 AM	H2 valve closed
9/8/2010	1:00:19 AM	BCl3 valve closed
9/8/2010	1:00:19 AM	PH3 valve closed
9/8/2010	1:00:19 AM	SiCl4 pre valve closed
9/8/2010	1:00:19 AM	SiCl4 post valve closed
9/8/2010	1:00:19 AM	Bubbler valve closed
9/8/2010	1:00:19 AM	Main Vac valve opened
9/8/2010	1:00:19 AM	Bypass valve opened
9/8/2010	1:00:19 AM	Helium MFC set to  0.000000
9/8/2010	1:00:19 AM	H2 MFC set to  0.000000
9/8/2010	1:00:19 AM	BCl3 MFC set to  0.000000
9/8/2010	1:00:19 AM	PHl3 MFC set to  0.000000
9/8/2010	1:00:19 AM	SiCl4 MFC set to  0.000000
9/8/2010	1:00:19 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	1:00:20 AM	Tube furnace set to 0
9/8/2010	1:01:20 AM	H2 valve closed
9/8/2010	1:01:20 AM	BCl3 valve closed
9/8/2010	1:01:20 AM	PH3 valve closed
9/8/2010	1:01:20 AM	SiCl4 pre valve closed
9/8/2010	1:01:20 AM	SiCl4 post valve closed
9/8/2010	1:01:20 AM	Bubbler valve closed
9/8/2010	1:01:20 AM	Helium valve opened
9/8/2010	1:01:20 AM	Main Vac valve opened
9/8/2010	1:01:20 AM	Bypass valve opened
9/8/2010	1:01:20 AM	Helium MFC set to  100.000000
9/8/2010	1:01:20 AM	H2 MFC set to  0.000000
9/8/2010	1:01:20 AM	BCl3 MFC set to  0.000000
9/8/2010	1:01:20 AM	PHl3 MFC set to  0.000000
9/8/2010	1:01:20 AM	SiCl4 MFC set to  0.000000
9/8/2010	1:01:20 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	1:01:20 AM	Tube furnace set to 0
9/8/2010	1:02:20 AM	Helium valve closed
9/8/2010	1:02:20 AM	H2 valve closed
9/8/2010	1:02:20 AM	BCl3 valve closed
9/8/2010	1:02:20 AM	PH3 valve closed
9/8/2010	1:02:20 AM	SiCl4 pre valve closed
9/8/2010	1:02:20 AM	SiCl4 post valve closed
9/8/2010	1:02:20 AM	Bubbler valve closed
9/8/2010	1:02:20 AM	Main Vac valve opened
9/8/2010	1:02:20 AM	Bypass valve opened
9/8/2010	1:02:20 AM	Helium MFC set to  0.000000
9/8/2010	1:02:20 AM	H2 MFC set to  0.000000
9/8/2010	1:02:20 AM	BCl3 MFC set to  0.000000
9/8/2010	1:02:20 AM	PHl3 MFC set to  0.000000
9/8/2010	1:02:20 AM	SiCl4 MFC set to  0.000000
9/8/2010	1:02:20 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	1:02:20 AM	Tube furnace set to 0
9/8/2010	1:03:20 AM	H2 valve closed
9/8/2010	1:03:20 AM	BCl3 valve closed
9/8/2010	1:03:20 AM	PH3 valve closed
9/8/2010	1:03:20 AM	SiCl4 pre valve closed
9/8/2010	1:03:20 AM	SiCl4 post valve closed
9/8/2010	1:03:20 AM	Bubbler valve closed
9/8/2010	1:03:20 AM	Helium valve opened
9/8/2010	1:03:20 AM	Main Vac valve opened
9/8/2010	1:03:20 AM	Bypass valve opened
9/8/2010	1:03:20 AM	Helium MFC set to  100.000000
9/8/2010	1:03:20 AM	H2 MFC set to  0.000000
9/8/2010	1:03:20 AM	BCl3 MFC set to  0.000000
9/8/2010	1:03:20 AM	PHl3 MFC set to  0.000000
9/8/2010	1:03:20 AM	SiCl4 MFC set to  0.000000
9/8/2010	1:03:20 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	1:03:20 AM	Tube furnace set to 0
9/8/2010	1:04:20 AM	Helium valve closed
9/8/2010	1:04:20 AM	H2 valve closed
9/8/2010	1:04:20 AM	BCl3 valve closed
9/8/2010	1:04:20 AM	PH3 valve closed
9/8/2010	1:04:20 AM	SiCl4 pre valve closed
9/8/2010	1:04:20 AM	SiCl4 post valve closed
9/8/2010	1:04:20 AM	Bubbler valve closed
9/8/2010	1:04:20 AM	Main Vac valve opened
9/8/2010	1:04:20 AM	Bypass valve opened
9/8/2010	1:04:20 AM	Helium MFC set to  0.000000
9/8/2010	1:04:20 AM	H2 MFC set to  0.000000
9/8/2010	1:04:20 AM	BCl3 MFC set to  0.000000
9/8/2010	1:04:20 AM	PHl3 MFC set to  0.000000
9/8/2010	1:04:20 AM	SiCl4 MFC set to  0.000000
9/8/2010	1:04:20 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	1:04:20 AM	Tube furnace set to 0
9/8/2010	1:05:20 AM	H2 valve closed
9/8/2010	1:05:20 AM	BCl3 valve closed
9/8/2010	1:05:20 AM	PH3 valve closed
9/8/2010	1:05:20 AM	SiCl4 pre valve closed
9/8/2010	1:05:20 AM	SiCl4 post valve closed
9/8/2010	1:05:20 AM	Bubbler valve closed
9/8/2010	1:05:20 AM	Helium valve opened
9/8/2010	1:05:20 AM	Main Vac valve opened
9/8/2010	1:05:20 AM	Bypass valve opened
9/8/2010	1:05:20 AM	Helium MFC set to  100.000000
9/8/2010	1:05:20 AM	H2 MFC set to  0.000000
9/8/2010	1:05:20 AM	BCl3 MFC set to  0.000000
9/8/2010	1:05:20 AM	PHl3 MFC set to  0.000000
9/8/2010	1:05:20 AM	SiCl4 MFC set to  0.000000
9/8/2010	1:05:20 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	1:05:21 AM	Tube furnace set to 0
9/8/2010	1:06:21 AM	Helium valve closed
9/8/2010	1:06:21 AM	H2 valve closed
9/8/2010	1:06:21 AM	BCl3 valve closed
9/8/2010	1:06:21 AM	PH3 valve closed
9/8/2010	1:06:21 AM	SiCl4 pre valve closed
9/8/2010	1:06:21 AM	SiCl4 post valve closed
9/8/2010	1:06:21 AM	Bubbler valve closed
9/8/2010	1:06:21 AM	Main Vac valve opened
9/8/2010	1:06:21 AM	Bypass valve opened
9/8/2010	1:06:21 AM	Helium MFC set to  0.000000
9/8/2010	1:06:21 AM	H2 MFC set to  0.000000
9/8/2010	1:06:21 AM	BCl3 MFC set to  0.000000
9/8/2010	1:06:21 AM	PHl3 MFC set to  0.000000
9/8/2010	1:06:21 AM	SiCl4 MFC set to  0.000000
9/8/2010	1:06:21 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	1:06:21 AM	Tube furnace set to 0
9/8/2010	1:07:21 AM	H2 valve closed
9/8/2010	1:07:21 AM	BCl3 valve closed
9/8/2010	1:07:21 AM	PH3 valve closed
9/8/2010	1:07:21 AM	SiCl4 pre valve closed
9/8/2010	1:07:21 AM	SiCl4 post valve closed
9/8/2010	1:07:21 AM	Bubbler valve closed
9/8/2010	1:07:21 AM	Helium valve opened
9/8/2010	1:07:21 AM	Main Vac valve opened
9/8/2010	1:07:21 AM	Bypass valve opened
9/8/2010	1:07:21 AM	Helium MFC set to  100.000000
9/8/2010	1:07:21 AM	H2 MFC set to  0.000000
9/8/2010	1:07:21 AM	BCl3 MFC set to  0.000000
9/8/2010	1:07:21 AM	PHl3 MFC set to  0.000000
9/8/2010	1:07:21 AM	SiCl4 MFC set to  0.000000
9/8/2010	1:07:21 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	1:07:21 AM	Tube furnace set to 0
9/8/2010	1:08:21 AM	Helium valve closed
9/8/2010	1:08:21 AM	H2 valve closed
9/8/2010	1:08:21 AM	BCl3 valve closed
9/8/2010	1:08:21 AM	PH3 valve closed
9/8/2010	1:08:21 AM	SiCl4 pre valve closed
9/8/2010	1:08:21 AM	SiCl4 post valve closed
9/8/2010	1:08:21 AM	Bubbler valve closed
9/8/2010	1:08:21 AM	Main Vac valve opened
9/8/2010	1:08:21 AM	Bypass valve opened
9/8/2010	1:08:21 AM	Helium MFC set to  0.000000
9/8/2010	1:08:21 AM	H2 MFC set to  0.000000
9/8/2010	1:08:21 AM	BCl3 MFC set to  0.000000
9/8/2010	1:08:21 AM	PHl3 MFC set to  0.000000
9/8/2010	1:08:21 AM	SiCl4 MFC set to  0.000000
9/8/2010	1:08:21 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	1:08:21 AM	Tube furnace set to 0
9/8/2010	1:09:21 AM	H2 valve closed
9/8/2010	1:09:21 AM	BCl3 valve closed
9/8/2010	1:09:21 AM	PH3 valve closed
9/8/2010	1:09:21 AM	SiCl4 pre valve closed
9/8/2010	1:09:21 AM	SiCl4 post valve closed
9/8/2010	1:09:21 AM	Bubbler valve closed
9/8/2010	1:09:21 AM	Helium valve opened
9/8/2010	1:09:21 AM	Main Vac valve opened
9/8/2010	1:09:21 AM	Bypass valve opened
9/8/2010	1:09:21 AM	Helium MFC set to  100.000000
9/8/2010	1:09:21 AM	H2 MFC set to  0.000000
9/8/2010	1:09:21 AM	BCl3 MFC set to  0.000000
9/8/2010	1:09:21 AM	PHl3 MFC set to  0.000000
9/8/2010	1:09:21 AM	SiCl4 MFC set to  0.000000
9/8/2010	1:09:21 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	1:09:21 AM	Tube furnace set to 0
9/8/2010	1:10:21 AM	Helium valve closed
9/8/2010	1:10:21 AM	H2 valve closed
9/8/2010	1:10:21 AM	BCl3 valve closed
9/8/2010	1:10:21 AM	PH3 valve closed
9/8/2010	1:10:21 AM	SiCl4 pre valve closed
9/8/2010	1:10:21 AM	SiCl4 post valve closed
9/8/2010	1:10:21 AM	Bubbler valve closed
9/8/2010	1:10:21 AM	Main Vac valve opened
9/8/2010	1:10:21 AM	Bypass valve opened
9/8/2010	1:10:21 AM	Helium MFC set to  0.000000
9/8/2010	1:10:21 AM	H2 MFC set to  0.000000
9/8/2010	1:10:21 AM	BCl3 MFC set to  0.000000
9/8/2010	1:10:21 AM	PHl3 MFC set to  0.000000
9/8/2010	1:10:21 AM	SiCl4 MFC set to  0.000000
9/8/2010	1:10:21 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	1:10:22 AM	Tube furnace set to 0
9/8/2010	1:11:22 AM	H2 valve closed
9/8/2010	1:11:22 AM	BCl3 valve closed
9/8/2010	1:11:22 AM	PH3 valve closed
9/8/2010	1:11:22 AM	SiCl4 pre valve closed
9/8/2010	1:11:22 AM	SiCl4 post valve closed
9/8/2010	1:11:22 AM	Bubbler valve closed
9/8/2010	1:11:22 AM	Helium valve opened
9/8/2010	1:11:22 AM	Main Vac valve opened
9/8/2010	1:11:22 AM	Bypass valve opened
9/8/2010	1:11:22 AM	Helium MFC set to  100.000000
9/8/2010	1:11:22 AM	H2 MFC set to  0.000000
9/8/2010	1:11:22 AM	BCl3 MFC set to  0.000000
9/8/2010	1:11:22 AM	PHl3 MFC set to  0.000000
9/8/2010	1:11:22 AM	SiCl4 MFC set to  0.000000
9/8/2010	1:11:22 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	1:11:22 AM	Tube furnace set to 0
9/8/2010	1:12:22 AM	Helium valve closed
9/8/2010	1:12:22 AM	H2 valve closed
9/8/2010	1:12:22 AM	BCl3 valve closed
9/8/2010	1:12:22 AM	PH3 valve closed
9/8/2010	1:12:22 AM	SiCl4 pre valve closed
9/8/2010	1:12:22 AM	SiCl4 post valve closed
9/8/2010	1:12:22 AM	Bubbler valve closed
9/8/2010	1:12:22 AM	Main Vac valve opened
9/8/2010	1:12:22 AM	Bypass valve opened
9/8/2010	1:12:22 AM	Helium MFC set to  0.000000
9/8/2010	1:12:22 AM	H2 MFC set to  0.000000
9/8/2010	1:12:22 AM	BCl3 MFC set to  0.000000
9/8/2010	1:12:22 AM	PHl3 MFC set to  0.000000
9/8/2010	1:12:22 AM	SiCl4 MFC set to  0.000000
9/8/2010	1:12:22 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	1:12:22 AM	Tube furnace set to 0
9/8/2010	1:13:22 AM	H2 valve closed
9/8/2010	1:13:22 AM	BCl3 valve closed
9/8/2010	1:13:22 AM	PH3 valve closed
9/8/2010	1:13:22 AM	SiCl4 pre valve closed
9/8/2010	1:13:22 AM	SiCl4 post valve closed
9/8/2010	1:13:22 AM	Bubbler valve closed
9/8/2010	1:13:22 AM	Helium valve opened
9/8/2010	1:13:22 AM	Main Vac valve opened
9/8/2010	1:13:22 AM	Bypass valve opened
9/8/2010	1:13:22 AM	Helium MFC set to  100.000000
9/8/2010	1:13:22 AM	H2 MFC set to  0.000000
9/8/2010	1:13:22 AM	BCl3 MFC set to  0.000000
9/8/2010	1:13:22 AM	PHl3 MFC set to  0.000000
9/8/2010	1:13:22 AM	SiCl4 MFC set to  0.000000
9/8/2010	1:13:22 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	1:13:22 AM	Tube furnace set to 0
9/8/2010	1:14:22 AM	Helium valve closed
9/8/2010	1:14:22 AM	H2 valve closed
9/8/2010	1:14:22 AM	BCl3 valve closed
9/8/2010	1:14:22 AM	PH3 valve closed
9/8/2010	1:14:22 AM	SiCl4 pre valve closed
9/8/2010	1:14:22 AM	SiCl4 post valve closed
9/8/2010	1:14:22 AM	Bubbler valve closed
9/8/2010	1:14:22 AM	Main Vac valve opened
9/8/2010	1:14:22 AM	Bypass valve opened
9/8/2010	1:14:22 AM	Helium MFC set to  0.000000
9/8/2010	1:14:22 AM	H2 MFC set to  0.000000
9/8/2010	1:14:22 AM	BCl3 MFC set to  0.000000
9/8/2010	1:14:22 AM	PHl3 MFC set to  0.000000
9/8/2010	1:14:22 AM	SiCl4 MFC set to  0.000000
9/8/2010	1:14:22 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	1:14:22 AM	Tube furnace set to 0
9/8/2010	1:15:22 AM	H2 valve closed
9/8/2010	1:15:22 AM	BCl3 valve closed
9/8/2010	1:15:22 AM	PH3 valve closed
9/8/2010	1:15:22 AM	SiCl4 pre valve closed
9/8/2010	1:15:22 AM	SiCl4 post valve closed
9/8/2010	1:15:22 AM	Bubbler valve closed
9/8/2010	1:15:22 AM	Helium valve opened
9/8/2010	1:15:22 AM	Main Vac valve opened
9/8/2010	1:15:22 AM	Bypass valve opened
9/8/2010	1:15:23 AM	Helium MFC set to  100.000000
9/8/2010	1:15:23 AM	H2 MFC set to  0.000000
9/8/2010	1:15:23 AM	BCl3 MFC set to  0.000000
9/8/2010	1:15:23 AM	PHl3 MFC set to  0.000000
9/8/2010	1:15:23 AM	SiCl4 MFC set to  0.000000
9/8/2010	1:15:23 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	1:15:23 AM	Tube furnace set to 0
9/8/2010	1:16:23 AM	Helium valve closed
9/8/2010	1:16:23 AM	H2 valve closed
9/8/2010	1:16:23 AM	BCl3 valve closed
9/8/2010	1:16:23 AM	PH3 valve closed
9/8/2010	1:16:23 AM	SiCl4 pre valve closed
9/8/2010	1:16:23 AM	SiCl4 post valve closed
9/8/2010	1:16:23 AM	Bubbler valve closed
9/8/2010	1:16:23 AM	Main Vac valve opened
9/8/2010	1:16:23 AM	Bypass valve opened
9/8/2010	1:16:23 AM	Helium MFC set to  0.000000
9/8/2010	1:16:23 AM	H2 MFC set to  0.000000
9/8/2010	1:16:23 AM	BCl3 MFC set to  0.000000
9/8/2010	1:16:23 AM	PHl3 MFC set to  0.000000
9/8/2010	1:16:23 AM	SiCl4 MFC set to  0.000000
9/8/2010	1:16:23 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	1:16:23 AM	Tube furnace set to 0
9/8/2010	1:17:23 AM	H2 valve closed
9/8/2010	1:17:23 AM	BCl3 valve closed
9/8/2010	1:17:23 AM	PH3 valve closed
9/8/2010	1:17:23 AM	SiCl4 pre valve closed
9/8/2010	1:17:23 AM	SiCl4 post valve closed
9/8/2010	1:17:23 AM	Bubbler valve closed
9/8/2010	1:17:23 AM	Helium valve opened
9/8/2010	1:17:23 AM	Main Vac valve opened
9/8/2010	1:17:23 AM	Bypass valve opened
9/8/2010	1:17:23 AM	Helium MFC set to  100.000000
9/8/2010	1:17:23 AM	H2 MFC set to  0.000000
9/8/2010	1:17:23 AM	BCl3 MFC set to  0.000000
9/8/2010	1:17:23 AM	PHl3 MFC set to  0.000000
9/8/2010	1:17:23 AM	SiCl4 MFC set to  0.000000
9/8/2010	1:17:23 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	1:17:23 AM	Tube furnace set to 0
9/8/2010	1:18:23 AM	Helium valve closed
9/8/2010	1:18:23 AM	H2 valve closed
9/8/2010	1:18:23 AM	BCl3 valve closed
9/8/2010	1:18:23 AM	PH3 valve closed
9/8/2010	1:18:23 AM	SiCl4 pre valve closed
9/8/2010	1:18:23 AM	SiCl4 post valve closed
9/8/2010	1:18:23 AM	Bubbler valve closed
9/8/2010	1:18:23 AM	Main Vac valve opened
9/8/2010	1:18:23 AM	Bypass valve opened
9/8/2010	1:18:23 AM	Helium MFC set to  0.000000
9/8/2010	1:18:23 AM	H2 MFC set to  0.000000
9/8/2010	1:18:23 AM	BCl3 MFC set to  0.000000
9/8/2010	1:18:23 AM	PHl3 MFC set to  0.000000
9/8/2010	1:18:23 AM	SiCl4 MFC set to  0.000000
9/8/2010	1:18:23 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	1:18:23 AM	Tube furnace set to 100
9/8/2010	1:18:24 AM	Run finished at 1:18 AM
9/8/2010	1:32:01 AM	Recipe started at 1:31 AM
9/8/2010	1:32:01 AM	Helium valve closed
9/8/2010	1:32:01 AM	H2 valve closed
9/8/2010	1:32:01 AM	BCl3 valve closed
9/8/2010	1:32:01 AM	PH3 valve closed
9/8/2010	1:32:01 AM	SiCl4 pre valve closed
9/8/2010	1:32:01 AM	SiCl4 post valve closed
9/8/2010	1:32:01 AM	Main Vac valve closed
9/8/2010	1:32:01 AM	Bubbler valve closed
9/8/2010	1:32:01 AM	Bypass valve opened
9/8/2010	1:32:01 AM	Helium MFC set to  0.000000
9/8/2010	1:32:01 AM	H2 MFC set to  0.000000
9/8/2010	1:32:01 AM	BCl3 MFC set to  0.000000
9/8/2010	1:32:01 AM	PHl3 MFC set to  0.000000
9/8/2010	1:32:01 AM	SiCl4 MFC set to  0.000000
9/8/2010	1:32:01 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	1:32:01 AM	Tube furnace set to 0
9/8/2010	1:32:01 AM	Helium valve closed
9/8/2010	1:32:01 AM	H2 valve closed
9/8/2010	1:32:01 AM	BCl3 valve closed
9/8/2010	1:32:01 AM	PH3 valve closed
9/8/2010	1:32:01 AM	SiCl4 pre valve closed
9/8/2010	1:32:01 AM	SiCl4 post valve closed
9/8/2010	1:32:01 AM	Bubbler valve closed
9/8/2010	1:32:01 AM	Main Vac valve opened
9/8/2010	1:32:01 AM	Bypass valve opened
9/8/2010	1:32:01 AM	Helium MFC set to  0.000000
9/8/2010	1:32:01 AM	H2 MFC set to  0.000000
9/8/2010	1:32:01 AM	BCl3 MFC set to  0.000000
9/8/2010	1:32:01 AM	PHl3 MFC set to  0.000000
9/8/2010	1:32:01 AM	SiCl4 MFC set to  0.000000
9/8/2010	1:32:01 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	1:32:01 AM	Tube furnace set to 0
9/8/2010	1:33:01 AM	H2 valve closed
9/8/2010	1:33:01 AM	BCl3 valve closed
9/8/2010	1:33:01 AM	PH3 valve closed
9/8/2010	1:33:01 AM	SiCl4 pre valve closed
9/8/2010	1:33:01 AM	SiCl4 post valve closed
9/8/2010	1:33:01 AM	Bubbler valve closed
9/8/2010	1:33:01 AM	Helium valve opened
9/8/2010	1:33:01 AM	Main Vac valve opened
9/8/2010	1:33:01 AM	Bypass valve opened
9/8/2010	1:33:01 AM	Helium MFC set to  100.000000
9/8/2010	1:33:01 AM	H2 MFC set to  0.000000
9/8/2010	1:33:01 AM	BCl3 MFC set to  0.000000
9/8/2010	1:33:01 AM	PHl3 MFC set to  0.000000
9/8/2010	1:33:01 AM	SiCl4 MFC set to  0.000000
9/8/2010	1:33:01 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	1:33:02 AM	Tube furnace set to 0
9/8/2010	1:34:02 AM	Helium valve closed
9/8/2010	1:34:02 AM	H2 valve closed
9/8/2010	1:34:02 AM	BCl3 valve closed
9/8/2010	1:34:02 AM	PH3 valve closed
9/8/2010	1:34:02 AM	SiCl4 pre valve closed
9/8/2010	1:34:02 AM	SiCl4 post valve closed
9/8/2010	1:34:02 AM	Bubbler valve closed
9/8/2010	1:34:02 AM	Main Vac valve opened
9/8/2010	1:34:02 AM	Bypass valve opened
9/8/2010	1:34:02 AM	Helium MFC set to  0.000000
9/8/2010	1:34:02 AM	H2 MFC set to  0.000000
9/8/2010	1:34:02 AM	BCl3 MFC set to  0.000000
9/8/2010	1:34:02 AM	PHl3 MFC set to  0.000000
9/8/2010	1:34:02 AM	SiCl4 MFC set to  0.000000
9/8/2010	1:34:02 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	1:34:02 AM	Tube furnace set to 0
9/8/2010	1:35:02 AM	H2 valve closed
9/8/2010	1:35:02 AM	BCl3 valve closed
9/8/2010	1:35:02 AM	PH3 valve closed
9/8/2010	1:35:02 AM	SiCl4 pre valve closed
9/8/2010	1:35:02 AM	SiCl4 post valve closed
9/8/2010	1:35:02 AM	Bubbler valve closed
9/8/2010	1:35:02 AM	Helium valve opened
9/8/2010	1:35:02 AM	Main Vac valve opened
9/8/2010	1:35:02 AM	Bypass valve opened
9/8/2010	1:35:02 AM	Helium MFC set to  100.000000
9/8/2010	1:35:02 AM	H2 MFC set to  0.000000
9/8/2010	1:35:02 AM	BCl3 MFC set to  0.000000
9/8/2010	1:35:02 AM	PHl3 MFC set to  0.000000
9/8/2010	1:35:02 AM	SiCl4 MFC set to  0.000000
9/8/2010	1:35:02 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	1:35:02 AM	Tube furnace set to 0
9/8/2010	1:36:02 AM	Helium valve closed
9/8/2010	1:36:02 AM	H2 valve closed
9/8/2010	1:36:02 AM	BCl3 valve closed
9/8/2010	1:36:02 AM	PH3 valve closed
9/8/2010	1:36:02 AM	SiCl4 pre valve closed
9/8/2010	1:36:02 AM	SiCl4 post valve closed
9/8/2010	1:36:02 AM	Bubbler valve closed
9/8/2010	1:36:02 AM	Main Vac valve opened
9/8/2010	1:36:02 AM	Bypass valve opened
9/8/2010	1:36:02 AM	Helium MFC set to  0.000000
9/8/2010	1:36:02 AM	H2 MFC set to  0.000000
9/8/2010	1:36:02 AM	BCl3 MFC set to  0.000000
9/8/2010	1:36:02 AM	PHl3 MFC set to  0.000000
9/8/2010	1:36:02 AM	SiCl4 MFC set to  0.000000
9/8/2010	1:36:02 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	1:36:02 AM	Tube furnace set to 0
9/8/2010	1:37:02 AM	H2 valve closed
9/8/2010	1:37:02 AM	BCl3 valve closed
9/8/2010	1:37:02 AM	PH3 valve closed
9/8/2010	1:37:02 AM	SiCl4 pre valve closed
9/8/2010	1:37:02 AM	SiCl4 post valve closed
9/8/2010	1:37:02 AM	Bubbler valve closed
9/8/2010	1:37:02 AM	Helium valve opened
9/8/2010	1:37:02 AM	Main Vac valve opened
9/8/2010	1:37:02 AM	Bypass valve opened
9/8/2010	1:37:02 AM	Helium MFC set to  100.000000
9/8/2010	1:37:02 AM	H2 MFC set to  0.000000
9/8/2010	1:37:02 AM	BCl3 MFC set to  0.000000
9/8/2010	1:37:02 AM	PHl3 MFC set to  0.000000
9/8/2010	1:37:02 AM	SiCl4 MFC set to  0.000000
9/8/2010	1:37:02 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	1:37:02 AM	Tube furnace set to 0
9/8/2010	1:38:02 AM	Helium valve closed
9/8/2010	1:38:02 AM	H2 valve closed
9/8/2010	1:38:02 AM	BCl3 valve closed
9/8/2010	1:38:02 AM	PH3 valve closed
9/8/2010	1:38:02 AM	SiCl4 pre valve closed
9/8/2010	1:38:02 AM	SiCl4 post valve closed
9/8/2010	1:38:02 AM	Bubbler valve closed
9/8/2010	1:38:02 AM	Main Vac valve opened
9/8/2010	1:38:02 AM	Bypass valve opened
9/8/2010	1:38:02 AM	Helium MFC set to  0.000000
9/8/2010	1:38:02 AM	H2 MFC set to  0.000000
9/8/2010	1:38:02 AM	BCl3 MFC set to  0.000000
9/8/2010	1:38:02 AM	PHl3 MFC set to  0.000000
9/8/2010	1:38:02 AM	SiCl4 MFC set to  0.000000
9/8/2010	1:38:02 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	1:38:03 AM	Tube furnace set to 0
9/8/2010	1:39:03 AM	H2 valve closed
9/8/2010	1:39:03 AM	BCl3 valve closed
9/8/2010	1:39:03 AM	PH3 valve closed
9/8/2010	1:39:03 AM	SiCl4 pre valve closed
9/8/2010	1:39:03 AM	SiCl4 post valve closed
9/8/2010	1:39:03 AM	Bubbler valve closed
9/8/2010	1:39:03 AM	Helium valve opened
9/8/2010	1:39:03 AM	Main Vac valve opened
9/8/2010	1:39:03 AM	Bypass valve opened
9/8/2010	1:39:03 AM	Helium MFC set to  100.000000
9/8/2010	1:39:03 AM	H2 MFC set to  0.000000
9/8/2010	1:39:03 AM	BCl3 MFC set to  0.000000
9/8/2010	1:39:03 AM	PHl3 MFC set to  0.000000
9/8/2010	1:39:03 AM	SiCl4 MFC set to  0.000000
9/8/2010	1:39:03 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	1:39:03 AM	Tube furnace set to 0
9/8/2010	1:40:03 AM	Helium valve closed
9/8/2010	1:40:03 AM	H2 valve closed
9/8/2010	1:40:03 AM	BCl3 valve closed
9/8/2010	1:40:03 AM	PH3 valve closed
9/8/2010	1:40:03 AM	SiCl4 pre valve closed
9/8/2010	1:40:03 AM	SiCl4 post valve closed
9/8/2010	1:40:03 AM	Bubbler valve closed
9/8/2010	1:40:03 AM	Main Vac valve opened
9/8/2010	1:40:03 AM	Bypass valve opened
9/8/2010	1:40:03 AM	Helium MFC set to  0.000000
9/8/2010	1:40:03 AM	H2 MFC set to  0.000000
9/8/2010	1:40:03 AM	BCl3 MFC set to  0.000000
9/8/2010	1:40:03 AM	PHl3 MFC set to  0.000000
9/8/2010	1:40:03 AM	SiCl4 MFC set to  0.000000
9/8/2010	1:40:03 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	1:40:03 AM	Tube furnace set to 0
9/8/2010	1:41:03 AM	H2 valve closed
9/8/2010	1:41:03 AM	BCl3 valve closed
9/8/2010	1:41:03 AM	PH3 valve closed
9/8/2010	1:41:03 AM	SiCl4 pre valve closed
9/8/2010	1:41:03 AM	SiCl4 post valve closed
9/8/2010	1:41:03 AM	Bubbler valve closed
9/8/2010	1:41:03 AM	Helium valve opened
9/8/2010	1:41:03 AM	Main Vac valve opened
9/8/2010	1:41:03 AM	Bypass valve opened
9/8/2010	1:41:03 AM	Helium MFC set to  100.000000
9/8/2010	1:41:03 AM	H2 MFC set to  0.000000
9/8/2010	1:41:03 AM	BCl3 MFC set to  0.000000
9/8/2010	1:41:03 AM	PHl3 MFC set to  0.000000
9/8/2010	1:41:03 AM	SiCl4 MFC set to  0.000000
9/8/2010	1:41:03 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	1:41:03 AM	Tube furnace set to 0
9/8/2010	1:42:03 AM	Helium valve closed
9/8/2010	1:42:03 AM	H2 valve closed
9/8/2010	1:42:03 AM	BCl3 valve closed
9/8/2010	1:42:03 AM	PH3 valve closed
9/8/2010	1:42:03 AM	SiCl4 pre valve closed
9/8/2010	1:42:03 AM	SiCl4 post valve closed
9/8/2010	1:42:03 AM	Bubbler valve closed
9/8/2010	1:42:03 AM	Main Vac valve opened
9/8/2010	1:42:03 AM	Bypass valve opened
9/8/2010	1:42:03 AM	Helium MFC set to  0.000000
9/8/2010	1:42:03 AM	H2 MFC set to  0.000000
9/8/2010	1:42:03 AM	BCl3 MFC set to  0.000000
9/8/2010	1:42:03 AM	PHl3 MFC set to  0.000000
9/8/2010	1:42:03 AM	SiCl4 MFC set to  0.000000
9/8/2010	1:42:03 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	1:42:03 AM	Tube furnace set to 0
9/8/2010	1:43:03 AM	H2 valve closed
9/8/2010	1:43:03 AM	BCl3 valve closed
9/8/2010	1:43:03 AM	PH3 valve closed
9/8/2010	1:43:03 AM	SiCl4 pre valve closed
9/8/2010	1:43:03 AM	SiCl4 post valve closed
9/8/2010	1:43:03 AM	Bubbler valve closed
9/8/2010	1:43:03 AM	Helium valve opened
9/8/2010	1:43:03 AM	Main Vac valve opened
9/8/2010	1:43:03 AM	Bypass valve opened
9/8/2010	1:43:03 AM	Helium MFC set to  100.000000
9/8/2010	1:43:03 AM	H2 MFC set to  0.000000
9/8/2010	1:43:03 AM	BCl3 MFC set to  0.000000
9/8/2010	1:43:03 AM	PHl3 MFC set to  0.000000
9/8/2010	1:43:03 AM	SiCl4 MFC set to  0.000000
9/8/2010	1:43:03 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	1:43:04 AM	Tube furnace set to 0
9/8/2010	1:44:04 AM	Helium valve closed
9/8/2010	1:44:04 AM	H2 valve closed
9/8/2010	1:44:04 AM	BCl3 valve closed
9/8/2010	1:44:04 AM	PH3 valve closed
9/8/2010	1:44:04 AM	SiCl4 pre valve closed
9/8/2010	1:44:04 AM	SiCl4 post valve closed
9/8/2010	1:44:04 AM	Bubbler valve closed
9/8/2010	1:44:04 AM	Main Vac valve opened
9/8/2010	1:44:04 AM	Bypass valve opened
9/8/2010	1:44:04 AM	Helium MFC set to  0.000000
9/8/2010	1:44:04 AM	H2 MFC set to  0.000000
9/8/2010	1:44:04 AM	BCl3 MFC set to  0.000000
9/8/2010	1:44:04 AM	PHl3 MFC set to  0.000000
9/8/2010	1:44:04 AM	SiCl4 MFC set to  0.000000
9/8/2010	1:44:04 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	1:44:04 AM	Tube furnace set to 0
9/8/2010	1:45:04 AM	H2 valve closed
9/8/2010	1:45:04 AM	BCl3 valve closed
9/8/2010	1:45:04 AM	PH3 valve closed
9/8/2010	1:45:04 AM	SiCl4 pre valve closed
9/8/2010	1:45:04 AM	SiCl4 post valve closed
9/8/2010	1:45:04 AM	Bubbler valve closed
9/8/2010	1:45:04 AM	Helium valve opened
9/8/2010	1:45:04 AM	Main Vac valve opened
9/8/2010	1:45:04 AM	Bypass valve opened
9/8/2010	1:45:04 AM	Helium MFC set to  100.000000
9/8/2010	1:45:04 AM	H2 MFC set to  0.000000
9/8/2010	1:45:04 AM	BCl3 MFC set to  0.000000
9/8/2010	1:45:04 AM	PHl3 MFC set to  0.000000
9/8/2010	1:45:04 AM	SiCl4 MFC set to  0.000000
9/8/2010	1:45:04 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	1:45:04 AM	Tube furnace set to 0
9/8/2010	1:46:04 AM	Helium valve closed
9/8/2010	1:46:04 AM	H2 valve closed
9/8/2010	1:46:04 AM	BCl3 valve closed
9/8/2010	1:46:04 AM	PH3 valve closed
9/8/2010	1:46:04 AM	SiCl4 pre valve closed
9/8/2010	1:46:04 AM	SiCl4 post valve closed
9/8/2010	1:46:04 AM	Bubbler valve closed
9/8/2010	1:46:04 AM	Main Vac valve opened
9/8/2010	1:46:04 AM	Bypass valve opened
9/8/2010	1:46:04 AM	Helium MFC set to  0.000000
9/8/2010	1:46:04 AM	H2 MFC set to  0.000000
9/8/2010	1:46:04 AM	BCl3 MFC set to  0.000000
9/8/2010	1:46:04 AM	PHl3 MFC set to  0.000000
9/8/2010	1:46:04 AM	SiCl4 MFC set to  0.000000
9/8/2010	1:46:04 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	1:46:04 AM	Tube furnace set to 0
9/8/2010	1:46:57 AM	Run aborted at 1:46 AM
9/8/2010	1:46:58 AM	Helium valve closed
9/8/2010	1:46:58 AM	H2 valve closed
9/8/2010	1:46:58 AM	BCl3 valve closed
9/8/2010	1:46:58 AM	PH3 valve closed
9/8/2010	1:46:58 AM	SiCl4 pre valve closed
9/8/2010	1:46:58 AM	SiCl4 post valve closed
9/8/2010	1:46:58 AM	Bypass valve closed
9/8/2010	1:46:58 AM	Main Vac valve closed
9/8/2010	1:46:58 AM	Bubbler valve closed
9/8/2010	1:46:58 AM	Helium MFC set to  0.000000
9/8/2010	1:46:58 AM	H2 MFC set to  0.000000
9/8/2010	1:46:58 AM	BCl3 MFC set to  0.000000
9/8/2010	1:46:58 AM	PHl3 MFC set to  0.000000
9/8/2010	1:46:58 AM	SiCl4 MFC set to  0.000000
9/8/2010	1:46:58 AM	Tube furnace set to 0
9/8/2010	1:47:07 AM	Bypass valve opened
9/8/2010	1:47:08 AM	Main Vac valve opened
9/8/2010	1:47:29 AM	Recipe started at 1:47 AM
9/8/2010	1:47:29 AM	Helium valve closed
9/8/2010	1:47:29 AM	BCl3 valve closed
9/8/2010	1:47:29 AM	PH3 valve closed
9/8/2010	1:47:29 AM	SiCl4 pre valve closed
9/8/2010	1:47:29 AM	SiCl4 post valve closed
9/8/2010	1:47:29 AM	Main Vac valve closed
9/8/2010	1:47:29 AM	Bypass valve closed
9/8/2010	1:47:29 AM	Bubbler valve closed
9/8/2010	1:47:29 AM	H2 valve opened
9/8/2010	1:47:29 AM	Helium MFC set to  0.000000
9/8/2010	1:47:29 AM	H2 MFC set to  500.000000
9/8/2010	1:47:29 AM	BCl3 MFC set to  0.000000
9/8/2010	1:47:29 AM	PHl3 MFC set to  0.000000
9/8/2010	1:47:29 AM	SiCl4 MFC set to  0.000000
9/8/2010	1:47:29 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	1:47:29 AM	Tube furnace set to 0
9/8/2010	1:48:48 AM	Helium valve closed
9/8/2010	1:48:48 AM	BCl3 valve closed
9/8/2010	1:48:48 AM	PH3 valve closed
9/8/2010	1:48:48 AM	SiCl4 pre valve closed
9/8/2010	1:48:48 AM	SiCl4 post valve closed
9/8/2010	1:48:48 AM	Main Vac valve closed
9/8/2010	1:48:48 AM	Bypass valve closed
9/8/2010	1:48:48 AM	H2 valve opened
9/8/2010	1:48:48 AM	Bubbler valve opened
9/8/2010	1:48:48 AM	Helium MFC set to  0.000000
9/8/2010	1:48:48 AM	H2 MFC set to  500.000000
9/8/2010	1:48:48 AM	BCl3 MFC set to  0.000000
9/8/2010	1:48:48 AM	PHl3 MFC set to  0.000000
9/8/2010	1:48:48 AM	SiCl4 MFC set to  0.000000
9/8/2010	1:48:48 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	1:48:48 AM	Tube furnace set to 1000
9/8/2010	2:08:48 AM	Helium valve closed
9/8/2010	2:08:48 AM	BCl3 valve closed
9/8/2010	2:08:48 AM	PH3 valve closed
9/8/2010	2:08:48 AM	Main Vac valve closed
9/8/2010	2:08:48 AM	Bypass valve closed
9/8/2010	2:08:48 AM	H2 valve opened
9/8/2010	2:08:48 AM	SiCl4 pre valve opened
9/8/2010	2:08:48 AM	SiCl4 post valve opened
9/8/2010	2:08:48 AM	Bubbler valve opened
9/8/2010	2:08:48 AM	Helium MFC set to  0.000000
9/8/2010	2:08:48 AM	H2 MFC set to  500.000000
9/8/2010	2:08:48 AM	BCl3 MFC set to  0.000000
9/8/2010	2:08:48 AM	PHl3 MFC set to  0.000000
9/8/2010	2:08:48 AM	SiCl4 MFC set to  50.000000
9/8/2010	2:08:48 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	2:08:49 AM	Tube furnace set to 1000
9/8/2010	2:28:49 AM	H2 valve closed
9/8/2010	2:28:49 AM	BCl3 valve closed
9/8/2010	2:28:49 AM	PH3 valve closed
9/8/2010	2:28:49 AM	SiCl4 pre valve closed
9/8/2010	2:28:49 AM	SiCl4 post valve closed
9/8/2010	2:28:49 AM	Main Vac valve closed
9/8/2010	2:28:49 AM	Bypass valve closed
9/8/2010	2:28:49 AM	Helium valve opened
9/8/2010	2:28:49 AM	Bubbler valve opened
9/8/2010	2:28:49 AM	Helium MFC set to  500.000000
9/8/2010	2:28:49 AM	H2 MFC set to  0.000000
9/8/2010	2:28:49 AM	BCl3 MFC set to  0.000000
9/8/2010	2:28:49 AM	PHl3 MFC set to  0.000000
9/8/2010	2:28:49 AM	SiCl4 MFC set to  0.000000
9/8/2010	2:28:49 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	2:28:49 AM	Tube furnace set to 950
9/8/2010	2:33:49 AM	H2 valve closed
9/8/2010	2:33:49 AM	BCl3 valve closed
9/8/2010	2:33:49 AM	PH3 valve closed
9/8/2010	2:33:49 AM	SiCl4 pre valve closed
9/8/2010	2:33:49 AM	SiCl4 post valve closed
9/8/2010	2:33:49 AM	Main Vac valve closed
9/8/2010	2:33:49 AM	Bypass valve closed
9/8/2010	2:33:49 AM	Helium valve opened
9/8/2010	2:33:49 AM	Bubbler valve opened
9/8/2010	2:33:49 AM	Helium MFC set to  500.000000
9/8/2010	2:33:49 AM	H2 MFC set to  0.000000
9/8/2010	2:33:49 AM	BCl3 MFC set to  0.000000
9/8/2010	2:33:49 AM	PHl3 MFC set to  0.000000
9/8/2010	2:33:49 AM	SiCl4 MFC set to  0.000000
9/8/2010	2:33:49 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	2:33:49 AM	Tube furnace set to 900
9/8/2010	2:38:49 AM	H2 valve closed
9/8/2010	2:38:49 AM	BCl3 valve closed
9/8/2010	2:38:49 AM	PH3 valve closed
9/8/2010	2:38:49 AM	SiCl4 pre valve closed
9/8/2010	2:38:49 AM	SiCl4 post valve closed
9/8/2010	2:38:49 AM	Main Vac valve closed
9/8/2010	2:38:49 AM	Bypass valve closed
9/8/2010	2:38:49 AM	Helium valve opened
9/8/2010	2:38:49 AM	Bubbler valve opened
9/8/2010	2:38:49 AM	Helium MFC set to  500.000000
9/8/2010	2:38:49 AM	H2 MFC set to  0.000000
9/8/2010	2:38:49 AM	BCl3 MFC set to  0.000000
9/8/2010	2:38:49 AM	PHl3 MFC set to  0.000000
9/8/2010	2:38:49 AM	SiCl4 MFC set to  0.000000
9/8/2010	2:38:49 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	2:38:49 AM	Tube furnace set to 850
9/8/2010	2:43:49 AM	H2 valve closed
9/8/2010	2:43:49 AM	BCl3 valve closed
9/8/2010	2:43:49 AM	PH3 valve closed
9/8/2010	2:43:49 AM	SiCl4 pre valve closed
9/8/2010	2:43:49 AM	SiCl4 post valve closed
9/8/2010	2:43:49 AM	Main Vac valve closed
9/8/2010	2:43:49 AM	Bypass valve closed
9/8/2010	2:43:49 AM	Helium valve opened
9/8/2010	2:43:49 AM	Bubbler valve opened
9/8/2010	2:43:49 AM	Helium MFC set to  500.000000
9/8/2010	2:43:49 AM	H2 MFC set to  0.000000
9/8/2010	2:43:49 AM	BCl3 MFC set to  0.000000
9/8/2010	2:43:49 AM	PHl3 MFC set to  0.000000
9/8/2010	2:43:49 AM	SiCl4 MFC set to  0.000000
9/8/2010	2:43:49 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	2:43:49 AM	Tube furnace set to 800
9/8/2010	2:48:49 AM	H2 valve closed
9/8/2010	2:48:49 AM	BCl3 valve closed
9/8/2010	2:48:49 AM	PH3 valve closed
9/8/2010	2:48:49 AM	SiCl4 pre valve closed
9/8/2010	2:48:49 AM	SiCl4 post valve closed
9/8/2010	2:48:49 AM	Main Vac valve closed
9/8/2010	2:48:49 AM	Bypass valve closed
9/8/2010	2:48:49 AM	Helium valve opened
9/8/2010	2:48:49 AM	Bubbler valve opened
9/8/2010	2:48:49 AM	Helium MFC set to  500.000000
9/8/2010	2:48:49 AM	H2 MFC set to  0.000000
9/8/2010	2:48:49 AM	BCl3 MFC set to  0.000000
9/8/2010	2:48:49 AM	PHl3 MFC set to  0.000000
9/8/2010	2:48:49 AM	SiCl4 MFC set to  0.000000
9/8/2010	2:48:49 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	2:48:49 AM	Tube furnace set to 750
9/8/2010	2:53:50 AM	H2 valve closed
9/8/2010	2:53:50 AM	BCl3 valve closed
9/8/2010	2:53:50 AM	PH3 valve closed
9/8/2010	2:53:50 AM	SiCl4 pre valve closed
9/8/2010	2:53:50 AM	SiCl4 post valve closed
9/8/2010	2:53:50 AM	Main Vac valve closed
9/8/2010	2:53:50 AM	Bypass valve closed
9/8/2010	2:53:50 AM	Helium valve opened
9/8/2010	2:53:50 AM	Bubbler valve opened
9/8/2010	2:53:50 AM	Helium MFC set to  500.000000
9/8/2010	2:53:50 AM	H2 MFC set to  0.000000
9/8/2010	2:53:50 AM	BCl3 MFC set to  0.000000
9/8/2010	2:53:50 AM	PHl3 MFC set to  0.000000
9/8/2010	2:53:50 AM	SiCl4 MFC set to  0.000000
9/8/2010	2:53:50 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	2:53:50 AM	Tube furnace set to 700
9/8/2010	2:58:50 AM	H2 valve closed
9/8/2010	2:58:50 AM	BCl3 valve closed
9/8/2010	2:58:50 AM	PH3 valve closed
9/8/2010	2:58:50 AM	SiCl4 pre valve closed
9/8/2010	2:58:50 AM	SiCl4 post valve closed
9/8/2010	2:58:50 AM	Main Vac valve closed
9/8/2010	2:58:50 AM	Bypass valve closed
9/8/2010	2:58:50 AM	Helium valve opened
9/8/2010	2:58:50 AM	Bubbler valve opened
9/8/2010	2:58:50 AM	Helium MFC set to  500.000000
9/8/2010	2:58:50 AM	H2 MFC set to  0.000000
9/8/2010	2:58:50 AM	BCl3 MFC set to  0.000000
9/8/2010	2:58:50 AM	PHl3 MFC set to  0.000000
9/8/2010	2:58:50 AM	SiCl4 MFC set to  0.000000
9/8/2010	2:58:50 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	2:58:50 AM	Tube furnace set to 0
9/8/2010	3:18:50 AM	Helium valve closed
9/8/2010	3:18:50 AM	H2 valve closed
9/8/2010	3:18:50 AM	BCl3 valve closed
9/8/2010	3:18:50 AM	PH3 valve closed
9/8/2010	3:18:50 AM	SiCl4 pre valve closed
9/8/2010	3:18:50 AM	SiCl4 post valve closed
9/8/2010	3:18:50 AM	Main Vac valve closed
9/8/2010	3:18:50 AM	Bypass valve closed
9/8/2010	3:18:50 AM	Bubbler valve closed
9/8/2010	3:18:50 AM	Helium MFC set to  0.000000
9/8/2010	3:18:50 AM	H2 MFC set to  0.000000
9/8/2010	3:18:50 AM	BCl3 MFC set to  0.000000
9/8/2010	3:18:50 AM	PHl3 MFC set to  0.000000
9/8/2010	3:18:50 AM	SiCl4 MFC set to  0.000000
9/8/2010	3:18:50 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	3:18:50 AM	Tube furnace set to 0
9/8/2010	3:18:50 AM	Run finished at 3:18 AM
9/8/2010	4:13:02 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/8/2010	4:13:03 AM	Recipe started at 4:13 AM
9/8/2010	4:13:03 AM	Helium valve closed
9/8/2010	4:13:03 AM	H2 valve closed
9/8/2010	4:13:03 AM	BCl3 valve closed
9/8/2010	4:13:03 AM	PH3 valve closed
9/8/2010	4:13:03 AM	SiCl4 pre valve closed
9/8/2010	4:13:03 AM	SiCl4 post valve closed
9/8/2010	4:13:03 AM	Main Vac valve closed
9/8/2010	4:13:03 AM	Bubbler valve closed
9/8/2010	4:13:03 AM	Bypass valve opened
9/8/2010	4:13:03 AM	Helium MFC set to  0.000000
9/8/2010	4:13:03 AM	H2 MFC set to  0.000000
9/8/2010	4:13:03 AM	BCl3 MFC set to  0.000000
9/8/2010	4:13:03 AM	PHl3 MFC set to  0.000000
9/8/2010	4:13:03 AM	SiCl4 MFC set to  0.000000
9/8/2010	4:13:03 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	4:13:03 AM	Tube furnace set to 0
9/8/2010	4:13:44 AM	Helium valve closed
9/8/2010	4:13:44 AM	H2 valve closed
9/8/2010	4:13:44 AM	BCl3 valve closed
9/8/2010	4:13:44 AM	PH3 valve closed
9/8/2010	4:13:44 AM	SiCl4 pre valve closed
9/8/2010	4:13:44 AM	SiCl4 post valve closed
9/8/2010	4:13:44 AM	Bubbler valve closed
9/8/2010	4:13:44 AM	Main Vac valve opened
9/8/2010	4:13:44 AM	Bypass valve opened
9/8/2010	4:13:44 AM	Helium MFC set to  0.000000
9/8/2010	4:13:44 AM	H2 MFC set to  0.000000
9/8/2010	4:13:44 AM	BCl3 MFC set to  0.000000
9/8/2010	4:13:44 AM	PHl3 MFC set to  0.000000
9/8/2010	4:13:44 AM	SiCl4 MFC set to  0.000000
9/8/2010	4:13:44 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	4:13:45 AM	Tube furnace set to 0
9/8/2010	4:13:45 AM	Run finished at 4:13 AM
9/8/2010	4:13:45 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/8/2010	4:14:36 AM	Recipe started at 4:14 AM
9/8/2010	4:14:36 AM	Helium valve closed
9/8/2010	4:14:36 AM	H2 valve closed
9/8/2010	4:14:36 AM	BCl3 valve closed
9/8/2010	4:14:36 AM	PH3 valve closed
9/8/2010	4:14:36 AM	SiCl4 pre valve closed
9/8/2010	4:14:36 AM	SiCl4 post valve closed
9/8/2010	4:14:36 AM	Main Vac valve closed
9/8/2010	4:14:36 AM	Bubbler valve closed
9/8/2010	4:14:36 AM	Bypass valve opened
9/8/2010	4:14:36 AM	Helium MFC set to  0.000000
9/8/2010	4:14:36 AM	H2 MFC set to  0.000000
9/8/2010	4:14:36 AM	BCl3 MFC set to  0.000000
9/8/2010	4:14:36 AM	PHl3 MFC set to  0.000000
9/8/2010	4:14:36 AM	SiCl4 MFC set to  0.000000
9/8/2010	4:14:36 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	4:14:36 AM	Tube furnace set to 0
9/8/2010	4:14:37 AM	Helium valve closed
9/8/2010	4:14:37 AM	H2 valve closed
9/8/2010	4:14:37 AM	BCl3 valve closed
9/8/2010	4:14:37 AM	PH3 valve closed
9/8/2010	4:14:37 AM	SiCl4 pre valve closed
9/8/2010	4:14:37 AM	SiCl4 post valve closed
9/8/2010	4:14:37 AM	Bubbler valve closed
9/8/2010	4:14:37 AM	Main Vac valve opened
9/8/2010	4:14:37 AM	Bypass valve opened
9/8/2010	4:14:37 AM	Helium MFC set to  0.000000
9/8/2010	4:14:37 AM	H2 MFC set to  0.000000
9/8/2010	4:14:37 AM	BCl3 MFC set to  0.000000
9/8/2010	4:14:37 AM	PHl3 MFC set to  0.000000
9/8/2010	4:14:37 AM	SiCl4 MFC set to  0.000000
9/8/2010	4:14:37 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	4:14:37 AM	Tube furnace set to 0
9/8/2010	4:15:37 AM	H2 valve closed
9/8/2010	4:15:37 AM	BCl3 valve closed
9/8/2010	4:15:37 AM	PH3 valve closed
9/8/2010	4:15:37 AM	SiCl4 pre valve closed
9/8/2010	4:15:37 AM	SiCl4 post valve closed
9/8/2010	4:15:37 AM	Bubbler valve closed
9/8/2010	4:15:37 AM	Helium valve opened
9/8/2010	4:15:37 AM	Main Vac valve opened
9/8/2010	4:15:37 AM	Bypass valve opened
9/8/2010	4:15:37 AM	Helium MFC set to  100.000000
9/8/2010	4:15:37 AM	H2 MFC set to  0.000000
9/8/2010	4:15:37 AM	BCl3 MFC set to  0.000000
9/8/2010	4:15:37 AM	PHl3 MFC set to  0.000000
9/8/2010	4:15:37 AM	SiCl4 MFC set to  0.000000
9/8/2010	4:15:37 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	4:15:37 AM	Tube furnace set to 0
9/8/2010	4:16:37 AM	Helium valve closed
9/8/2010	4:16:37 AM	H2 valve closed
9/8/2010	4:16:37 AM	BCl3 valve closed
9/8/2010	4:16:37 AM	PH3 valve closed
9/8/2010	4:16:37 AM	SiCl4 pre valve closed
9/8/2010	4:16:37 AM	SiCl4 post valve closed
9/8/2010	4:16:37 AM	Bubbler valve closed
9/8/2010	4:16:37 AM	Main Vac valve opened
9/8/2010	4:16:37 AM	Bypass valve opened
9/8/2010	4:16:37 AM	Helium MFC set to  0.000000
9/8/2010	4:16:37 AM	H2 MFC set to  0.000000
9/8/2010	4:16:37 AM	BCl3 MFC set to  0.000000
9/8/2010	4:16:37 AM	PHl3 MFC set to  0.000000
9/8/2010	4:16:37 AM	SiCl4 MFC set to  0.000000
9/8/2010	4:16:37 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	4:16:37 AM	Tube furnace set to 0
9/8/2010	4:17:37 AM	H2 valve closed
9/8/2010	4:17:37 AM	BCl3 valve closed
9/8/2010	4:17:37 AM	PH3 valve closed
9/8/2010	4:17:37 AM	SiCl4 pre valve closed
9/8/2010	4:17:37 AM	SiCl4 post valve closed
9/8/2010	4:17:37 AM	Bubbler valve closed
9/8/2010	4:17:37 AM	Helium valve opened
9/8/2010	4:17:37 AM	Main Vac valve opened
9/8/2010	4:17:37 AM	Bypass valve opened
9/8/2010	4:17:37 AM	Helium MFC set to  100.000000
9/8/2010	4:17:37 AM	H2 MFC set to  0.000000
9/8/2010	4:17:37 AM	BCl3 MFC set to  0.000000
9/8/2010	4:17:37 AM	PHl3 MFC set to  0.000000
9/8/2010	4:17:37 AM	SiCl4 MFC set to  0.000000
9/8/2010	4:17:37 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	4:17:38 AM	Tube furnace set to 0
9/8/2010	4:18:38 AM	Helium valve closed
9/8/2010	4:18:38 AM	H2 valve closed
9/8/2010	4:18:38 AM	BCl3 valve closed
9/8/2010	4:18:38 AM	PH3 valve closed
9/8/2010	4:18:38 AM	SiCl4 pre valve closed
9/8/2010	4:18:38 AM	SiCl4 post valve closed
9/8/2010	4:18:38 AM	Bubbler valve closed
9/8/2010	4:18:38 AM	Main Vac valve opened
9/8/2010	4:18:38 AM	Bypass valve opened
9/8/2010	4:18:38 AM	Helium MFC set to  0.000000
9/8/2010	4:18:38 AM	H2 MFC set to  0.000000
9/8/2010	4:18:38 AM	BCl3 MFC set to  0.000000
9/8/2010	4:18:38 AM	PHl3 MFC set to  0.000000
9/8/2010	4:18:38 AM	SiCl4 MFC set to  0.000000
9/8/2010	4:18:38 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	4:18:38 AM	Tube furnace set to 0
9/8/2010	4:19:38 AM	H2 valve closed
9/8/2010	4:19:38 AM	BCl3 valve closed
9/8/2010	4:19:38 AM	PH3 valve closed
9/8/2010	4:19:38 AM	SiCl4 pre valve closed
9/8/2010	4:19:38 AM	SiCl4 post valve closed
9/8/2010	4:19:38 AM	Bubbler valve closed
9/8/2010	4:19:38 AM	Helium valve opened
9/8/2010	4:19:38 AM	Main Vac valve opened
9/8/2010	4:19:38 AM	Bypass valve opened
9/8/2010	4:19:38 AM	Helium MFC set to  100.000000
9/8/2010	4:19:38 AM	H2 MFC set to  0.000000
9/8/2010	4:19:38 AM	BCl3 MFC set to  0.000000
9/8/2010	4:19:38 AM	PHl3 MFC set to  0.000000
9/8/2010	4:19:38 AM	SiCl4 MFC set to  0.000000
9/8/2010	4:19:38 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	4:19:38 AM	Tube furnace set to 0
9/8/2010	4:20:38 AM	Helium valve closed
9/8/2010	4:20:38 AM	H2 valve closed
9/8/2010	4:20:38 AM	BCl3 valve closed
9/8/2010	4:20:38 AM	PH3 valve closed
9/8/2010	4:20:38 AM	SiCl4 pre valve closed
9/8/2010	4:20:38 AM	SiCl4 post valve closed
9/8/2010	4:20:38 AM	Bubbler valve closed
9/8/2010	4:20:38 AM	Main Vac valve opened
9/8/2010	4:20:38 AM	Bypass valve opened
9/8/2010	4:20:38 AM	Helium MFC set to  0.000000
9/8/2010	4:20:38 AM	H2 MFC set to  0.000000
9/8/2010	4:20:38 AM	BCl3 MFC set to  0.000000
9/8/2010	4:20:38 AM	PHl3 MFC set to  0.000000
9/8/2010	4:20:38 AM	SiCl4 MFC set to  0.000000
9/8/2010	4:20:38 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	4:20:38 AM	Tube furnace set to 0
9/8/2010	4:21:38 AM	H2 valve closed
9/8/2010	4:21:38 AM	BCl3 valve closed
9/8/2010	4:21:38 AM	PH3 valve closed
9/8/2010	4:21:38 AM	SiCl4 pre valve closed
9/8/2010	4:21:38 AM	SiCl4 post valve closed
9/8/2010	4:21:38 AM	Bubbler valve closed
9/8/2010	4:21:38 AM	Helium valve opened
9/8/2010	4:21:38 AM	Main Vac valve opened
9/8/2010	4:21:38 AM	Bypass valve opened
9/8/2010	4:21:38 AM	Helium MFC set to  100.000000
9/8/2010	4:21:38 AM	H2 MFC set to  0.000000
9/8/2010	4:21:38 AM	BCl3 MFC set to  0.000000
9/8/2010	4:21:38 AM	PHl3 MFC set to  0.000000
9/8/2010	4:21:38 AM	SiCl4 MFC set to  0.000000
9/8/2010	4:21:38 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	4:21:38 AM	Tube furnace set to 0
9/8/2010	4:22:38 AM	Helium valve closed
9/8/2010	4:22:38 AM	H2 valve closed
9/8/2010	4:22:38 AM	BCl3 valve closed
9/8/2010	4:22:38 AM	PH3 valve closed
9/8/2010	4:22:38 AM	SiCl4 pre valve closed
9/8/2010	4:22:38 AM	SiCl4 post valve closed
9/8/2010	4:22:38 AM	Bubbler valve closed
9/8/2010	4:22:38 AM	Main Vac valve opened
9/8/2010	4:22:38 AM	Bypass valve opened
9/8/2010	4:22:38 AM	Helium MFC set to  0.000000
9/8/2010	4:22:38 AM	H2 MFC set to  0.000000
9/8/2010	4:22:38 AM	BCl3 MFC set to  0.000000
9/8/2010	4:22:38 AM	PHl3 MFC set to  0.000000
9/8/2010	4:22:38 AM	SiCl4 MFC set to  0.000000
9/8/2010	4:22:38 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	4:22:39 AM	Tube furnace set to 0
9/8/2010	4:23:39 AM	H2 valve closed
9/8/2010	4:23:39 AM	BCl3 valve closed
9/8/2010	4:23:39 AM	PH3 valve closed
9/8/2010	4:23:39 AM	SiCl4 pre valve closed
9/8/2010	4:23:39 AM	SiCl4 post valve closed
9/8/2010	4:23:39 AM	Bubbler valve closed
9/8/2010	4:23:39 AM	Helium valve opened
9/8/2010	4:23:39 AM	Main Vac valve opened
9/8/2010	4:23:39 AM	Bypass valve opened
9/8/2010	4:23:39 AM	Helium MFC set to  100.000000
9/8/2010	4:23:39 AM	H2 MFC set to  0.000000
9/8/2010	4:23:39 AM	BCl3 MFC set to  0.000000
9/8/2010	4:23:39 AM	PHl3 MFC set to  0.000000
9/8/2010	4:23:39 AM	SiCl4 MFC set to  0.000000
9/8/2010	4:23:39 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	4:23:39 AM	Tube furnace set to 0
9/8/2010	4:24:39 AM	Helium valve closed
9/8/2010	4:24:39 AM	H2 valve closed
9/8/2010	4:24:39 AM	BCl3 valve closed
9/8/2010	4:24:39 AM	PH3 valve closed
9/8/2010	4:24:39 AM	SiCl4 pre valve closed
9/8/2010	4:24:39 AM	SiCl4 post valve closed
9/8/2010	4:24:39 AM	Bubbler valve closed
9/8/2010	4:24:39 AM	Main Vac valve opened
9/8/2010	4:24:39 AM	Bypass valve opened
9/8/2010	4:24:39 AM	Helium MFC set to  0.000000
9/8/2010	4:24:39 AM	H2 MFC set to  0.000000
9/8/2010	4:24:39 AM	BCl3 MFC set to  0.000000
9/8/2010	4:24:39 AM	PHl3 MFC set to  0.000000
9/8/2010	4:24:39 AM	SiCl4 MFC set to  0.000000
9/8/2010	4:24:39 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	4:24:39 AM	Tube furnace set to 0
9/8/2010	4:25:39 AM	H2 valve closed
9/8/2010	4:25:39 AM	BCl3 valve closed
9/8/2010	4:25:39 AM	PH3 valve closed
9/8/2010	4:25:39 AM	SiCl4 pre valve closed
9/8/2010	4:25:39 AM	SiCl4 post valve closed
9/8/2010	4:25:39 AM	Bubbler valve closed
9/8/2010	4:25:39 AM	Helium valve opened
9/8/2010	4:25:39 AM	Main Vac valve opened
9/8/2010	4:25:39 AM	Bypass valve opened
9/8/2010	4:25:39 AM	Helium MFC set to  100.000000
9/8/2010	4:25:39 AM	H2 MFC set to  0.000000
9/8/2010	4:25:39 AM	BCl3 MFC set to  0.000000
9/8/2010	4:25:39 AM	PHl3 MFC set to  0.000000
9/8/2010	4:25:39 AM	SiCl4 MFC set to  0.000000
9/8/2010	4:25:39 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	4:25:39 AM	Tube furnace set to 0
9/8/2010	4:26:39 AM	Helium valve closed
9/8/2010	4:26:39 AM	H2 valve closed
9/8/2010	4:26:39 AM	BCl3 valve closed
9/8/2010	4:26:39 AM	PH3 valve closed
9/8/2010	4:26:39 AM	SiCl4 pre valve closed
9/8/2010	4:26:39 AM	SiCl4 post valve closed
9/8/2010	4:26:39 AM	Bubbler valve closed
9/8/2010	4:26:39 AM	Main Vac valve opened
9/8/2010	4:26:39 AM	Bypass valve opened
9/8/2010	4:26:39 AM	Helium MFC set to  0.000000
9/8/2010	4:26:39 AM	H2 MFC set to  0.000000
9/8/2010	4:26:39 AM	BCl3 MFC set to  0.000000
9/8/2010	4:26:39 AM	PHl3 MFC set to  0.000000
9/8/2010	4:26:39 AM	SiCl4 MFC set to  0.000000
9/8/2010	4:26:39 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	4:26:39 AM	Tube furnace set to 0
9/8/2010	4:27:39 AM	H2 valve closed
9/8/2010	4:27:39 AM	BCl3 valve closed
9/8/2010	4:27:39 AM	PH3 valve closed
9/8/2010	4:27:39 AM	SiCl4 pre valve closed
9/8/2010	4:27:39 AM	SiCl4 post valve closed
9/8/2010	4:27:39 AM	Bubbler valve closed
9/8/2010	4:27:39 AM	Helium valve opened
9/8/2010	4:27:39 AM	Main Vac valve opened
9/8/2010	4:27:39 AM	Bypass valve opened
9/8/2010	4:27:39 AM	Helium MFC set to  100.000000
9/8/2010	4:27:39 AM	H2 MFC set to  0.000000
9/8/2010	4:27:39 AM	BCl3 MFC set to  0.000000
9/8/2010	4:27:39 AM	PHl3 MFC set to  0.000000
9/8/2010	4:27:39 AM	SiCl4 MFC set to  0.000000
9/8/2010	4:27:39 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	4:27:40 AM	Tube furnace set to 0
9/8/2010	4:28:40 AM	Helium valve closed
9/8/2010	4:28:40 AM	H2 valve closed
9/8/2010	4:28:40 AM	BCl3 valve closed
9/8/2010	4:28:40 AM	PH3 valve closed
9/8/2010	4:28:40 AM	SiCl4 pre valve closed
9/8/2010	4:28:40 AM	SiCl4 post valve closed
9/8/2010	4:28:40 AM	Bubbler valve closed
9/8/2010	4:28:40 AM	Main Vac valve opened
9/8/2010	4:28:40 AM	Bypass valve opened
9/8/2010	4:28:40 AM	Helium MFC set to  0.000000
9/8/2010	4:28:40 AM	H2 MFC set to  0.000000
9/8/2010	4:28:40 AM	BCl3 MFC set to  0.000000
9/8/2010	4:28:40 AM	PHl3 MFC set to  0.000000
9/8/2010	4:28:40 AM	SiCl4 MFC set to  0.000000
9/8/2010	4:28:40 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	4:28:40 AM	Tube furnace set to 0
9/8/2010	4:29:40 AM	H2 valve closed
9/8/2010	4:29:40 AM	BCl3 valve closed
9/8/2010	4:29:40 AM	PH3 valve closed
9/8/2010	4:29:40 AM	SiCl4 pre valve closed
9/8/2010	4:29:40 AM	SiCl4 post valve closed
9/8/2010	4:29:40 AM	Bubbler valve closed
9/8/2010	4:29:40 AM	Helium valve opened
9/8/2010	4:29:40 AM	Main Vac valve opened
9/8/2010	4:29:40 AM	Bypass valve opened
9/8/2010	4:29:40 AM	Helium MFC set to  100.000000
9/8/2010	4:29:40 AM	H2 MFC set to  0.000000
9/8/2010	4:29:40 AM	BCl3 MFC set to  0.000000
9/8/2010	4:29:40 AM	PHl3 MFC set to  0.000000
9/8/2010	4:29:40 AM	SiCl4 MFC set to  0.000000
9/8/2010	4:29:40 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	4:29:40 AM	Tube furnace set to 0
9/8/2010	4:30:40 AM	Helium valve closed
9/8/2010	4:30:40 AM	H2 valve closed
9/8/2010	4:30:40 AM	BCl3 valve closed
9/8/2010	4:30:40 AM	PH3 valve closed
9/8/2010	4:30:40 AM	SiCl4 pre valve closed
9/8/2010	4:30:40 AM	SiCl4 post valve closed
9/8/2010	4:30:40 AM	Bubbler valve closed
9/8/2010	4:30:40 AM	Main Vac valve opened
9/8/2010	4:30:40 AM	Bypass valve opened
9/8/2010	4:30:40 AM	Helium MFC set to  0.000000
9/8/2010	4:30:40 AM	H2 MFC set to  0.000000
9/8/2010	4:30:40 AM	BCl3 MFC set to  0.000000
9/8/2010	4:30:40 AM	PHl3 MFC set to  0.000000
9/8/2010	4:30:40 AM	SiCl4 MFC set to  0.000000
9/8/2010	4:30:40 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	4:30:40 AM	Tube furnace set to 0
9/8/2010	4:31:40 AM	H2 valve closed
9/8/2010	4:31:40 AM	BCl3 valve closed
9/8/2010	4:31:40 AM	PH3 valve closed
9/8/2010	4:31:40 AM	SiCl4 pre valve closed
9/8/2010	4:31:40 AM	SiCl4 post valve closed
9/8/2010	4:31:40 AM	Bubbler valve closed
9/8/2010	4:31:40 AM	Helium valve opened
9/8/2010	4:31:40 AM	Main Vac valve opened
9/8/2010	4:31:40 AM	Bypass valve opened
9/8/2010	4:31:40 AM	Helium MFC set to  100.000000
9/8/2010	4:31:40 AM	H2 MFC set to  0.000000
9/8/2010	4:31:40 AM	BCl3 MFC set to  0.000000
9/8/2010	4:31:40 AM	PHl3 MFC set to  0.000000
9/8/2010	4:31:40 AM	SiCl4 MFC set to  0.000000
9/8/2010	4:31:40 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	4:31:40 AM	Tube furnace set to 0
9/8/2010	4:32:40 AM	Helium valve closed
9/8/2010	4:32:40 AM	H2 valve closed
9/8/2010	4:32:40 AM	BCl3 valve closed
9/8/2010	4:32:40 AM	PH3 valve closed
9/8/2010	4:32:40 AM	SiCl4 pre valve closed
9/8/2010	4:32:40 AM	SiCl4 post valve closed
9/8/2010	4:32:40 AM	Bubbler valve closed
9/8/2010	4:32:40 AM	Main Vac valve opened
9/8/2010	4:32:40 AM	Bypass valve opened
9/8/2010	4:32:40 AM	Helium MFC set to  0.000000
9/8/2010	4:32:40 AM	H2 MFC set to  0.000000
9/8/2010	4:32:40 AM	BCl3 MFC set to  0.000000
9/8/2010	4:32:40 AM	PHl3 MFC set to  0.000000
9/8/2010	4:32:40 AM	SiCl4 MFC set to  0.000000
9/8/2010	4:32:40 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	4:32:41 AM	Tube furnace set to 0
9/8/2010	4:33:41 AM	H2 valve closed
9/8/2010	4:33:41 AM	BCl3 valve closed
9/8/2010	4:33:41 AM	PH3 valve closed
9/8/2010	4:33:41 AM	SiCl4 pre valve closed
9/8/2010	4:33:41 AM	SiCl4 post valve closed
9/8/2010	4:33:41 AM	Bubbler valve closed
9/8/2010	4:33:41 AM	Helium valve opened
9/8/2010	4:33:41 AM	Main Vac valve opened
9/8/2010	4:33:41 AM	Bypass valve opened
9/8/2010	4:33:41 AM	Helium MFC set to  100.000000
9/8/2010	4:33:41 AM	H2 MFC set to  0.000000
9/8/2010	4:33:41 AM	BCl3 MFC set to  0.000000
9/8/2010	4:33:41 AM	PHl3 MFC set to  0.000000
9/8/2010	4:33:41 AM	SiCl4 MFC set to  0.000000
9/8/2010	4:33:41 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	4:33:41 AM	Tube furnace set to 0
9/8/2010	4:34:41 AM	Helium valve closed
9/8/2010	4:34:41 AM	H2 valve closed
9/8/2010	4:34:41 AM	BCl3 valve closed
9/8/2010	4:34:41 AM	PH3 valve closed
9/8/2010	4:34:41 AM	SiCl4 pre valve closed
9/8/2010	4:34:41 AM	SiCl4 post valve closed
9/8/2010	4:34:41 AM	Bubbler valve closed
9/8/2010	4:34:41 AM	Main Vac valve opened
9/8/2010	4:34:41 AM	Bypass valve opened
9/8/2010	4:34:41 AM	Helium MFC set to  0.000000
9/8/2010	4:34:41 AM	H2 MFC set to  0.000000
9/8/2010	4:34:41 AM	BCl3 MFC set to  0.000000
9/8/2010	4:34:41 AM	PHl3 MFC set to  0.000000
9/8/2010	4:34:41 AM	SiCl4 MFC set to  0.000000
9/8/2010	4:34:41 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	4:34:41 AM	Tube furnace set to 0
9/8/2010	4:34:42 AM	Run finished at 4:34 AM
9/8/2010	4:52:53 AM	Recipe started at 4:52 AM
9/8/2010	4:52:53 AM	Helium valve closed
9/8/2010	4:52:53 AM	H2 valve closed
9/8/2010	4:52:53 AM	BCl3 valve closed
9/8/2010	4:52:53 AM	PH3 valve closed
9/8/2010	4:52:53 AM	SiCl4 pre valve closed
9/8/2010	4:52:53 AM	SiCl4 post valve closed
9/8/2010	4:52:53 AM	Main Vac valve closed
9/8/2010	4:52:53 AM	Bubbler valve closed
9/8/2010	4:52:53 AM	Bypass valve opened
9/8/2010	4:52:53 AM	Helium MFC set to  0.000000
9/8/2010	4:52:53 AM	H2 MFC set to  0.000000
9/8/2010	4:52:53 AM	BCl3 MFC set to  0.000000
9/8/2010	4:52:53 AM	PHl3 MFC set to  0.000000
9/8/2010	4:52:53 AM	SiCl4 MFC set to  0.000000
9/8/2010	4:52:53 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	4:52:53 AM	Tube furnace set to 0
9/8/2010	4:52:53 AM	Helium valve closed
9/8/2010	4:52:53 AM	H2 valve closed
9/8/2010	4:52:53 AM	BCl3 valve closed
9/8/2010	4:52:53 AM	PH3 valve closed
9/8/2010	4:52:53 AM	SiCl4 pre valve closed
9/8/2010	4:52:53 AM	SiCl4 post valve closed
9/8/2010	4:52:53 AM	Bubbler valve closed
9/8/2010	4:52:53 AM	Main Vac valve opened
9/8/2010	4:52:53 AM	Bypass valve opened
9/8/2010	4:52:53 AM	Helium MFC set to  0.000000
9/8/2010	4:52:53 AM	H2 MFC set to  0.000000
9/8/2010	4:52:53 AM	BCl3 MFC set to  0.000000
9/8/2010	4:52:53 AM	PHl3 MFC set to  0.000000
9/8/2010	4:52:53 AM	SiCl4 MFC set to  0.000000
9/8/2010	4:52:53 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	4:52:53 AM	Tube furnace set to 0
9/8/2010	4:53:53 AM	H2 valve closed
9/8/2010	4:53:53 AM	BCl3 valve closed
9/8/2010	4:53:53 AM	PH3 valve closed
9/8/2010	4:53:53 AM	SiCl4 pre valve closed
9/8/2010	4:53:53 AM	SiCl4 post valve closed
9/8/2010	4:53:53 AM	Bubbler valve closed
9/8/2010	4:53:53 AM	Helium valve opened
9/8/2010	4:53:53 AM	Main Vac valve opened
9/8/2010	4:53:53 AM	Bypass valve opened
9/8/2010	4:53:53 AM	Helium MFC set to  100.000000
9/8/2010	4:53:53 AM	H2 MFC set to  0.000000
9/8/2010	4:53:53 AM	BCl3 MFC set to  0.000000
9/8/2010	4:53:53 AM	PHl3 MFC set to  0.000000
9/8/2010	4:53:53 AM	SiCl4 MFC set to  0.000000
9/8/2010	4:53:53 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	4:53:53 AM	Tube furnace set to 0
9/8/2010	4:54:53 AM	Helium valve closed
9/8/2010	4:54:53 AM	H2 valve closed
9/8/2010	4:54:54 AM	BCl3 valve closed
9/8/2010	4:54:54 AM	PH3 valve closed
9/8/2010	4:54:54 AM	SiCl4 pre valve closed
9/8/2010	4:54:54 AM	SiCl4 post valve closed
9/8/2010	4:54:54 AM	Bubbler valve closed
9/8/2010	4:54:54 AM	Main Vac valve opened
9/8/2010	4:54:54 AM	Bypass valve opened
9/8/2010	4:54:54 AM	Helium MFC set to  0.000000
9/8/2010	4:54:54 AM	H2 MFC set to  0.000000
9/8/2010	4:54:54 AM	BCl3 MFC set to  0.000000
9/8/2010	4:54:54 AM	PHl3 MFC set to  0.000000
9/8/2010	4:54:54 AM	SiCl4 MFC set to  0.000000
9/8/2010	4:54:54 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	4:54:54 AM	Tube furnace set to 0
9/8/2010	4:55:54 AM	H2 valve closed
9/8/2010	4:55:54 AM	BCl3 valve closed
9/8/2010	4:55:54 AM	PH3 valve closed
9/8/2010	4:55:54 AM	SiCl4 pre valve closed
9/8/2010	4:55:54 AM	SiCl4 post valve closed
9/8/2010	4:55:54 AM	Bubbler valve closed
9/8/2010	4:55:54 AM	Helium valve opened
9/8/2010	4:55:54 AM	Main Vac valve opened
9/8/2010	4:55:54 AM	Bypass valve opened
9/8/2010	4:55:54 AM	Helium MFC set to  100.000000
9/8/2010	4:55:54 AM	H2 MFC set to  0.000000
9/8/2010	4:55:54 AM	BCl3 MFC set to  0.000000
9/8/2010	4:55:54 AM	PHl3 MFC set to  0.000000
9/8/2010	4:55:54 AM	SiCl4 MFC set to  0.000000
9/8/2010	4:55:54 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	4:55:54 AM	Tube furnace set to 0
9/8/2010	4:56:54 AM	Helium valve closed
9/8/2010	4:56:54 AM	H2 valve closed
9/8/2010	4:56:54 AM	BCl3 valve closed
9/8/2010	4:56:54 AM	PH3 valve closed
9/8/2010	4:56:54 AM	SiCl4 pre valve closed
9/8/2010	4:56:54 AM	SiCl4 post valve closed
9/8/2010	4:56:54 AM	Bubbler valve closed
9/8/2010	4:56:54 AM	Main Vac valve opened
9/8/2010	4:56:54 AM	Bypass valve opened
9/8/2010	4:56:54 AM	Helium MFC set to  0.000000
9/8/2010	4:56:54 AM	H2 MFC set to  0.000000
9/8/2010	4:56:54 AM	BCl3 MFC set to  0.000000
9/8/2010	4:56:54 AM	PHl3 MFC set to  0.000000
9/8/2010	4:56:54 AM	SiCl4 MFC set to  0.000000
9/8/2010	4:56:54 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	4:56:54 AM	Tube furnace set to 0
9/8/2010	4:57:54 AM	H2 valve closed
9/8/2010	4:57:54 AM	BCl3 valve closed
9/8/2010	4:57:54 AM	PH3 valve closed
9/8/2010	4:57:54 AM	SiCl4 pre valve closed
9/8/2010	4:57:54 AM	SiCl4 post valve closed
9/8/2010	4:57:54 AM	Bubbler valve closed
9/8/2010	4:57:54 AM	Helium valve opened
9/8/2010	4:57:54 AM	Main Vac valve opened
9/8/2010	4:57:54 AM	Bypass valve opened
9/8/2010	4:57:54 AM	Helium MFC set to  100.000000
9/8/2010	4:57:54 AM	H2 MFC set to  0.000000
9/8/2010	4:57:54 AM	BCl3 MFC set to  0.000000
9/8/2010	4:57:54 AM	PHl3 MFC set to  0.000000
9/8/2010	4:57:54 AM	SiCl4 MFC set to  0.000000
9/8/2010	4:57:54 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	4:57:54 AM	Tube furnace set to 0
9/8/2010	4:58:54 AM	Helium valve closed
9/8/2010	4:58:54 AM	H2 valve closed
9/8/2010	4:58:54 AM	BCl3 valve closed
9/8/2010	4:58:54 AM	PH3 valve closed
9/8/2010	4:58:54 AM	SiCl4 pre valve closed
9/8/2010	4:58:54 AM	SiCl4 post valve closed
9/8/2010	4:58:54 AM	Bubbler valve closed
9/8/2010	4:58:54 AM	Main Vac valve opened
9/8/2010	4:58:54 AM	Bypass valve opened
9/8/2010	4:58:54 AM	Helium MFC set to  0.000000
9/8/2010	4:58:54 AM	H2 MFC set to  0.000000
9/8/2010	4:58:54 AM	BCl3 MFC set to  0.000000
9/8/2010	4:58:54 AM	PHl3 MFC set to  0.000000
9/8/2010	4:58:54 AM	SiCl4 MFC set to  0.000000
9/8/2010	4:58:54 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	4:58:54 AM	Tube furnace set to 0
9/8/2010	4:59:55 AM	H2 valve closed
9/8/2010	4:59:55 AM	BCl3 valve closed
9/8/2010	4:59:55 AM	PH3 valve closed
9/8/2010	4:59:55 AM	SiCl4 pre valve closed
9/8/2010	4:59:55 AM	SiCl4 post valve closed
9/8/2010	4:59:55 AM	Bubbler valve closed
9/8/2010	4:59:55 AM	Helium valve opened
9/8/2010	4:59:55 AM	Main Vac valve opened
9/8/2010	4:59:55 AM	Bypass valve opened
9/8/2010	4:59:55 AM	Helium MFC set to  100.000000
9/8/2010	4:59:55 AM	H2 MFC set to  0.000000
9/8/2010	4:59:55 AM	BCl3 MFC set to  0.000000
9/8/2010	4:59:55 AM	PHl3 MFC set to  0.000000
9/8/2010	4:59:55 AM	SiCl4 MFC set to  0.000000
9/8/2010	4:59:55 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	4:59:55 AM	Tube furnace set to 0
9/8/2010	5:00:55 AM	Helium valve closed
9/8/2010	5:00:55 AM	H2 valve closed
9/8/2010	5:00:55 AM	BCl3 valve closed
9/8/2010	5:00:55 AM	PH3 valve closed
9/8/2010	5:00:55 AM	SiCl4 pre valve closed
9/8/2010	5:00:55 AM	SiCl4 post valve closed
9/8/2010	5:00:55 AM	Bubbler valve closed
9/8/2010	5:00:55 AM	Main Vac valve opened
9/8/2010	5:00:55 AM	Bypass valve opened
9/8/2010	5:00:55 AM	Helium MFC set to  0.000000
9/8/2010	5:00:55 AM	H2 MFC set to  0.000000
9/8/2010	5:00:55 AM	BCl3 MFC set to  0.000000
9/8/2010	5:00:55 AM	PHl3 MFC set to  0.000000
9/8/2010	5:00:55 AM	SiCl4 MFC set to  0.000000
9/8/2010	5:00:55 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	5:00:55 AM	Tube furnace set to 0
9/8/2010	5:01:55 AM	H2 valve closed
9/8/2010	5:01:55 AM	BCl3 valve closed
9/8/2010	5:01:55 AM	PH3 valve closed
9/8/2010	5:01:55 AM	SiCl4 pre valve closed
9/8/2010	5:01:55 AM	SiCl4 post valve closed
9/8/2010	5:01:55 AM	Bubbler valve closed
9/8/2010	5:01:55 AM	Helium valve opened
9/8/2010	5:01:55 AM	Main Vac valve opened
9/8/2010	5:01:55 AM	Bypass valve opened
9/8/2010	5:01:55 AM	Helium MFC set to  100.000000
9/8/2010	5:01:55 AM	H2 MFC set to  0.000000
9/8/2010	5:01:55 AM	BCl3 MFC set to  0.000000
9/8/2010	5:01:55 AM	PHl3 MFC set to  0.000000
9/8/2010	5:01:55 AM	SiCl4 MFC set to  0.000000
9/8/2010	5:01:55 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	5:01:55 AM	Tube furnace set to 0
9/8/2010	5:02:55 AM	Helium valve closed
9/8/2010	5:02:55 AM	H2 valve closed
9/8/2010	5:02:55 AM	BCl3 valve closed
9/8/2010	5:02:55 AM	PH3 valve closed
9/8/2010	5:02:55 AM	SiCl4 pre valve closed
9/8/2010	5:02:55 AM	SiCl4 post valve closed
9/8/2010	5:02:55 AM	Bubbler valve closed
9/8/2010	5:02:55 AM	Main Vac valve opened
9/8/2010	5:02:55 AM	Bypass valve opened
9/8/2010	5:02:55 AM	Helium MFC set to  0.000000
9/8/2010	5:02:55 AM	H2 MFC set to  0.000000
9/8/2010	5:02:55 AM	BCl3 MFC set to  0.000000
9/8/2010	5:02:55 AM	PHl3 MFC set to  0.000000
9/8/2010	5:02:55 AM	SiCl4 MFC set to  0.000000
9/8/2010	5:02:55 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	5:02:55 AM	Tube furnace set to 0
9/8/2010	5:03:55 AM	H2 valve closed
9/8/2010	5:03:55 AM	BCl3 valve closed
9/8/2010	5:03:55 AM	PH3 valve closed
9/8/2010	5:03:55 AM	SiCl4 pre valve closed
9/8/2010	5:03:55 AM	SiCl4 post valve closed
9/8/2010	5:03:55 AM	Bubbler valve closed
9/8/2010	5:03:55 AM	Helium valve opened
9/8/2010	5:03:55 AM	Main Vac valve opened
9/8/2010	5:03:55 AM	Bypass valve opened
9/8/2010	5:03:55 AM	Helium MFC set to  100.000000
9/8/2010	5:03:55 AM	H2 MFC set to  0.000000
9/8/2010	5:03:55 AM	BCl3 MFC set to  0.000000
9/8/2010	5:03:55 AM	PHl3 MFC set to  0.000000
9/8/2010	5:03:55 AM	SiCl4 MFC set to  0.000000
9/8/2010	5:03:55 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	5:03:55 AM	Tube furnace set to 0
9/8/2010	5:04:55 AM	Helium valve closed
9/8/2010	5:04:55 AM	H2 valve closed
9/8/2010	5:04:55 AM	BCl3 valve closed
9/8/2010	5:04:55 AM	PH3 valve closed
9/8/2010	5:04:55 AM	SiCl4 pre valve closed
9/8/2010	5:04:55 AM	SiCl4 post valve closed
9/8/2010	5:04:55 AM	Bubbler valve closed
9/8/2010	5:04:55 AM	Main Vac valve opened
9/8/2010	5:04:55 AM	Bypass valve opened
9/8/2010	5:04:55 AM	Helium MFC set to  0.000000
9/8/2010	5:04:55 AM	H2 MFC set to  0.000000
9/8/2010	5:04:55 AM	BCl3 MFC set to  0.000000
9/8/2010	5:04:55 AM	PHl3 MFC set to  0.000000
9/8/2010	5:04:55 AM	SiCl4 MFC set to  0.000000
9/8/2010	5:04:55 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	5:04:56 AM	Tube furnace set to 0
9/8/2010	5:05:56 AM	H2 valve closed
9/8/2010	5:05:56 AM	BCl3 valve closed
9/8/2010	5:05:56 AM	PH3 valve closed
9/8/2010	5:05:56 AM	SiCl4 pre valve closed
9/8/2010	5:05:56 AM	SiCl4 post valve closed
9/8/2010	5:05:56 AM	Bubbler valve closed
9/8/2010	5:05:56 AM	Helium valve opened
9/8/2010	5:05:56 AM	Main Vac valve opened
9/8/2010	5:05:56 AM	Bypass valve opened
9/8/2010	5:05:56 AM	Helium MFC set to  100.000000
9/8/2010	5:05:56 AM	H2 MFC set to  0.000000
9/8/2010	5:05:56 AM	BCl3 MFC set to  0.000000
9/8/2010	5:05:56 AM	PHl3 MFC set to  0.000000
9/8/2010	5:05:56 AM	SiCl4 MFC set to  0.000000
9/8/2010	5:05:56 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	5:05:56 AM	Tube furnace set to 0
9/8/2010	5:06:56 AM	Helium valve closed
9/8/2010	5:06:56 AM	H2 valve closed
9/8/2010	5:06:56 AM	BCl3 valve closed
9/8/2010	5:06:56 AM	PH3 valve closed
9/8/2010	5:06:56 AM	SiCl4 pre valve closed
9/8/2010	5:06:56 AM	SiCl4 post valve closed
9/8/2010	5:06:56 AM	Bubbler valve closed
9/8/2010	5:06:56 AM	Main Vac valve opened
9/8/2010	5:06:56 AM	Bypass valve opened
9/8/2010	5:06:56 AM	Helium MFC set to  0.000000
9/8/2010	5:06:56 AM	H2 MFC set to  0.000000
9/8/2010	5:06:56 AM	BCl3 MFC set to  0.000000
9/8/2010	5:06:56 AM	PHl3 MFC set to  0.000000
9/8/2010	5:06:56 AM	SiCl4 MFC set to  0.000000
9/8/2010	5:06:56 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	5:06:56 AM	Tube furnace set to 0
9/8/2010	5:07:56 AM	H2 valve closed
9/8/2010	5:07:56 AM	BCl3 valve closed
9/8/2010	5:07:56 AM	PH3 valve closed
9/8/2010	5:07:56 AM	SiCl4 pre valve closed
9/8/2010	5:07:56 AM	SiCl4 post valve closed
9/8/2010	5:07:56 AM	Bubbler valve closed
9/8/2010	5:07:56 AM	Helium valve opened
9/8/2010	5:07:56 AM	Main Vac valve opened
9/8/2010	5:07:56 AM	Bypass valve opened
9/8/2010	5:07:56 AM	Helium MFC set to  100.000000
9/8/2010	5:07:56 AM	H2 MFC set to  0.000000
9/8/2010	5:07:56 AM	BCl3 MFC set to  0.000000
9/8/2010	5:07:56 AM	PHl3 MFC set to  0.000000
9/8/2010	5:07:56 AM	SiCl4 MFC set to  0.000000
9/8/2010	5:07:56 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	5:07:56 AM	Tube furnace set to 0
9/8/2010	5:08:56 AM	Helium valve closed
9/8/2010	5:08:56 AM	H2 valve closed
9/8/2010	5:08:56 AM	BCl3 valve closed
9/8/2010	5:08:56 AM	PH3 valve closed
9/8/2010	5:08:56 AM	SiCl4 pre valve closed
9/8/2010	5:08:56 AM	SiCl4 post valve closed
9/8/2010	5:08:56 AM	Bubbler valve closed
9/8/2010	5:08:56 AM	Main Vac valve opened
9/8/2010	5:08:56 AM	Bypass valve opened
9/8/2010	5:08:56 AM	Helium MFC set to  0.000000
9/8/2010	5:08:56 AM	H2 MFC set to  0.000000
9/8/2010	5:08:56 AM	BCl3 MFC set to  0.000000
9/8/2010	5:08:56 AM	PHl3 MFC set to  0.000000
9/8/2010	5:08:56 AM	SiCl4 MFC set to  0.000000
9/8/2010	5:08:56 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	5:08:56 AM	Tube furnace set to 0
9/8/2010	5:09:56 AM	H2 valve closed
9/8/2010	5:09:56 AM	BCl3 valve closed
9/8/2010	5:09:56 AM	PH3 valve closed
9/8/2010	5:09:56 AM	SiCl4 pre valve closed
9/8/2010	5:09:56 AM	SiCl4 post valve closed
9/8/2010	5:09:56 AM	Bubbler valve closed
9/8/2010	5:09:56 AM	Helium valve opened
9/8/2010	5:09:56 AM	Main Vac valve opened
9/8/2010	5:09:56 AM	Bypass valve opened
9/8/2010	5:09:56 AM	Helium MFC set to  100.000000
9/8/2010	5:09:56 AM	H2 MFC set to  0.000000
9/8/2010	5:09:56 AM	BCl3 MFC set to  0.000000
9/8/2010	5:09:56 AM	PHl3 MFC set to  0.000000
9/8/2010	5:09:56 AM	SiCl4 MFC set to  0.000000
9/8/2010	5:09:56 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	5:09:57 AM	Tube furnace set to 0
9/8/2010	5:10:57 AM	Helium valve closed
9/8/2010	5:10:57 AM	H2 valve closed
9/8/2010	5:10:57 AM	BCl3 valve closed
9/8/2010	5:10:57 AM	PH3 valve closed
9/8/2010	5:10:57 AM	SiCl4 pre valve closed
9/8/2010	5:10:57 AM	SiCl4 post valve closed
9/8/2010	5:10:57 AM	Bubbler valve closed
9/8/2010	5:10:57 AM	Main Vac valve opened
9/8/2010	5:10:57 AM	Bypass valve opened
9/8/2010	5:10:57 AM	Helium MFC set to  0.000000
9/8/2010	5:10:57 AM	H2 MFC set to  0.000000
9/8/2010	5:10:57 AM	BCl3 MFC set to  0.000000
9/8/2010	5:10:57 AM	PHl3 MFC set to  0.000000
9/8/2010	5:10:57 AM	SiCl4 MFC set to  0.000000
9/8/2010	5:10:57 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	5:10:57 AM	Tube furnace set to 0
9/8/2010	5:11:57 AM	H2 valve closed
9/8/2010	5:11:57 AM	BCl3 valve closed
9/8/2010	5:11:57 AM	PH3 valve closed
9/8/2010	5:11:57 AM	SiCl4 pre valve closed
9/8/2010	5:11:57 AM	SiCl4 post valve closed
9/8/2010	5:11:57 AM	Bubbler valve closed
9/8/2010	5:11:57 AM	Helium valve opened
9/8/2010	5:11:57 AM	Main Vac valve opened
9/8/2010	5:11:57 AM	Bypass valve opened
9/8/2010	5:11:57 AM	Helium MFC set to  100.000000
9/8/2010	5:11:57 AM	H2 MFC set to  0.000000
9/8/2010	5:11:57 AM	BCl3 MFC set to  0.000000
9/8/2010	5:11:57 AM	PHl3 MFC set to  0.000000
9/8/2010	5:11:57 AM	SiCl4 MFC set to  0.000000
9/8/2010	5:11:57 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	5:11:57 AM	Tube furnace set to 0
9/8/2010	5:12:33 AM	Helium valve closed
9/8/2010	5:12:33 AM	H2 valve closed
9/8/2010	5:12:33 AM	BCl3 valve closed
9/8/2010	5:12:33 AM	PH3 valve closed
9/8/2010	5:12:33 AM	SiCl4 pre valve closed
9/8/2010	5:12:33 AM	SiCl4 post valve closed
9/8/2010	5:12:33 AM	Bubbler valve closed
9/8/2010	5:12:33 AM	Main Vac valve opened
9/8/2010	5:12:33 AM	Bypass valve opened
9/8/2010	5:12:33 AM	Helium MFC set to  0.000000
9/8/2010	5:12:33 AM	H2 MFC set to  0.000000
9/8/2010	5:12:33 AM	BCl3 MFC set to  0.000000
9/8/2010	5:12:33 AM	PHl3 MFC set to  0.000000
9/8/2010	5:12:33 AM	SiCl4 MFC set to  0.000000
9/8/2010	5:12:33 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	5:12:33 AM	Tube furnace set to 0
9/8/2010	5:12:34 AM	Run finished at 5:12 AM
9/8/2010	5:13:22 AM	Bypass valve closed
9/8/2010	5:13:22 AM	Main Vac valve closed
9/8/2010	5:13:31 AM	Bypass valve opened
9/8/2010	5:13:31 AM	Main Vac valve opened
9/8/2010	5:14:00 AM	Helium MFC set to  100.000000
9/8/2010	5:14:01 AM	Helium valve opened
9/8/2010	5:14:04 AM	Helium valve closed
9/8/2010	5:14:59 AM	Recipe started at 5:14 AM
9/8/2010	5:15:00 AM	Helium valve closed
9/8/2010	5:15:00 AM	BCl3 valve closed
9/8/2010	5:15:00 AM	PH3 valve closed
9/8/2010	5:15:00 AM	SiCl4 pre valve closed
9/8/2010	5:15:00 AM	SiCl4 post valve closed
9/8/2010	5:15:00 AM	Main Vac valve closed
9/8/2010	5:15:00 AM	Bypass valve closed
9/8/2010	5:15:00 AM	Bubbler valve closed
9/8/2010	5:15:00 AM	H2 valve opened
9/8/2010	5:15:00 AM	Helium MFC set to  0.000000
9/8/2010	5:15:00 AM	H2 MFC set to  500.000000
9/8/2010	5:15:00 AM	BCl3 MFC set to  0.000000
9/8/2010	5:15:00 AM	PHl3 MFC set to  0.000000
9/8/2010	5:15:00 AM	SiCl4 MFC set to  0.000000
9/8/2010	5:15:00 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	5:15:00 AM	Tube furnace set to 0
9/8/2010	5:16:19 AM	Helium valve closed
9/8/2010	5:16:19 AM	BCl3 valve closed
9/8/2010	5:16:19 AM	PH3 valve closed
9/8/2010	5:16:19 AM	SiCl4 pre valve closed
9/8/2010	5:16:19 AM	SiCl4 post valve closed
9/8/2010	5:16:19 AM	Main Vac valve closed
9/8/2010	5:16:19 AM	Bypass valve closed
9/8/2010	5:16:19 AM	H2 valve opened
9/8/2010	5:16:19 AM	Bubbler valve opened
9/8/2010	5:16:19 AM	Helium MFC set to  0.000000
9/8/2010	5:16:19 AM	H2 MFC set to  500.000000
9/8/2010	5:16:19 AM	BCl3 MFC set to  0.000000
9/8/2010	5:16:19 AM	PHl3 MFC set to  0.000000
9/8/2010	5:16:19 AM	SiCl4 MFC set to  0.000000
9/8/2010	5:16:19 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	5:16:19 AM	Tube furnace set to 1000
9/8/2010	5:36:19 AM	Helium valve closed
9/8/2010	5:36:19 AM	BCl3 valve closed
9/8/2010	5:36:19 AM	PH3 valve closed
9/8/2010	5:36:19 AM	Main Vac valve closed
9/8/2010	5:36:19 AM	Bypass valve closed
9/8/2010	5:36:19 AM	H2 valve opened
9/8/2010	5:36:19 AM	SiCl4 pre valve opened
9/8/2010	5:36:19 AM	SiCl4 post valve opened
9/8/2010	5:36:19 AM	Bubbler valve opened
9/8/2010	5:36:19 AM	Helium MFC set to  0.000000
9/8/2010	5:36:19 AM	H2 MFC set to  500.000000
9/8/2010	5:36:19 AM	BCl3 MFC set to  0.000000
9/8/2010	5:36:19 AM	PHl3 MFC set to  0.000000
9/8/2010	5:36:19 AM	SiCl4 MFC set to  50.000000
9/8/2010	5:36:19 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	5:36:19 AM	Tube furnace set to 1000
9/8/2010	5:56:19 AM	H2 valve closed
9/8/2010	5:56:19 AM	BCl3 valve closed
9/8/2010	5:56:19 AM	PH3 valve closed
9/8/2010	5:56:19 AM	SiCl4 pre valve closed
9/8/2010	5:56:19 AM	SiCl4 post valve closed
9/8/2010	5:56:19 AM	Main Vac valve closed
9/8/2010	5:56:19 AM	Bypass valve closed
9/8/2010	5:56:19 AM	Helium valve opened
9/8/2010	5:56:19 AM	Bubbler valve opened
9/8/2010	5:56:19 AM	Helium MFC set to  500.000000
9/8/2010	5:56:19 AM	H2 MFC set to  0.000000
9/8/2010	5:56:19 AM	BCl3 MFC set to  0.000000
9/8/2010	5:56:19 AM	PHl3 MFC set to  0.000000
9/8/2010	5:56:19 AM	SiCl4 MFC set to  0.000000
9/8/2010	5:56:19 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	5:56:19 AM	Tube furnace set to 950
9/8/2010	6:01:20 AM	H2 valve closed
9/8/2010	6:01:20 AM	BCl3 valve closed
9/8/2010	6:01:20 AM	PH3 valve closed
9/8/2010	6:01:20 AM	SiCl4 pre valve closed
9/8/2010	6:01:20 AM	SiCl4 post valve closed
9/8/2010	6:01:20 AM	Main Vac valve closed
9/8/2010	6:01:20 AM	Bypass valve closed
9/8/2010	6:01:20 AM	Helium valve opened
9/8/2010	6:01:20 AM	Bubbler valve opened
9/8/2010	6:01:20 AM	Helium MFC set to  500.000000
9/8/2010	6:01:20 AM	H2 MFC set to  0.000000
9/8/2010	6:01:20 AM	BCl3 MFC set to  0.000000
9/8/2010	6:01:20 AM	PHl3 MFC set to  0.000000
9/8/2010	6:01:20 AM	SiCl4 MFC set to  0.000000
9/8/2010	6:01:20 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	6:01:20 AM	Tube furnace set to 900
9/8/2010	6:06:20 AM	H2 valve closed
9/8/2010	6:06:20 AM	BCl3 valve closed
9/8/2010	6:06:20 AM	PH3 valve closed
9/8/2010	6:06:20 AM	SiCl4 pre valve closed
9/8/2010	6:06:20 AM	SiCl4 post valve closed
9/8/2010	6:06:20 AM	Main Vac valve closed
9/8/2010	6:06:20 AM	Bypass valve closed
9/8/2010	6:06:20 AM	Helium valve opened
9/8/2010	6:06:20 AM	Bubbler valve opened
9/8/2010	6:06:20 AM	Helium MFC set to  500.000000
9/8/2010	6:06:20 AM	H2 MFC set to  0.000000
9/8/2010	6:06:20 AM	BCl3 MFC set to  0.000000
9/8/2010	6:06:20 AM	PHl3 MFC set to  0.000000
9/8/2010	6:06:20 AM	SiCl4 MFC set to  0.000000
9/8/2010	6:06:20 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	6:06:20 AM	Tube furnace set to 850
9/8/2010	6:11:20 AM	H2 valve closed
9/8/2010	6:11:20 AM	BCl3 valve closed
9/8/2010	6:11:20 AM	PH3 valve closed
9/8/2010	6:11:20 AM	SiCl4 pre valve closed
9/8/2010	6:11:20 AM	SiCl4 post valve closed
9/8/2010	6:11:20 AM	Main Vac valve closed
9/8/2010	6:11:20 AM	Bypass valve closed
9/8/2010	6:11:20 AM	Helium valve opened
9/8/2010	6:11:20 AM	Bubbler valve opened
9/8/2010	6:11:20 AM	Helium MFC set to  500.000000
9/8/2010	6:11:20 AM	H2 MFC set to  0.000000
9/8/2010	6:11:20 AM	BCl3 MFC set to  0.000000
9/8/2010	6:11:20 AM	PHl3 MFC set to  0.000000
9/8/2010	6:11:20 AM	SiCl4 MFC set to  0.000000
9/8/2010	6:11:20 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	6:11:20 AM	Tube furnace set to 800
9/8/2010	6:16:20 AM	H2 valve closed
9/8/2010	6:16:20 AM	BCl3 valve closed
9/8/2010	6:16:20 AM	PH3 valve closed
9/8/2010	6:16:20 AM	SiCl4 pre valve closed
9/8/2010	6:16:20 AM	SiCl4 post valve closed
9/8/2010	6:16:20 AM	Main Vac valve closed
9/8/2010	6:16:20 AM	Bypass valve closed
9/8/2010	6:16:20 AM	Helium valve opened
9/8/2010	6:16:20 AM	Bubbler valve opened
9/8/2010	6:16:20 AM	Helium MFC set to  500.000000
9/8/2010	6:16:20 AM	H2 MFC set to  0.000000
9/8/2010	6:16:20 AM	BCl3 MFC set to  0.000000
9/8/2010	6:16:20 AM	PHl3 MFC set to  0.000000
9/8/2010	6:16:20 AM	SiCl4 MFC set to  0.000000
9/8/2010	6:16:20 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	6:16:20 AM	Tube furnace set to 750
9/8/2010	6:21:20 AM	H2 valve closed
9/8/2010	6:21:20 AM	BCl3 valve closed
9/8/2010	6:21:20 AM	PH3 valve closed
9/8/2010	6:21:20 AM	SiCl4 pre valve closed
9/8/2010	6:21:20 AM	SiCl4 post valve closed
9/8/2010	6:21:20 AM	Main Vac valve closed
9/8/2010	6:21:20 AM	Bypass valve closed
9/8/2010	6:21:21 AM	Helium valve opened
9/8/2010	6:21:21 AM	Bubbler valve opened
9/8/2010	6:21:21 AM	Helium MFC set to  500.000000
9/8/2010	6:21:21 AM	H2 MFC set to  0.000000
9/8/2010	6:21:21 AM	BCl3 MFC set to  0.000000
9/8/2010	6:21:21 AM	PHl3 MFC set to  0.000000
9/8/2010	6:21:21 AM	SiCl4 MFC set to  0.000000
9/8/2010	6:21:21 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	6:21:21 AM	Tube furnace set to 700
9/8/2010	6:26:21 AM	H2 valve closed
9/8/2010	6:26:21 AM	BCl3 valve closed
9/8/2010	6:26:21 AM	PH3 valve closed
9/8/2010	6:26:21 AM	SiCl4 pre valve closed
9/8/2010	6:26:21 AM	SiCl4 post valve closed
9/8/2010	6:26:21 AM	Main Vac valve closed
9/8/2010	6:26:21 AM	Bypass valve closed
9/8/2010	6:26:21 AM	Helium valve opened
9/8/2010	6:26:21 AM	Bubbler valve opened
9/8/2010	6:26:21 AM	Helium MFC set to  500.000000
9/8/2010	6:26:21 AM	H2 MFC set to  0.000000
9/8/2010	6:26:21 AM	BCl3 MFC set to  0.000000
9/8/2010	6:26:21 AM	PHl3 MFC set to  0.000000
9/8/2010	6:26:21 AM	SiCl4 MFC set to  0.000000
9/8/2010	6:26:21 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	6:26:21 AM	Tube furnace set to 0
9/8/2010	6:46:21 AM	Helium valve closed
9/8/2010	6:46:21 AM	H2 valve closed
9/8/2010	6:46:21 AM	BCl3 valve closed
9/8/2010	6:46:21 AM	PH3 valve closed
9/8/2010	6:46:21 AM	SiCl4 pre valve closed
9/8/2010	6:46:21 AM	SiCl4 post valve closed
9/8/2010	6:46:21 AM	Main Vac valve closed
9/8/2010	6:46:21 AM	Bypass valve closed
9/8/2010	6:46:21 AM	Bubbler valve closed
9/8/2010	6:46:21 AM	Helium MFC set to  0.000000
9/8/2010	6:46:21 AM	H2 MFC set to  0.000000
9/8/2010	6:46:21 AM	BCl3 MFC set to  0.000000
9/8/2010	6:46:21 AM	PHl3 MFC set to  0.000000
9/8/2010	6:46:21 AM	SiCl4 MFC set to  0.000000
9/8/2010	6:46:21 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	6:46:21 AM	Tube furnace set to 0
9/8/2010	6:46:21 AM	Run finished at 6:46 AM
9/8/2010	7:24:22 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/8/2010	7:24:23 AM	Recipe started at 7:24 AM
9/8/2010	7:24:23 AM	H2 valve closed
9/8/2010	7:24:23 AM	BCl3 valve closed
9/8/2010	7:24:23 AM	PH3 valve closed
9/8/2010	7:24:23 AM	SiCl4 pre valve closed
9/8/2010	7:24:23 AM	SiCl4 post valve closed
9/8/2010	7:24:23 AM	Main Vac valve closed
9/8/2010	7:24:23 AM	Bypass valve closed
9/8/2010	7:24:23 AM	Bubbler valve closed
9/8/2010	7:24:23 AM	Helium valve opened
9/8/2010	7:24:23 AM	Helium MFC set to  500.000000
9/8/2010	7:24:23 AM	H2 MFC set to  0.000000
9/8/2010	7:24:23 AM	BCl3 MFC set to  0.000000
9/8/2010	7:24:23 AM	PHl3 MFC set to  0.000000
9/8/2010	7:24:23 AM	SiCl4 MFC set to  0.000000
9/8/2010	7:24:23 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	7:24:23 AM	Tube furnace set to 0
9/8/2010	7:24:23 AM	Helium valve closed
9/8/2010	7:24:23 AM	H2 valve closed
9/8/2010	7:24:23 AM	BCl3 valve closed
9/8/2010	7:24:23 AM	PH3 valve closed
9/8/2010	7:24:23 AM	SiCl4 pre valve closed
9/8/2010	7:24:23 AM	SiCl4 post valve closed
9/8/2010	7:24:23 AM	Main Vac valve closed
9/8/2010	7:24:23 AM	Bypass valve closed
9/8/2010	7:24:23 AM	Bubbler valve closed
9/8/2010	7:24:23 AM	Helium MFC set to  0.000000
9/8/2010	7:24:24 AM	H2 MFC set to  0.000000
9/8/2010	7:24:24 AM	BCl3 MFC set to  0.000000
9/8/2010	7:24:24 AM	PHl3 MFC set to  0.000000
9/8/2010	7:24:24 AM	SiCl4 MFC set to  0.000000
9/8/2010	7:24:24 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	7:24:24 AM	Tube furnace set to 0
9/8/2010	7:24:24 AM	Run finished at 7:24 AM
9/8/2010	7:24:24 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/8/2010	7:24:26 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/8/2010	7:24:26 AM	Recipe started at 7:24 AM
9/8/2010	7:24:26 AM	Helium valve closed
9/8/2010	7:24:26 AM	H2 valve closed
9/8/2010	7:24:26 AM	BCl3 valve closed
9/8/2010	7:24:26 AM	PH3 valve closed
9/8/2010	7:24:26 AM	SiCl4 pre valve closed
9/8/2010	7:24:26 AM	SiCl4 post valve closed
9/8/2010	7:24:26 AM	Main Vac valve closed
9/8/2010	7:24:26 AM	Bubbler valve closed
9/8/2010	7:24:26 AM	Bypass valve opened
9/8/2010	7:24:26 AM	Helium MFC set to  0.000000
9/8/2010	7:24:26 AM	H2 MFC set to  0.000000
9/8/2010	7:24:26 AM	BCl3 MFC set to  0.000000
9/8/2010	7:24:26 AM	PHl3 MFC set to  0.000000
9/8/2010	7:24:26 AM	SiCl4 MFC set to  0.000000
9/8/2010	7:24:26 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	7:24:27 AM	Tube furnace set to 0
9/8/2010	7:25:05 AM	Helium valve closed
9/8/2010	7:25:05 AM	H2 valve closed
9/8/2010	7:25:05 AM	BCl3 valve closed
9/8/2010	7:25:05 AM	PH3 valve closed
9/8/2010	7:25:05 AM	SiCl4 pre valve closed
9/8/2010	7:25:05 AM	SiCl4 post valve closed
9/8/2010	7:25:05 AM	Bubbler valve closed
9/8/2010	7:25:05 AM	Main Vac valve opened
9/8/2010	7:25:05 AM	Bypass valve opened
9/8/2010	7:25:05 AM	Helium MFC set to  0.000000
9/8/2010	7:25:05 AM	H2 MFC set to  0.000000
9/8/2010	7:25:05 AM	BCl3 MFC set to  0.000000
9/8/2010	7:25:05 AM	PHl3 MFC set to  0.000000
9/8/2010	7:25:05 AM	SiCl4 MFC set to  0.000000
9/8/2010	7:25:05 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	7:25:05 AM	Tube furnace set to 0
9/8/2010	7:25:05 AM	Run finished at 7:25 AM
9/8/2010	7:25:05 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/8/2010	7:26:14 AM	Recipe started at 7:26 AM
9/8/2010	7:26:14 AM	Helium valve closed
9/8/2010	7:26:14 AM	H2 valve closed
9/8/2010	7:26:14 AM	BCl3 valve closed
9/8/2010	7:26:14 AM	PH3 valve closed
9/8/2010	7:26:14 AM	SiCl4 pre valve closed
9/8/2010	7:26:14 AM	SiCl4 post valve closed
9/8/2010	7:26:14 AM	Main Vac valve closed
9/8/2010	7:26:14 AM	Bubbler valve closed
9/8/2010	7:26:14 AM	Bypass valve opened
9/8/2010	7:26:14 AM	Helium MFC set to  0.000000
9/8/2010	7:26:14 AM	H2 MFC set to  0.000000
9/8/2010	7:26:14 AM	BCl3 MFC set to  0.000000
9/8/2010	7:26:14 AM	PHl3 MFC set to  0.000000
9/8/2010	7:26:14 AM	SiCl4 MFC set to  0.000000
9/8/2010	7:26:14 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	7:26:14 AM	Tube furnace set to 0
9/8/2010	7:26:15 AM	Helium valve closed
9/8/2010	7:26:15 AM	H2 valve closed
9/8/2010	7:26:15 AM	BCl3 valve closed
9/8/2010	7:26:15 AM	PH3 valve closed
9/8/2010	7:26:15 AM	SiCl4 pre valve closed
9/8/2010	7:26:15 AM	SiCl4 post valve closed
9/8/2010	7:26:15 AM	Bubbler valve closed
9/8/2010	7:26:15 AM	Main Vac valve opened
9/8/2010	7:26:15 AM	Bypass valve opened
9/8/2010	7:26:15 AM	Helium MFC set to  0.000000
9/8/2010	7:26:15 AM	H2 MFC set to  0.000000
9/8/2010	7:26:15 AM	BCl3 MFC set to  0.000000
9/8/2010	7:26:15 AM	PHl3 MFC set to  0.000000
9/8/2010	7:26:15 AM	SiCl4 MFC set to  0.000000
9/8/2010	7:26:15 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	7:26:15 AM	Tube furnace set to 0
9/8/2010	7:27:15 AM	H2 valve closed
9/8/2010	7:27:15 AM	BCl3 valve closed
9/8/2010	7:27:15 AM	PH3 valve closed
9/8/2010	7:27:15 AM	SiCl4 pre valve closed
9/8/2010	7:27:15 AM	SiCl4 post valve closed
9/8/2010	7:27:15 AM	Bubbler valve closed
9/8/2010	7:27:15 AM	Helium valve opened
9/8/2010	7:27:15 AM	Main Vac valve opened
9/8/2010	7:27:15 AM	Bypass valve opened
9/8/2010	7:27:15 AM	Helium MFC set to  100.000000
9/8/2010	7:27:15 AM	H2 MFC set to  0.000000
9/8/2010	7:27:15 AM	BCl3 MFC set to  0.000000
9/8/2010	7:27:15 AM	PHl3 MFC set to  0.000000
9/8/2010	7:27:15 AM	SiCl4 MFC set to  0.000000
9/8/2010	7:27:15 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	7:27:15 AM	Tube furnace set to 0
9/8/2010	7:28:15 AM	Helium valve closed
9/8/2010	7:28:15 AM	H2 valve closed
9/8/2010	7:28:15 AM	BCl3 valve closed
9/8/2010	7:28:15 AM	PH3 valve closed
9/8/2010	7:28:15 AM	SiCl4 pre valve closed
9/8/2010	7:28:15 AM	SiCl4 post valve closed
9/8/2010	7:28:15 AM	Bubbler valve closed
9/8/2010	7:28:15 AM	Main Vac valve opened
9/8/2010	7:28:15 AM	Bypass valve opened
9/8/2010	7:28:15 AM	Helium MFC set to  0.000000
9/8/2010	7:28:15 AM	H2 MFC set to  0.000000
9/8/2010	7:28:15 AM	BCl3 MFC set to  0.000000
9/8/2010	7:28:15 AM	PHl3 MFC set to  0.000000
9/8/2010	7:28:15 AM	SiCl4 MFC set to  0.000000
9/8/2010	7:28:15 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	7:28:15 AM	Tube furnace set to 0
9/8/2010	7:29:15 AM	H2 valve closed
9/8/2010	7:29:15 AM	BCl3 valve closed
9/8/2010	7:29:15 AM	PH3 valve closed
9/8/2010	7:29:15 AM	SiCl4 pre valve closed
9/8/2010	7:29:15 AM	SiCl4 post valve closed
9/8/2010	7:29:15 AM	Bubbler valve closed
9/8/2010	7:29:15 AM	Helium valve opened
9/8/2010	7:29:15 AM	Main Vac valve opened
9/8/2010	7:29:15 AM	Bypass valve opened
9/8/2010	7:29:15 AM	Helium MFC set to  100.000000
9/8/2010	7:29:15 AM	H2 MFC set to  0.000000
9/8/2010	7:29:15 AM	BCl3 MFC set to  0.000000
9/8/2010	7:29:15 AM	PHl3 MFC set to  0.000000
9/8/2010	7:29:15 AM	SiCl4 MFC set to  0.000000
9/8/2010	7:29:15 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	7:29:15 AM	Tube furnace set to 0
9/8/2010	7:30:15 AM	Helium valve closed
9/8/2010	7:30:15 AM	H2 valve closed
9/8/2010	7:30:15 AM	BCl3 valve closed
9/8/2010	7:30:15 AM	PH3 valve closed
9/8/2010	7:30:15 AM	SiCl4 pre valve closed
9/8/2010	7:30:15 AM	SiCl4 post valve closed
9/8/2010	7:30:15 AM	Bubbler valve closed
9/8/2010	7:30:15 AM	Main Vac valve opened
9/8/2010	7:30:15 AM	Bypass valve opened
9/8/2010	7:30:15 AM	Helium MFC set to  0.000000
9/8/2010	7:30:15 AM	H2 MFC set to  0.000000
9/8/2010	7:30:15 AM	BCl3 MFC set to  0.000000
9/8/2010	7:30:15 AM	PHl3 MFC set to  0.000000
9/8/2010	7:30:15 AM	SiCl4 MFC set to  0.000000
9/8/2010	7:30:15 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	7:30:16 AM	Tube furnace set to 0
9/8/2010	7:31:16 AM	H2 valve closed
9/8/2010	7:31:16 AM	BCl3 valve closed
9/8/2010	7:31:16 AM	PH3 valve closed
9/8/2010	7:31:16 AM	SiCl4 pre valve closed
9/8/2010	7:31:16 AM	SiCl4 post valve closed
9/8/2010	7:31:16 AM	Bubbler valve closed
9/8/2010	7:31:16 AM	Helium valve opened
9/8/2010	7:31:16 AM	Main Vac valve opened
9/8/2010	7:31:16 AM	Bypass valve opened
9/8/2010	7:31:16 AM	Helium MFC set to  100.000000
9/8/2010	7:31:16 AM	H2 MFC set to  0.000000
9/8/2010	7:31:16 AM	BCl3 MFC set to  0.000000
9/8/2010	7:31:16 AM	PHl3 MFC set to  0.000000
9/8/2010	7:31:16 AM	SiCl4 MFC set to  0.000000
9/8/2010	7:31:16 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	7:31:16 AM	Tube furnace set to 0
9/8/2010	7:32:16 AM	Helium valve closed
9/8/2010	7:32:16 AM	H2 valve closed
9/8/2010	7:32:16 AM	BCl3 valve closed
9/8/2010	7:32:16 AM	PH3 valve closed
9/8/2010	7:32:16 AM	SiCl4 pre valve closed
9/8/2010	7:32:16 AM	SiCl4 post valve closed
9/8/2010	7:32:16 AM	Bubbler valve closed
9/8/2010	7:32:16 AM	Main Vac valve opened
9/8/2010	7:32:16 AM	Bypass valve opened
9/8/2010	7:32:16 AM	Helium MFC set to  0.000000
9/8/2010	7:32:16 AM	H2 MFC set to  0.000000
9/8/2010	7:32:16 AM	BCl3 MFC set to  0.000000
9/8/2010	7:32:16 AM	PHl3 MFC set to  0.000000
9/8/2010	7:32:16 AM	SiCl4 MFC set to  0.000000
9/8/2010	7:32:16 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	7:32:16 AM	Tube furnace set to 0
9/8/2010	7:33:16 AM	H2 valve closed
9/8/2010	7:33:16 AM	BCl3 valve closed
9/8/2010	7:33:16 AM	PH3 valve closed
9/8/2010	7:33:16 AM	SiCl4 pre valve closed
9/8/2010	7:33:16 AM	SiCl4 post valve closed
9/8/2010	7:33:16 AM	Bubbler valve closed
9/8/2010	7:33:16 AM	Helium valve opened
9/8/2010	7:33:16 AM	Main Vac valve opened
9/8/2010	7:33:16 AM	Bypass valve opened
9/8/2010	7:33:16 AM	Helium MFC set to  100.000000
9/8/2010	7:33:16 AM	H2 MFC set to  0.000000
9/8/2010	7:33:16 AM	BCl3 MFC set to  0.000000
9/8/2010	7:33:16 AM	PHl3 MFC set to  0.000000
9/8/2010	7:33:16 AM	SiCl4 MFC set to  0.000000
9/8/2010	7:33:16 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	7:33:16 AM	Tube furnace set to 0
9/8/2010	7:34:16 AM	Helium valve closed
9/8/2010	7:34:16 AM	H2 valve closed
9/8/2010	7:34:16 AM	BCl3 valve closed
9/8/2010	7:34:16 AM	PH3 valve closed
9/8/2010	7:34:16 AM	SiCl4 pre valve closed
9/8/2010	7:34:16 AM	SiCl4 post valve closed
9/8/2010	7:34:16 AM	Bubbler valve closed
9/8/2010	7:34:16 AM	Main Vac valve opened
9/8/2010	7:34:16 AM	Bypass valve opened
9/8/2010	7:34:16 AM	Helium MFC set to  0.000000
9/8/2010	7:34:16 AM	H2 MFC set to  0.000000
9/8/2010	7:34:16 AM	BCl3 MFC set to  0.000000
9/8/2010	7:34:16 AM	PHl3 MFC set to  0.000000
9/8/2010	7:34:16 AM	SiCl4 MFC set to  0.000000
9/8/2010	7:34:16 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	7:34:16 AM	Tube furnace set to 0
9/8/2010	7:35:16 AM	H2 valve closed
9/8/2010	7:35:16 AM	BCl3 valve closed
9/8/2010	7:35:16 AM	PH3 valve closed
9/8/2010	7:35:16 AM	SiCl4 pre valve closed
9/8/2010	7:35:16 AM	SiCl4 post valve closed
9/8/2010	7:35:16 AM	Bubbler valve closed
9/8/2010	7:35:16 AM	Helium valve opened
9/8/2010	7:35:16 AM	Main Vac valve opened
9/8/2010	7:35:16 AM	Bypass valve opened
9/8/2010	7:35:16 AM	Helium MFC set to  100.000000
9/8/2010	7:35:16 AM	H2 MFC set to  0.000000
9/8/2010	7:35:16 AM	BCl3 MFC set to  0.000000
9/8/2010	7:35:16 AM	PHl3 MFC set to  0.000000
9/8/2010	7:35:16 AM	SiCl4 MFC set to  0.000000
9/8/2010	7:35:16 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	7:35:17 AM	Tube furnace set to 0
9/8/2010	7:36:17 AM	Helium valve closed
9/8/2010	7:36:17 AM	H2 valve closed
9/8/2010	7:36:17 AM	BCl3 valve closed
9/8/2010	7:36:17 AM	PH3 valve closed
9/8/2010	7:36:17 AM	SiCl4 pre valve closed
9/8/2010	7:36:17 AM	SiCl4 post valve closed
9/8/2010	7:36:17 AM	Bubbler valve closed
9/8/2010	7:36:17 AM	Main Vac valve opened
9/8/2010	7:36:17 AM	Bypass valve opened
9/8/2010	7:36:17 AM	Helium MFC set to  0.000000
9/8/2010	7:36:17 AM	H2 MFC set to  0.000000
9/8/2010	7:36:17 AM	BCl3 MFC set to  0.000000
9/8/2010	7:36:17 AM	PHl3 MFC set to  0.000000
9/8/2010	7:36:17 AM	SiCl4 MFC set to  0.000000
9/8/2010	7:36:17 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	7:36:17 AM	Tube furnace set to 0
9/8/2010	7:37:17 AM	H2 valve closed
9/8/2010	7:37:17 AM	BCl3 valve closed
9/8/2010	7:37:17 AM	PH3 valve closed
9/8/2010	7:37:17 AM	SiCl4 pre valve closed
9/8/2010	7:37:17 AM	SiCl4 post valve closed
9/8/2010	7:37:17 AM	Bubbler valve closed
9/8/2010	7:37:17 AM	Helium valve opened
9/8/2010	7:37:17 AM	Main Vac valve opened
9/8/2010	7:37:17 AM	Bypass valve opened
9/8/2010	7:37:17 AM	Helium MFC set to  100.000000
9/8/2010	7:37:17 AM	H2 MFC set to  0.000000
9/8/2010	7:37:17 AM	BCl3 MFC set to  0.000000
9/8/2010	7:37:17 AM	PHl3 MFC set to  0.000000
9/8/2010	7:37:17 AM	SiCl4 MFC set to  0.000000
9/8/2010	7:37:17 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	7:37:17 AM	Tube furnace set to 0
9/8/2010	7:38:17 AM	Helium valve closed
9/8/2010	7:38:17 AM	H2 valve closed
9/8/2010	7:38:17 AM	BCl3 valve closed
9/8/2010	7:38:17 AM	PH3 valve closed
9/8/2010	7:38:17 AM	SiCl4 pre valve closed
9/8/2010	7:38:17 AM	SiCl4 post valve closed
9/8/2010	7:38:17 AM	Bubbler valve closed
9/8/2010	7:38:17 AM	Main Vac valve opened
9/8/2010	7:38:17 AM	Bypass valve opened
9/8/2010	7:38:17 AM	Helium MFC set to  0.000000
9/8/2010	7:38:17 AM	H2 MFC set to  0.000000
9/8/2010	7:38:17 AM	BCl3 MFC set to  0.000000
9/8/2010	7:38:17 AM	PHl3 MFC set to  0.000000
9/8/2010	7:38:17 AM	SiCl4 MFC set to  0.000000
9/8/2010	7:38:17 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	7:38:17 AM	Tube furnace set to 0
9/8/2010	7:39:17 AM	H2 valve closed
9/8/2010	7:39:17 AM	BCl3 valve closed
9/8/2010	7:39:17 AM	PH3 valve closed
9/8/2010	7:39:17 AM	SiCl4 pre valve closed
9/8/2010	7:39:17 AM	SiCl4 post valve closed
9/8/2010	7:39:17 AM	Bubbler valve closed
9/8/2010	7:39:17 AM	Helium valve opened
9/8/2010	7:39:17 AM	Main Vac valve opened
9/8/2010	7:39:17 AM	Bypass valve opened
9/8/2010	7:39:17 AM	Helium MFC set to  100.000000
9/8/2010	7:39:17 AM	H2 MFC set to  0.000000
9/8/2010	7:39:17 AM	BCl3 MFC set to  0.000000
9/8/2010	7:39:17 AM	PHl3 MFC set to  0.000000
9/8/2010	7:39:17 AM	SiCl4 MFC set to  0.000000
9/8/2010	7:39:17 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	7:39:17 AM	Tube furnace set to 0
9/8/2010	7:40:18 AM	Helium valve closed
9/8/2010	7:40:18 AM	H2 valve closed
9/8/2010	7:40:18 AM	BCl3 valve closed
9/8/2010	7:40:18 AM	PH3 valve closed
9/8/2010	7:40:18 AM	SiCl4 pre valve closed
9/8/2010	7:40:18 AM	SiCl4 post valve closed
9/8/2010	7:40:18 AM	Bubbler valve closed
9/8/2010	7:40:18 AM	Main Vac valve opened
9/8/2010	7:40:18 AM	Bypass valve opened
9/8/2010	7:40:18 AM	Helium MFC set to  0.000000
9/8/2010	7:40:18 AM	H2 MFC set to  0.000000
9/8/2010	7:40:18 AM	BCl3 MFC set to  0.000000
9/8/2010	7:40:18 AM	PHl3 MFC set to  0.000000
9/8/2010	7:40:18 AM	SiCl4 MFC set to  0.000000
9/8/2010	7:40:18 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	7:40:18 AM	Tube furnace set to 0
9/8/2010	7:41:18 AM	H2 valve closed
9/8/2010	7:41:18 AM	BCl3 valve closed
9/8/2010	7:41:18 AM	PH3 valve closed
9/8/2010	7:41:18 AM	SiCl4 pre valve closed
9/8/2010	7:41:18 AM	SiCl4 post valve closed
9/8/2010	7:41:18 AM	Bubbler valve closed
9/8/2010	7:41:18 AM	Helium valve opened
9/8/2010	7:41:18 AM	Main Vac valve opened
9/8/2010	7:41:18 AM	Bypass valve opened
9/8/2010	7:41:18 AM	Helium MFC set to  100.000000
9/8/2010	7:41:18 AM	H2 MFC set to  0.000000
9/8/2010	7:41:18 AM	BCl3 MFC set to  0.000000
9/8/2010	7:41:18 AM	PHl3 MFC set to  0.000000
9/8/2010	7:41:18 AM	SiCl4 MFC set to  0.000000
9/8/2010	7:41:18 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	7:41:18 AM	Tube furnace set to 0
9/8/2010	7:42:18 AM	Helium valve closed
9/8/2010	7:42:18 AM	H2 valve closed
9/8/2010	7:42:18 AM	BCl3 valve closed
9/8/2010	7:42:18 AM	PH3 valve closed
9/8/2010	7:42:18 AM	SiCl4 pre valve closed
9/8/2010	7:42:18 AM	SiCl4 post valve closed
9/8/2010	7:42:18 AM	Bubbler valve closed
9/8/2010	7:42:18 AM	Main Vac valve opened
9/8/2010	7:42:18 AM	Bypass valve opened
9/8/2010	7:42:18 AM	Helium MFC set to  0.000000
9/8/2010	7:42:18 AM	H2 MFC set to  0.000000
9/8/2010	7:42:18 AM	BCl3 MFC set to  0.000000
9/8/2010	7:42:18 AM	PHl3 MFC set to  0.000000
9/8/2010	7:42:18 AM	SiCl4 MFC set to  0.000000
9/8/2010	7:42:18 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	7:42:18 AM	Tube furnace set to 0
9/8/2010	7:43:18 AM	H2 valve closed
9/8/2010	7:43:18 AM	BCl3 valve closed
9/8/2010	7:43:18 AM	PH3 valve closed
9/8/2010	7:43:18 AM	SiCl4 pre valve closed
9/8/2010	7:43:18 AM	SiCl4 post valve closed
9/8/2010	7:43:18 AM	Bubbler valve closed
9/8/2010	7:43:18 AM	Helium valve opened
9/8/2010	7:43:18 AM	Main Vac valve opened
9/8/2010	7:43:18 AM	Bypass valve opened
9/8/2010	7:43:18 AM	Helium MFC set to  100.000000
9/8/2010	7:43:18 AM	H2 MFC set to  0.000000
9/8/2010	7:43:18 AM	BCl3 MFC set to  0.000000
9/8/2010	7:43:18 AM	PHl3 MFC set to  0.000000
9/8/2010	7:43:18 AM	SiCl4 MFC set to  0.000000
9/8/2010	7:43:18 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	7:43:18 AM	Tube furnace set to 0
9/8/2010	7:44:18 AM	Helium valve closed
9/8/2010	7:44:18 AM	H2 valve closed
9/8/2010	7:44:18 AM	BCl3 valve closed
9/8/2010	7:44:18 AM	PH3 valve closed
9/8/2010	7:44:18 AM	SiCl4 pre valve closed
9/8/2010	7:44:18 AM	SiCl4 post valve closed
9/8/2010	7:44:18 AM	Bubbler valve closed
9/8/2010	7:44:18 AM	Main Vac valve opened
9/8/2010	7:44:18 AM	Bypass valve opened
9/8/2010	7:44:18 AM	Helium MFC set to  0.000000
9/8/2010	7:44:18 AM	H2 MFC set to  0.000000
9/8/2010	7:44:18 AM	BCl3 MFC set to  0.000000
9/8/2010	7:44:18 AM	PHl3 MFC set to  0.000000
9/8/2010	7:44:18 AM	SiCl4 MFC set to  0.000000
9/8/2010	7:44:18 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	7:44:19 AM	Tube furnace set to 0
9/8/2010	7:45:19 AM	H2 valve closed
9/8/2010	7:45:19 AM	BCl3 valve closed
9/8/2010	7:45:19 AM	PH3 valve closed
9/8/2010	7:45:19 AM	SiCl4 pre valve closed
9/8/2010	7:45:19 AM	SiCl4 post valve closed
9/8/2010	7:45:19 AM	Bubbler valve closed
9/8/2010	7:45:19 AM	Helium valve opened
9/8/2010	7:45:19 AM	Main Vac valve opened
9/8/2010	7:45:19 AM	Bypass valve opened
9/8/2010	7:45:19 AM	Helium MFC set to  100.000000
9/8/2010	7:45:19 AM	H2 MFC set to  0.000000
9/8/2010	7:45:19 AM	BCl3 MFC set to  0.000000
9/8/2010	7:45:19 AM	PHl3 MFC set to  0.000000
9/8/2010	7:45:19 AM	SiCl4 MFC set to  0.000000
9/8/2010	7:45:19 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	7:45:19 AM	Tube furnace set to 0
9/8/2010	7:46:19 AM	Helium valve closed
9/8/2010	7:46:19 AM	H2 valve closed
9/8/2010	7:46:19 AM	BCl3 valve closed
9/8/2010	7:46:19 AM	PH3 valve closed
9/8/2010	7:46:19 AM	SiCl4 pre valve closed
9/8/2010	7:46:19 AM	SiCl4 post valve closed
9/8/2010	7:46:19 AM	Bubbler valve closed
9/8/2010	7:46:19 AM	Main Vac valve opened
9/8/2010	7:46:19 AM	Bypass valve opened
9/8/2010	7:46:19 AM	Helium MFC set to  0.000000
9/8/2010	7:46:19 AM	H2 MFC set to  0.000000
9/8/2010	7:46:19 AM	BCl3 MFC set to  0.000000
9/8/2010	7:46:19 AM	PHl3 MFC set to  0.000000
9/8/2010	7:46:19 AM	SiCl4 MFC set to  0.000000
9/8/2010	7:46:19 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	7:46:19 AM	Tube furnace set to 100
9/8/2010	7:46:20 AM	Run finished at 7:46 AM
9/8/2010	7:47:13 AM	Bypass valve closed
9/8/2010	7:47:13 AM	Main Vac valve closed
9/8/2010	7:47:23 AM	Bypass valve opened
9/8/2010	7:47:23 AM	Main Vac valve opened
9/8/2010	7:47:36 AM	Tube furnace set to 0
9/8/2010	7:47:42 AM	Bypass valve closed
9/8/2010	7:47:43 AM	Main Vac valve closed
9/8/2010	7:47:54 AM	Bypass valve opened
9/8/2010	7:47:55 AM	Main Vac valve opened
9/8/2010	7:48:00 AM	Helium MFC set to  100.000000
9/8/2010	7:48:01 AM	Helium valve opened
9/8/2010	7:49:37 AM	Helium valve closed
9/8/2010	7:51:11 AM	Recipe started at 7:51 AM
9/8/2010	7:51:11 AM	Helium valve closed
9/8/2010	7:51:11 AM	BCl3 valve closed
9/8/2010	7:51:11 AM	PH3 valve closed
9/8/2010	7:51:11 AM	SiCl4 pre valve closed
9/8/2010	7:51:11 AM	SiCl4 post valve closed
9/8/2010	7:51:11 AM	Main Vac valve closed
9/8/2010	7:51:11 AM	Bypass valve closed
9/8/2010	7:51:11 AM	Bubbler valve closed
9/8/2010	7:51:11 AM	H2 valve opened
9/8/2010	7:51:11 AM	Helium MFC set to  0.000000
9/8/2010	7:51:11 AM	H2 MFC set to  500.000000
9/8/2010	7:51:11 AM	BCl3 MFC set to  0.000000
9/8/2010	7:51:11 AM	PHl3 MFC set to  0.000000
9/8/2010	7:51:11 AM	SiCl4 MFC set to  0.000000
9/8/2010	7:51:11 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	7:51:11 AM	Tube furnace set to 0
9/8/2010	7:52:28 AM	Helium valve closed
9/8/2010	7:52:28 AM	BCl3 valve closed
9/8/2010	7:52:28 AM	PH3 valve closed
9/8/2010	7:52:28 AM	SiCl4 pre valve closed
9/8/2010	7:52:28 AM	SiCl4 post valve closed
9/8/2010	7:52:28 AM	Main Vac valve closed
9/8/2010	7:52:28 AM	Bypass valve closed
9/8/2010	7:52:28 AM	H2 valve opened
9/8/2010	7:52:28 AM	Bubbler valve opened
9/8/2010	7:52:28 AM	Helium MFC set to  0.000000
9/8/2010	7:52:28 AM	H2 MFC set to  500.000000
9/8/2010	7:52:28 AM	BCl3 MFC set to  0.000000
9/8/2010	7:52:28 AM	PHl3 MFC set to  0.000000
9/8/2010	7:52:28 AM	SiCl4 MFC set to  0.000000
9/8/2010	7:52:28 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	7:52:28 AM	Tube furnace set to 1000
9/8/2010	8:12:28 AM	Helium valve closed
9/8/2010	8:12:28 AM	BCl3 valve closed
9/8/2010	8:12:28 AM	PH3 valve closed
9/8/2010	8:12:28 AM	Main Vac valve closed
9/8/2010	8:12:28 AM	Bypass valve closed
9/8/2010	8:12:28 AM	H2 valve opened
9/8/2010	8:12:28 AM	SiCl4 pre valve opened
9/8/2010	8:12:28 AM	SiCl4 post valve opened
9/8/2010	8:12:28 AM	Bubbler valve opened
9/8/2010	8:12:28 AM	Helium MFC set to  0.000000
9/8/2010	8:12:28 AM	H2 MFC set to  500.000000
9/8/2010	8:12:28 AM	BCl3 MFC set to  0.000000
9/8/2010	8:12:28 AM	PHl3 MFC set to  0.000000
9/8/2010	8:12:28 AM	SiCl4 MFC set to  50.000000
9/8/2010	8:12:28 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	8:12:28 AM	Tube furnace set to 1000
9/8/2010	8:32:28 AM	H2 valve closed
9/8/2010	8:32:28 AM	BCl3 valve closed
9/8/2010	8:32:28 AM	PH3 valve closed
9/8/2010	8:32:28 AM	SiCl4 pre valve closed
9/8/2010	8:32:28 AM	SiCl4 post valve closed
9/8/2010	8:32:28 AM	Main Vac valve closed
9/8/2010	8:32:28 AM	Bypass valve closed
9/8/2010	8:32:28 AM	Helium valve opened
9/8/2010	8:32:28 AM	Bubbler valve opened
9/8/2010	8:32:28 AM	Helium MFC set to  500.000000
9/8/2010	8:32:28 AM	H2 MFC set to  0.000000
9/8/2010	8:32:28 AM	BCl3 MFC set to  0.000000
9/8/2010	8:32:28 AM	PHl3 MFC set to  0.000000
9/8/2010	8:32:28 AM	SiCl4 MFC set to  0.000000
9/8/2010	8:32:28 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	8:32:28 AM	Tube furnace set to 950
9/8/2010	8:37:28 AM	H2 valve closed
9/8/2010	8:37:28 AM	BCl3 valve closed
9/8/2010	8:37:28 AM	PH3 valve closed
9/8/2010	8:37:28 AM	SiCl4 pre valve closed
9/8/2010	8:37:28 AM	SiCl4 post valve closed
9/8/2010	8:37:28 AM	Main Vac valve closed
9/8/2010	8:37:28 AM	Bypass valve closed
9/8/2010	8:37:28 AM	Helium valve opened
9/8/2010	8:37:28 AM	Bubbler valve opened
9/8/2010	8:37:28 AM	Helium MFC set to  500.000000
9/8/2010	8:37:28 AM	H2 MFC set to  0.000000
9/8/2010	8:37:28 AM	BCl3 MFC set to  0.000000
9/8/2010	8:37:28 AM	PHl3 MFC set to  0.000000
9/8/2010	8:37:28 AM	SiCl4 MFC set to  0.000000
9/8/2010	8:37:28 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	8:37:29 AM	Tube furnace set to 900
9/8/2010	8:42:29 AM	H2 valve closed
9/8/2010	8:42:29 AM	BCl3 valve closed
9/8/2010	8:42:29 AM	PH3 valve closed
9/8/2010	8:42:29 AM	SiCl4 pre valve closed
9/8/2010	8:42:29 AM	SiCl4 post valve closed
9/8/2010	8:42:29 AM	Main Vac valve closed
9/8/2010	8:42:29 AM	Bypass valve closed
9/8/2010	8:42:29 AM	Helium valve opened
9/8/2010	8:42:29 AM	Bubbler valve opened
9/8/2010	8:42:29 AM	Helium MFC set to  500.000000
9/8/2010	8:42:29 AM	H2 MFC set to  0.000000
9/8/2010	8:42:29 AM	BCl3 MFC set to  0.000000
9/8/2010	8:42:29 AM	PHl3 MFC set to  0.000000
9/8/2010	8:42:29 AM	SiCl4 MFC set to  0.000000
9/8/2010	8:42:29 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	8:42:29 AM	Tube furnace set to 850
9/8/2010	8:47:29 AM	H2 valve closed
9/8/2010	8:47:29 AM	BCl3 valve closed
9/8/2010	8:47:29 AM	PH3 valve closed
9/8/2010	8:47:29 AM	SiCl4 pre valve closed
9/8/2010	8:47:29 AM	SiCl4 post valve closed
9/8/2010	8:47:29 AM	Main Vac valve closed
9/8/2010	8:47:29 AM	Bypass valve closed
9/8/2010	8:47:29 AM	Helium valve opened
9/8/2010	8:47:29 AM	Bubbler valve opened
9/8/2010	8:47:29 AM	Helium MFC set to  500.000000
9/8/2010	8:47:29 AM	H2 MFC set to  0.000000
9/8/2010	8:47:29 AM	BCl3 MFC set to  0.000000
9/8/2010	8:47:29 AM	PHl3 MFC set to  0.000000
9/8/2010	8:47:29 AM	SiCl4 MFC set to  0.000000
9/8/2010	8:47:29 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	8:47:29 AM	Tube furnace set to 800
9/8/2010	8:52:29 AM	H2 valve closed
9/8/2010	8:52:29 AM	BCl3 valve closed
9/8/2010	8:52:29 AM	PH3 valve closed
9/8/2010	8:52:29 AM	SiCl4 pre valve closed
9/8/2010	8:52:29 AM	SiCl4 post valve closed
9/8/2010	8:52:29 AM	Main Vac valve closed
9/8/2010	8:52:29 AM	Bypass valve closed
9/8/2010	8:52:29 AM	Helium valve opened
9/8/2010	8:52:29 AM	Bubbler valve opened
9/8/2010	8:52:29 AM	Helium MFC set to  500.000000
9/8/2010	8:52:29 AM	H2 MFC set to  0.000000
9/8/2010	8:52:29 AM	BCl3 MFC set to  0.000000
9/8/2010	8:52:29 AM	PHl3 MFC set to  0.000000
9/8/2010	8:52:29 AM	SiCl4 MFC set to  0.000000
9/8/2010	8:52:29 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	8:52:29 AM	Tube furnace set to 750
9/8/2010	8:57:29 AM	H2 valve closed
9/8/2010	8:57:29 AM	BCl3 valve closed
9/8/2010	8:57:29 AM	PH3 valve closed
9/8/2010	8:57:29 AM	SiCl4 pre valve closed
9/8/2010	8:57:29 AM	SiCl4 post valve closed
9/8/2010	8:57:29 AM	Main Vac valve closed
9/8/2010	8:57:29 AM	Bypass valve closed
9/8/2010	8:57:29 AM	Helium valve opened
9/8/2010	8:57:29 AM	Bubbler valve opened
9/8/2010	8:57:29 AM	Helium MFC set to  500.000000
9/8/2010	8:57:29 AM	H2 MFC set to  0.000000
9/8/2010	8:57:29 AM	BCl3 MFC set to  0.000000
9/8/2010	8:57:29 AM	PHl3 MFC set to  0.000000
9/8/2010	8:57:29 AM	SiCl4 MFC set to  0.000000
9/8/2010	8:57:29 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	8:57:29 AM	Tube furnace set to 700
9/8/2010	9:02:29 AM	H2 valve closed
9/8/2010	9:02:29 AM	BCl3 valve closed
9/8/2010	9:02:29 AM	PH3 valve closed
9/8/2010	9:02:29 AM	SiCl4 pre valve closed
9/8/2010	9:02:29 AM	SiCl4 post valve closed
9/8/2010	9:02:29 AM	Main Vac valve closed
9/8/2010	9:02:29 AM	Bypass valve closed
9/8/2010	9:02:29 AM	Helium valve opened
9/8/2010	9:02:29 AM	Bubbler valve opened
9/8/2010	9:02:29 AM	Helium MFC set to  500.000000
9/8/2010	9:02:29 AM	H2 MFC set to  0.000000
9/8/2010	9:02:29 AM	BCl3 MFC set to  0.000000
9/8/2010	9:02:29 AM	PHl3 MFC set to  0.000000
9/8/2010	9:02:29 AM	SiCl4 MFC set to  0.000000
9/8/2010	9:02:29 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	9:02:30 AM	Tube furnace set to 0
9/8/2010	9:22:30 AM	Helium valve closed
9/8/2010	9:22:30 AM	H2 valve closed
9/8/2010	9:22:30 AM	BCl3 valve closed
9/8/2010	9:22:30 AM	PH3 valve closed
9/8/2010	9:22:30 AM	SiCl4 pre valve closed
9/8/2010	9:22:30 AM	SiCl4 post valve closed
9/8/2010	9:22:30 AM	Main Vac valve closed
9/8/2010	9:22:30 AM	Bypass valve closed
9/8/2010	9:22:30 AM	Bubbler valve closed
9/8/2010	9:22:30 AM	Helium MFC set to  0.000000
9/8/2010	9:22:30 AM	H2 MFC set to  0.000000
9/8/2010	9:22:30 AM	BCl3 MFC set to  0.000000
9/8/2010	9:22:30 AM	PHl3 MFC set to  0.000000
9/8/2010	9:22:30 AM	SiCl4 MFC set to  0.000000
9/8/2010	9:22:30 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	9:22:30 AM	Tube furnace set to 0
9/8/2010	9:22:30 AM	Run finished at 9:22 AM
9/8/2010	11:07:32 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/8/2010	11:07:33 AM	Recipe started at 11:07 AM
9/8/2010	11:07:33 AM	H2 valve closed
9/8/2010	11:07:33 AM	BCl3 valve closed
9/8/2010	11:07:33 AM	PH3 valve closed
9/8/2010	11:07:33 AM	SiCl4 pre valve closed
9/8/2010	11:07:33 AM	SiCl4 post valve closed
9/8/2010	11:07:33 AM	Main Vac valve closed
9/8/2010	11:07:33 AM	Bypass valve closed
9/8/2010	11:07:33 AM	Bubbler valve closed
9/8/2010	11:07:33 AM	Helium valve opened
9/8/2010	11:07:33 AM	Helium MFC set to  500.000000
9/8/2010	11:07:33 AM	H2 MFC set to  0.000000
9/8/2010	11:07:33 AM	BCl3 MFC set to  0.000000
9/8/2010	11:07:33 AM	PHl3 MFC set to  0.000000
9/8/2010	11:07:33 AM	SiCl4 MFC set to  0.000000
9/8/2010	11:07:33 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	11:07:33 AM	Tube furnace set to 0
9/8/2010	11:07:38 AM	Helium valve closed
9/8/2010	11:07:38 AM	H2 valve closed
9/8/2010	11:07:38 AM	BCl3 valve closed
9/8/2010	11:07:38 AM	PH3 valve closed
9/8/2010	11:07:38 AM	SiCl4 pre valve closed
9/8/2010	11:07:38 AM	SiCl4 post valve closed
9/8/2010	11:07:38 AM	Main Vac valve closed
9/8/2010	11:07:38 AM	Bypass valve closed
9/8/2010	11:07:38 AM	Bubbler valve closed
9/8/2010	11:07:38 AM	Helium MFC set to  0.000000
9/8/2010	11:07:38 AM	H2 MFC set to  0.000000
9/8/2010	11:07:38 AM	BCl3 MFC set to  0.000000
9/8/2010	11:07:38 AM	PHl3 MFC set to  0.000000
9/8/2010	11:07:38 AM	SiCl4 MFC set to  0.000000
9/8/2010	11:07:38 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	11:07:38 AM	Tube furnace set to 0
9/8/2010	11:07:38 AM	Run finished at 11:07 AM
9/8/2010	11:07:38 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/8/2010	11:28:16 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/8/2010	11:28:17 AM	Recipe started at 11:28 AM
9/8/2010	11:28:17 AM	Helium valve closed
9/8/2010	11:28:17 AM	H2 valve closed
9/8/2010	11:28:17 AM	BCl3 valve closed
9/8/2010	11:28:17 AM	PH3 valve closed
9/8/2010	11:28:17 AM	SiCl4 pre valve closed
9/8/2010	11:28:17 AM	SiCl4 post valve closed
9/8/2010	11:28:17 AM	Main Vac valve closed
9/8/2010	11:28:17 AM	Bubbler valve closed
9/8/2010	11:28:17 AM	Bypass valve opened
9/8/2010	11:28:17 AM	Helium MFC set to  0.000000
9/8/2010	11:28:17 AM	H2 MFC set to  0.000000
9/8/2010	11:28:17 AM	BCl3 MFC set to  0.000000
9/8/2010	11:28:17 AM	PHl3 MFC set to  0.000000
9/8/2010	11:28:17 AM	SiCl4 MFC set to  0.000000
9/8/2010	11:28:17 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	11:28:17 AM	Tube furnace set to 0
9/8/2010	11:28:58 AM	Helium valve closed
9/8/2010	11:28:58 AM	H2 valve closed
9/8/2010	11:28:58 AM	BCl3 valve closed
9/8/2010	11:28:58 AM	PH3 valve closed
9/8/2010	11:28:58 AM	SiCl4 pre valve closed
9/8/2010	11:28:58 AM	SiCl4 post valve closed
9/8/2010	11:28:58 AM	Bubbler valve closed
9/8/2010	11:28:58 AM	Main Vac valve opened
9/8/2010	11:28:58 AM	Bypass valve opened
9/8/2010	11:28:58 AM	Helium MFC set to  0.000000
9/8/2010	11:28:58 AM	H2 MFC set to  0.000000
9/8/2010	11:28:58 AM	BCl3 MFC set to  0.000000
9/8/2010	11:28:58 AM	PHl3 MFC set to  0.000000
9/8/2010	11:28:58 AM	SiCl4 MFC set to  0.000000
9/8/2010	11:28:58 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	11:28:58 AM	Tube furnace set to 0
9/8/2010	11:28:59 AM	Run finished at 11:28 AM
9/8/2010	11:28:59 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/8/2010	11:29:13 AM	Recipe started at 11:29 AM
9/8/2010	11:29:13 AM	Helium valve closed
9/8/2010	11:29:13 AM	H2 valve closed
9/8/2010	11:29:13 AM	BCl3 valve closed
9/8/2010	11:29:13 AM	PH3 valve closed
9/8/2010	11:29:13 AM	SiCl4 pre valve closed
9/8/2010	11:29:13 AM	SiCl4 post valve closed
9/8/2010	11:29:13 AM	Main Vac valve closed
9/8/2010	11:29:13 AM	Bubbler valve closed
9/8/2010	11:29:13 AM	Bypass valve opened
9/8/2010	11:29:13 AM	Helium MFC set to  0.000000
9/8/2010	11:29:13 AM	H2 MFC set to  0.000000
9/8/2010	11:29:13 AM	BCl3 MFC set to  0.000000
9/8/2010	11:29:13 AM	PHl3 MFC set to  0.000000
9/8/2010	11:29:13 AM	SiCl4 MFC set to  0.000000
9/8/2010	11:29:13 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	11:29:14 AM	Tube furnace set to 0
9/8/2010	11:29:14 AM	Helium valve closed
9/8/2010	11:29:14 AM	H2 valve closed
9/8/2010	11:29:14 AM	BCl3 valve closed
9/8/2010	11:29:14 AM	PH3 valve closed
9/8/2010	11:29:14 AM	SiCl4 pre valve closed
9/8/2010	11:29:14 AM	SiCl4 post valve closed
9/8/2010	11:29:14 AM	Bubbler valve closed
9/8/2010	11:29:14 AM	Main Vac valve opened
9/8/2010	11:29:14 AM	Bypass valve opened
9/8/2010	11:29:14 AM	Helium MFC set to  0.000000
9/8/2010	11:29:14 AM	H2 MFC set to  0.000000
9/8/2010	11:29:14 AM	BCl3 MFC set to  0.000000
9/8/2010	11:29:14 AM	PHl3 MFC set to  0.000000
9/8/2010	11:29:14 AM	SiCl4 MFC set to  0.000000
9/8/2010	11:29:14 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	11:29:14 AM	Tube furnace set to 0
9/8/2010	11:30:14 AM	H2 valve closed
9/8/2010	11:30:14 AM	BCl3 valve closed
9/8/2010	11:30:14 AM	PH3 valve closed
9/8/2010	11:30:14 AM	SiCl4 pre valve closed
9/8/2010	11:30:14 AM	SiCl4 post valve closed
9/8/2010	11:30:14 AM	Bubbler valve closed
9/8/2010	11:30:14 AM	Helium valve opened
9/8/2010	11:30:14 AM	Main Vac valve opened
9/8/2010	11:30:14 AM	Bypass valve opened
9/8/2010	11:30:14 AM	Helium MFC set to  100.000000
9/8/2010	11:30:14 AM	H2 MFC set to  0.000000
9/8/2010	11:30:14 AM	BCl3 MFC set to  0.000000
9/8/2010	11:30:14 AM	PHl3 MFC set to  0.000000
9/8/2010	11:30:14 AM	SiCl4 MFC set to  0.000000
9/8/2010	11:30:14 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	11:30:14 AM	Tube furnace set to 0
9/8/2010	11:31:14 AM	Helium valve closed
9/8/2010	11:31:14 AM	H2 valve closed
9/8/2010	11:31:14 AM	BCl3 valve closed
9/8/2010	11:31:14 AM	PH3 valve closed
9/8/2010	11:31:14 AM	SiCl4 pre valve closed
9/8/2010	11:31:14 AM	SiCl4 post valve closed
9/8/2010	11:31:14 AM	Bubbler valve closed
9/8/2010	11:31:14 AM	Main Vac valve opened
9/8/2010	11:31:14 AM	Bypass valve opened
9/8/2010	11:31:14 AM	Helium MFC set to  0.000000
9/8/2010	11:31:14 AM	H2 MFC set to  0.000000
9/8/2010	11:31:14 AM	BCl3 MFC set to  0.000000
9/8/2010	11:31:14 AM	PHl3 MFC set to  0.000000
9/8/2010	11:31:14 AM	SiCl4 MFC set to  0.000000
9/8/2010	11:31:14 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	11:31:14 AM	Tube furnace set to 0
9/8/2010	11:32:14 AM	H2 valve closed
9/8/2010	11:32:14 AM	BCl3 valve closed
9/8/2010	11:32:14 AM	PH3 valve closed
9/8/2010	11:32:14 AM	SiCl4 pre valve closed
9/8/2010	11:32:14 AM	SiCl4 post valve closed
9/8/2010	11:32:14 AM	Bubbler valve closed
9/8/2010	11:32:14 AM	Helium valve opened
9/8/2010	11:32:14 AM	Main Vac valve opened
9/8/2010	11:32:14 AM	Bypass valve opened
9/8/2010	11:32:14 AM	Helium MFC set to  100.000000
9/8/2010	11:32:14 AM	H2 MFC set to  0.000000
9/8/2010	11:32:14 AM	BCl3 MFC set to  0.000000
9/8/2010	11:32:14 AM	PHl3 MFC set to  0.000000
9/8/2010	11:32:14 AM	SiCl4 MFC set to  0.000000
9/8/2010	11:32:14 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	11:32:15 AM	Tube furnace set to 0
9/8/2010	11:33:15 AM	Helium valve closed
9/8/2010	11:33:15 AM	H2 valve closed
9/8/2010	11:33:15 AM	BCl3 valve closed
9/8/2010	11:33:15 AM	PH3 valve closed
9/8/2010	11:33:15 AM	SiCl4 pre valve closed
9/8/2010	11:33:15 AM	SiCl4 post valve closed
9/8/2010	11:33:15 AM	Bubbler valve closed
9/8/2010	11:33:15 AM	Main Vac valve opened
9/8/2010	11:33:15 AM	Bypass valve opened
9/8/2010	11:33:15 AM	Helium MFC set to  0.000000
9/8/2010	11:33:15 AM	H2 MFC set to  0.000000
9/8/2010	11:33:15 AM	BCl3 MFC set to  0.000000
9/8/2010	11:33:15 AM	PHl3 MFC set to  0.000000
9/8/2010	11:33:15 AM	SiCl4 MFC set to  0.000000
9/8/2010	11:33:15 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	11:33:15 AM	Tube furnace set to 0
9/8/2010	11:34:15 AM	H2 valve closed
9/8/2010	11:34:15 AM	BCl3 valve closed
9/8/2010	11:34:15 AM	PH3 valve closed
9/8/2010	11:34:15 AM	SiCl4 pre valve closed
9/8/2010	11:34:15 AM	SiCl4 post valve closed
9/8/2010	11:34:15 AM	Bubbler valve closed
9/8/2010	11:34:15 AM	Helium valve opened
9/8/2010	11:34:15 AM	Main Vac valve opened
9/8/2010	11:34:15 AM	Bypass valve opened
9/8/2010	11:34:15 AM	Helium MFC set to  100.000000
9/8/2010	11:34:15 AM	H2 MFC set to  0.000000
9/8/2010	11:34:15 AM	BCl3 MFC set to  0.000000
9/8/2010	11:34:15 AM	PHl3 MFC set to  0.000000
9/8/2010	11:34:15 AM	SiCl4 MFC set to  0.000000
9/8/2010	11:34:15 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	11:34:15 AM	Tube furnace set to 0
9/8/2010	11:35:15 AM	Helium valve closed
9/8/2010	11:35:15 AM	H2 valve closed
9/8/2010	11:35:15 AM	BCl3 valve closed
9/8/2010	11:35:15 AM	PH3 valve closed
9/8/2010	11:35:15 AM	SiCl4 pre valve closed
9/8/2010	11:35:15 AM	SiCl4 post valve closed
9/8/2010	11:35:15 AM	Bubbler valve closed
9/8/2010	11:35:15 AM	Main Vac valve opened
9/8/2010	11:35:15 AM	Bypass valve opened
9/8/2010	11:35:15 AM	Helium MFC set to  0.000000
9/8/2010	11:35:15 AM	H2 MFC set to  0.000000
9/8/2010	11:35:15 AM	BCl3 MFC set to  0.000000
9/8/2010	11:35:15 AM	PHl3 MFC set to  0.000000
9/8/2010	11:35:15 AM	SiCl4 MFC set to  0.000000
9/8/2010	11:35:15 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	11:35:15 AM	Tube furnace set to 0
9/8/2010	11:36:15 AM	H2 valve closed
9/8/2010	11:36:15 AM	BCl3 valve closed
9/8/2010	11:36:15 AM	PH3 valve closed
9/8/2010	11:36:15 AM	SiCl4 pre valve closed
9/8/2010	11:36:15 AM	SiCl4 post valve closed
9/8/2010	11:36:15 AM	Bubbler valve closed
9/8/2010	11:36:15 AM	Helium valve opened
9/8/2010	11:36:15 AM	Main Vac valve opened
9/8/2010	11:36:15 AM	Bypass valve opened
9/8/2010	11:36:15 AM	Helium MFC set to  100.000000
9/8/2010	11:36:15 AM	H2 MFC set to  0.000000
9/8/2010	11:36:15 AM	BCl3 MFC set to  0.000000
9/8/2010	11:36:15 AM	PHl3 MFC set to  0.000000
9/8/2010	11:36:15 AM	SiCl4 MFC set to  0.000000
9/8/2010	11:36:15 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	11:36:15 AM	Tube furnace set to 0
9/8/2010	11:37:15 AM	Helium valve closed
9/8/2010	11:37:15 AM	H2 valve closed
9/8/2010	11:37:15 AM	BCl3 valve closed
9/8/2010	11:37:15 AM	PH3 valve closed
9/8/2010	11:37:15 AM	SiCl4 pre valve closed
9/8/2010	11:37:15 AM	SiCl4 post valve closed
9/8/2010	11:37:15 AM	Bubbler valve closed
9/8/2010	11:37:15 AM	Main Vac valve opened
9/8/2010	11:37:15 AM	Bypass valve opened
9/8/2010	11:37:15 AM	Helium MFC set to  0.000000
9/8/2010	11:37:15 AM	H2 MFC set to  0.000000
9/8/2010	11:37:15 AM	BCl3 MFC set to  0.000000
9/8/2010	11:37:15 AM	PHl3 MFC set to  0.000000
9/8/2010	11:37:15 AM	SiCl4 MFC set to  0.000000
9/8/2010	11:37:15 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	11:37:16 AM	Tube furnace set to 0
9/8/2010	11:38:16 AM	H2 valve closed
9/8/2010	11:38:16 AM	BCl3 valve closed
9/8/2010	11:38:16 AM	PH3 valve closed
9/8/2010	11:38:16 AM	SiCl4 pre valve closed
9/8/2010	11:38:16 AM	SiCl4 post valve closed
9/8/2010	11:38:16 AM	Bubbler valve closed
9/8/2010	11:38:16 AM	Helium valve opened
9/8/2010	11:38:16 AM	Main Vac valve opened
9/8/2010	11:38:16 AM	Bypass valve opened
9/8/2010	11:38:16 AM	Helium MFC set to  100.000000
9/8/2010	11:38:16 AM	H2 MFC set to  0.000000
9/8/2010	11:38:16 AM	BCl3 MFC set to  0.000000
9/8/2010	11:38:16 AM	PHl3 MFC set to  0.000000
9/8/2010	11:38:16 AM	SiCl4 MFC set to  0.000000
9/8/2010	11:38:16 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	11:38:16 AM	Tube furnace set to 0
9/8/2010	11:39:16 AM	Helium valve closed
9/8/2010	11:39:16 AM	H2 valve closed
9/8/2010	11:39:16 AM	BCl3 valve closed
9/8/2010	11:39:16 AM	PH3 valve closed
9/8/2010	11:39:16 AM	SiCl4 pre valve closed
9/8/2010	11:39:16 AM	SiCl4 post valve closed
9/8/2010	11:39:16 AM	Bubbler valve closed
9/8/2010	11:39:16 AM	Main Vac valve opened
9/8/2010	11:39:16 AM	Bypass valve opened
9/8/2010	11:39:16 AM	Helium MFC set to  0.000000
9/8/2010	11:39:16 AM	H2 MFC set to  0.000000
9/8/2010	11:39:16 AM	BCl3 MFC set to  0.000000
9/8/2010	11:39:16 AM	PHl3 MFC set to  0.000000
9/8/2010	11:39:16 AM	SiCl4 MFC set to  0.000000
9/8/2010	11:39:16 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	11:39:16 AM	Tube furnace set to 0
9/8/2010	11:40:16 AM	H2 valve closed
9/8/2010	11:40:16 AM	BCl3 valve closed
9/8/2010	11:40:16 AM	PH3 valve closed
9/8/2010	11:40:16 AM	SiCl4 pre valve closed
9/8/2010	11:40:16 AM	SiCl4 post valve closed
9/8/2010	11:40:16 AM	Bubbler valve closed
9/8/2010	11:40:16 AM	Helium valve opened
9/8/2010	11:40:16 AM	Main Vac valve opened
9/8/2010	11:40:16 AM	Bypass valve opened
9/8/2010	11:40:16 AM	Helium MFC set to  100.000000
9/8/2010	11:40:16 AM	H2 MFC set to  0.000000
9/8/2010	11:40:16 AM	BCl3 MFC set to  0.000000
9/8/2010	11:40:16 AM	PHl3 MFC set to  0.000000
9/8/2010	11:40:16 AM	SiCl4 MFC set to  0.000000
9/8/2010	11:40:16 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	11:40:16 AM	Tube furnace set to 0
9/8/2010	11:41:16 AM	Helium valve closed
9/8/2010	11:41:16 AM	H2 valve closed
9/8/2010	11:41:16 AM	BCl3 valve closed
9/8/2010	11:41:16 AM	PH3 valve closed
9/8/2010	11:41:16 AM	SiCl4 pre valve closed
9/8/2010	11:41:16 AM	SiCl4 post valve closed
9/8/2010	11:41:16 AM	Bubbler valve closed
9/8/2010	11:41:16 AM	Main Vac valve opened
9/8/2010	11:41:16 AM	Bypass valve opened
9/8/2010	11:41:16 AM	Helium MFC set to  0.000000
9/8/2010	11:41:16 AM	H2 MFC set to  0.000000
9/8/2010	11:41:16 AM	BCl3 MFC set to  0.000000
9/8/2010	11:41:16 AM	PHl3 MFC set to  0.000000
9/8/2010	11:41:16 AM	SiCl4 MFC set to  0.000000
9/8/2010	11:41:16 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	11:41:16 AM	Tube furnace set to 0
9/8/2010	11:42:16 AM	H2 valve closed
9/8/2010	11:42:16 AM	BCl3 valve closed
9/8/2010	11:42:16 AM	PH3 valve closed
9/8/2010	11:42:16 AM	SiCl4 pre valve closed
9/8/2010	11:42:16 AM	SiCl4 post valve closed
9/8/2010	11:42:16 AM	Bubbler valve closed
9/8/2010	11:42:16 AM	Helium valve opened
9/8/2010	11:42:16 AM	Main Vac valve opened
9/8/2010	11:42:16 AM	Bypass valve opened
9/8/2010	11:42:16 AM	Helium MFC set to  100.000000
9/8/2010	11:42:16 AM	H2 MFC set to  0.000000
9/8/2010	11:42:16 AM	BCl3 MFC set to  0.000000
9/8/2010	11:42:16 AM	PHl3 MFC set to  0.000000
9/8/2010	11:42:16 AM	SiCl4 MFC set to  0.000000
9/8/2010	11:42:16 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	11:42:17 AM	Tube furnace set to 0
9/8/2010	11:43:17 AM	Helium valve closed
9/8/2010	11:43:17 AM	H2 valve closed
9/8/2010	11:43:17 AM	BCl3 valve closed
9/8/2010	11:43:17 AM	PH3 valve closed
9/8/2010	11:43:17 AM	SiCl4 pre valve closed
9/8/2010	11:43:17 AM	SiCl4 post valve closed
9/8/2010	11:43:17 AM	Bubbler valve closed
9/8/2010	11:43:17 AM	Main Vac valve opened
9/8/2010	11:43:17 AM	Bypass valve opened
9/8/2010	11:43:17 AM	Helium MFC set to  0.000000
9/8/2010	11:43:17 AM	H2 MFC set to  0.000000
9/8/2010	11:43:17 AM	BCl3 MFC set to  0.000000
9/8/2010	11:43:17 AM	PHl3 MFC set to  0.000000
9/8/2010	11:43:17 AM	SiCl4 MFC set to  0.000000
9/8/2010	11:43:17 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	11:43:17 AM	Tube furnace set to 0
9/8/2010	11:44:17 AM	H2 valve closed
9/8/2010	11:44:17 AM	BCl3 valve closed
9/8/2010	11:44:17 AM	PH3 valve closed
9/8/2010	11:44:17 AM	SiCl4 pre valve closed
9/8/2010	11:44:17 AM	SiCl4 post valve closed
9/8/2010	11:44:17 AM	Bubbler valve closed
9/8/2010	11:44:17 AM	Helium valve opened
9/8/2010	11:44:17 AM	Main Vac valve opened
9/8/2010	11:44:17 AM	Bypass valve opened
9/8/2010	11:44:17 AM	Helium MFC set to  100.000000
9/8/2010	11:44:17 AM	H2 MFC set to  0.000000
9/8/2010	11:44:17 AM	BCl3 MFC set to  0.000000
9/8/2010	11:44:17 AM	PHl3 MFC set to  0.000000
9/8/2010	11:44:17 AM	SiCl4 MFC set to  0.000000
9/8/2010	11:44:17 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	11:44:17 AM	Tube furnace set to 0
9/8/2010	11:45:17 AM	Helium valve closed
9/8/2010	11:45:17 AM	H2 valve closed
9/8/2010	11:45:17 AM	BCl3 valve closed
9/8/2010	11:45:17 AM	PH3 valve closed
9/8/2010	11:45:17 AM	SiCl4 pre valve closed
9/8/2010	11:45:17 AM	SiCl4 post valve closed
9/8/2010	11:45:17 AM	Bubbler valve closed
9/8/2010	11:45:17 AM	Main Vac valve opened
9/8/2010	11:45:17 AM	Bypass valve opened
9/8/2010	11:45:17 AM	Helium MFC set to  0.000000
9/8/2010	11:45:17 AM	H2 MFC set to  0.000000
9/8/2010	11:45:17 AM	BCl3 MFC set to  0.000000
9/8/2010	11:45:17 AM	PHl3 MFC set to  0.000000
9/8/2010	11:45:17 AM	SiCl4 MFC set to  0.000000
9/8/2010	11:45:17 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	11:45:17 AM	Tube furnace set to 0
9/8/2010	11:46:17 AM	H2 valve closed
9/8/2010	11:46:17 AM	BCl3 valve closed
9/8/2010	11:46:17 AM	PH3 valve closed
9/8/2010	11:46:17 AM	SiCl4 pre valve closed
9/8/2010	11:46:17 AM	SiCl4 post valve closed
9/8/2010	11:46:17 AM	Bubbler valve closed
9/8/2010	11:46:17 AM	Helium valve opened
9/8/2010	11:46:17 AM	Main Vac valve opened
9/8/2010	11:46:17 AM	Bypass valve opened
9/8/2010	11:46:17 AM	Helium MFC set to  100.000000
9/8/2010	11:46:17 AM	H2 MFC set to  0.000000
9/8/2010	11:46:17 AM	BCl3 MFC set to  0.000000
9/8/2010	11:46:17 AM	PHl3 MFC set to  0.000000
9/8/2010	11:46:17 AM	SiCl4 MFC set to  0.000000
9/8/2010	11:46:17 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	11:46:17 AM	Tube furnace set to 0
9/8/2010	11:46:36 AM	Run aborted at 11:46 AM
9/8/2010	11:46:36 AM	Helium valve closed
9/8/2010	11:46:36 AM	H2 valve closed
9/8/2010	11:46:36 AM	BCl3 valve closed
9/8/2010	11:46:36 AM	PH3 valve closed
9/8/2010	11:46:36 AM	SiCl4 pre valve closed
9/8/2010	11:46:36 AM	SiCl4 post valve closed
9/8/2010	11:46:36 AM	Bypass valve closed
9/8/2010	11:46:36 AM	Main Vac valve closed
9/8/2010	11:46:36 AM	Bubbler valve closed
9/8/2010	11:46:36 AM	Helium MFC set to  0.000000
9/8/2010	11:46:36 AM	H2 MFC set to  0.000000
9/8/2010	11:46:36 AM	BCl3 MFC set to  0.000000
9/8/2010	11:46:36 AM	PHl3 MFC set to  0.000000
9/8/2010	11:46:36 AM	SiCl4 MFC set to  0.000000
9/8/2010	11:46:36 AM	Tube furnace set to 0
9/8/2010	11:46:47 AM	Recipe started at 11:46 AM
9/8/2010	11:46:47 AM	Helium valve closed
9/8/2010	11:46:47 AM	H2 valve closed
9/8/2010	11:46:47 AM	BCl3 valve closed
9/8/2010	11:46:47 AM	PH3 valve closed
9/8/2010	11:46:47 AM	SiCl4 pre valve closed
9/8/2010	11:46:47 AM	SiCl4 post valve closed
9/8/2010	11:46:47 AM	Main Vac valve closed
9/8/2010	11:46:47 AM	Bubbler valve closed
9/8/2010	11:46:47 AM	Bypass valve opened
9/8/2010	11:46:47 AM	Helium MFC set to  0.000000
9/8/2010	11:46:47 AM	H2 MFC set to  0.000000
9/8/2010	11:46:47 AM	BCl3 MFC set to  0.000000
9/8/2010	11:46:47 AM	PHl3 MFC set to  0.000000
9/8/2010	11:46:47 AM	SiCl4 MFC set to  0.000000
9/8/2010	11:46:47 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	11:46:47 AM	Tube furnace set to 0
9/8/2010	11:46:48 AM	Helium valve closed
9/8/2010	11:46:48 AM	H2 valve closed
9/8/2010	11:46:48 AM	BCl3 valve closed
9/8/2010	11:46:48 AM	PH3 valve closed
9/8/2010	11:46:48 AM	SiCl4 pre valve closed
9/8/2010	11:46:48 AM	SiCl4 post valve closed
9/8/2010	11:46:48 AM	Bubbler valve closed
9/8/2010	11:46:48 AM	Main Vac valve opened
9/8/2010	11:46:48 AM	Bypass valve opened
9/8/2010	11:46:48 AM	Helium MFC set to  0.000000
9/8/2010	11:46:48 AM	H2 MFC set to  0.000000
9/8/2010	11:46:48 AM	BCl3 MFC set to  0.000000
9/8/2010	11:46:48 AM	PHl3 MFC set to  0.000000
9/8/2010	11:46:48 AM	SiCl4 MFC set to  0.000000
9/8/2010	11:46:48 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	11:46:48 AM	Tube furnace set to 0
9/8/2010	11:47:48 AM	H2 valve closed
9/8/2010	11:47:48 AM	BCl3 valve closed
9/8/2010	11:47:48 AM	PH3 valve closed
9/8/2010	11:47:48 AM	SiCl4 pre valve closed
9/8/2010	11:47:48 AM	SiCl4 post valve closed
9/8/2010	11:47:48 AM	Bubbler valve closed
9/8/2010	11:47:48 AM	Helium valve opened
9/8/2010	11:47:48 AM	Main Vac valve opened
9/8/2010	11:47:48 AM	Bypass valve opened
9/8/2010	11:47:48 AM	Helium MFC set to  100.000000
9/8/2010	11:47:48 AM	H2 MFC set to  0.000000
9/8/2010	11:47:48 AM	BCl3 MFC set to  0.000000
9/8/2010	11:47:48 AM	PHl3 MFC set to  0.000000
9/8/2010	11:47:48 AM	SiCl4 MFC set to  0.000000
9/8/2010	11:47:48 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	11:47:48 AM	Tube furnace set to 0
9/8/2010	11:48:48 AM	Helium valve closed
9/8/2010	11:48:48 AM	H2 valve closed
9/8/2010	11:48:48 AM	BCl3 valve closed
9/8/2010	11:48:48 AM	PH3 valve closed
9/8/2010	11:48:48 AM	SiCl4 pre valve closed
9/8/2010	11:48:48 AM	SiCl4 post valve closed
9/8/2010	11:48:48 AM	Bubbler valve closed
9/8/2010	11:48:48 AM	Main Vac valve opened
9/8/2010	11:48:48 AM	Bypass valve opened
9/8/2010	11:48:48 AM	Helium MFC set to  0.000000
9/8/2010	11:48:48 AM	H2 MFC set to  0.000000
9/8/2010	11:48:48 AM	BCl3 MFC set to  0.000000
9/8/2010	11:48:48 AM	PHl3 MFC set to  0.000000
9/8/2010	11:48:48 AM	SiCl4 MFC set to  0.000000
9/8/2010	11:48:48 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	11:48:48 AM	Tube furnace set to 0
9/8/2010	11:49:48 AM	H2 valve closed
9/8/2010	11:49:48 AM	BCl3 valve closed
9/8/2010	11:49:48 AM	PH3 valve closed
9/8/2010	11:49:48 AM	SiCl4 pre valve closed
9/8/2010	11:49:48 AM	SiCl4 post valve closed
9/8/2010	11:49:48 AM	Bubbler valve closed
9/8/2010	11:49:48 AM	Helium valve opened
9/8/2010	11:49:48 AM	Main Vac valve opened
9/8/2010	11:49:48 AM	Bypass valve opened
9/8/2010	11:49:48 AM	Helium MFC set to  100.000000
9/8/2010	11:49:48 AM	H2 MFC set to  0.000000
9/8/2010	11:49:48 AM	BCl3 MFC set to  0.000000
9/8/2010	11:49:48 AM	PHl3 MFC set to  0.000000
9/8/2010	11:49:48 AM	SiCl4 MFC set to  0.000000
9/8/2010	11:49:48 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	11:49:48 AM	Tube furnace set to 0
9/8/2010	11:50:49 AM	Helium valve closed
9/8/2010	11:50:49 AM	H2 valve closed
9/8/2010	11:50:49 AM	BCl3 valve closed
9/8/2010	11:50:49 AM	PH3 valve closed
9/8/2010	11:50:49 AM	SiCl4 pre valve closed
9/8/2010	11:50:49 AM	SiCl4 post valve closed
9/8/2010	11:50:49 AM	Bubbler valve closed
9/8/2010	11:50:49 AM	Main Vac valve opened
9/8/2010	11:50:49 AM	Bypass valve opened
9/8/2010	11:50:49 AM	Helium MFC set to  0.000000
9/8/2010	11:50:49 AM	H2 MFC set to  0.000000
9/8/2010	11:50:49 AM	BCl3 MFC set to  0.000000
9/8/2010	11:50:49 AM	PHl3 MFC set to  0.000000
9/8/2010	11:50:49 AM	SiCl4 MFC set to  0.000000
9/8/2010	11:50:49 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	11:50:49 AM	Tube furnace set to 0
9/8/2010	11:51:49 AM	H2 valve closed
9/8/2010	11:51:49 AM	BCl3 valve closed
9/8/2010	11:51:49 AM	PH3 valve closed
9/8/2010	11:51:49 AM	SiCl4 pre valve closed
9/8/2010	11:51:49 AM	SiCl4 post valve closed
9/8/2010	11:51:49 AM	Bubbler valve closed
9/8/2010	11:51:49 AM	Helium valve opened
9/8/2010	11:51:49 AM	Main Vac valve opened
9/8/2010	11:51:49 AM	Bypass valve opened
9/8/2010	11:51:49 AM	Helium MFC set to  100.000000
9/8/2010	11:51:49 AM	H2 MFC set to  0.000000
9/8/2010	11:51:49 AM	BCl3 MFC set to  0.000000
9/8/2010	11:51:49 AM	PHl3 MFC set to  0.000000
9/8/2010	11:51:49 AM	SiCl4 MFC set to  0.000000
9/8/2010	11:51:49 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	11:51:49 AM	Tube furnace set to 0
9/8/2010	11:52:49 AM	Helium valve closed
9/8/2010	11:52:49 AM	H2 valve closed
9/8/2010	11:52:49 AM	BCl3 valve closed
9/8/2010	11:52:49 AM	PH3 valve closed
9/8/2010	11:52:49 AM	SiCl4 pre valve closed
9/8/2010	11:52:49 AM	SiCl4 post valve closed
9/8/2010	11:52:49 AM	Bubbler valve closed
9/8/2010	11:52:49 AM	Main Vac valve opened
9/8/2010	11:52:49 AM	Bypass valve opened
9/8/2010	11:52:49 AM	Helium MFC set to  0.000000
9/8/2010	11:52:49 AM	H2 MFC set to  0.000000
9/8/2010	11:52:49 AM	BCl3 MFC set to  0.000000
9/8/2010	11:52:49 AM	PHl3 MFC set to  0.000000
9/8/2010	11:52:49 AM	SiCl4 MFC set to  0.000000
9/8/2010	11:52:49 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	11:52:49 AM	Tube furnace set to 0
9/8/2010	11:53:49 AM	H2 valve closed
9/8/2010	11:53:49 AM	BCl3 valve closed
9/8/2010	11:53:49 AM	PH3 valve closed
9/8/2010	11:53:49 AM	SiCl4 pre valve closed
9/8/2010	11:53:49 AM	SiCl4 post valve closed
9/8/2010	11:53:49 AM	Bubbler valve closed
9/8/2010	11:53:49 AM	Helium valve opened
9/8/2010	11:53:49 AM	Main Vac valve opened
9/8/2010	11:53:49 AM	Bypass valve opened
9/8/2010	11:53:49 AM	Helium MFC set to  100.000000
9/8/2010	11:53:49 AM	H2 MFC set to  0.000000
9/8/2010	11:53:49 AM	BCl3 MFC set to  0.000000
9/8/2010	11:53:49 AM	PHl3 MFC set to  0.000000
9/8/2010	11:53:49 AM	SiCl4 MFC set to  0.000000
9/8/2010	11:53:49 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	11:53:49 AM	Tube furnace set to 0
9/8/2010	11:54:49 AM	Helium valve closed
9/8/2010	11:54:49 AM	H2 valve closed
9/8/2010	11:54:49 AM	BCl3 valve closed
9/8/2010	11:54:49 AM	PH3 valve closed
9/8/2010	11:54:49 AM	SiCl4 pre valve closed
9/8/2010	11:54:49 AM	SiCl4 post valve closed
9/8/2010	11:54:49 AM	Bubbler valve closed
9/8/2010	11:54:49 AM	Main Vac valve opened
9/8/2010	11:54:49 AM	Bypass valve opened
9/8/2010	11:54:49 AM	Helium MFC set to  0.000000
9/8/2010	11:54:49 AM	H2 MFC set to  0.000000
9/8/2010	11:54:49 AM	BCl3 MFC set to  0.000000
9/8/2010	11:54:49 AM	PHl3 MFC set to  0.000000
9/8/2010	11:54:49 AM	SiCl4 MFC set to  0.000000
9/8/2010	11:54:49 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	11:54:49 AM	Tube furnace set to 0
9/8/2010	11:55:50 AM	H2 valve closed
9/8/2010	11:55:50 AM	BCl3 valve closed
9/8/2010	11:55:50 AM	PH3 valve closed
9/8/2010	11:55:50 AM	SiCl4 pre valve closed
9/8/2010	11:55:50 AM	SiCl4 post valve closed
9/8/2010	11:55:50 AM	Bubbler valve closed
9/8/2010	11:55:50 AM	Helium valve opened
9/8/2010	11:55:50 AM	Main Vac valve opened
9/8/2010	11:55:50 AM	Bypass valve opened
9/8/2010	11:55:50 AM	Helium MFC set to  100.000000
9/8/2010	11:55:50 AM	H2 MFC set to  0.000000
9/8/2010	11:55:50 AM	BCl3 MFC set to  0.000000
9/8/2010	11:55:50 AM	PHl3 MFC set to  0.000000
9/8/2010	11:55:50 AM	SiCl4 MFC set to  0.000000
9/8/2010	11:55:50 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	11:55:50 AM	Tube furnace set to 0
9/8/2010	11:56:50 AM	Helium valve closed
9/8/2010	11:56:50 AM	H2 valve closed
9/8/2010	11:56:50 AM	BCl3 valve closed
9/8/2010	11:56:50 AM	PH3 valve closed
9/8/2010	11:56:50 AM	SiCl4 pre valve closed
9/8/2010	11:56:50 AM	SiCl4 post valve closed
9/8/2010	11:56:50 AM	Bubbler valve closed
9/8/2010	11:56:50 AM	Main Vac valve opened
9/8/2010	11:56:50 AM	Bypass valve opened
9/8/2010	11:56:50 AM	Helium MFC set to  0.000000
9/8/2010	11:56:50 AM	H2 MFC set to  0.000000
9/8/2010	11:56:50 AM	BCl3 MFC set to  0.000000
9/8/2010	11:56:50 AM	PHl3 MFC set to  0.000000
9/8/2010	11:56:50 AM	SiCl4 MFC set to  0.000000
9/8/2010	11:56:50 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	11:56:50 AM	Tube furnace set to 0
9/8/2010	11:57:50 AM	H2 valve closed
9/8/2010	11:57:50 AM	BCl3 valve closed
9/8/2010	11:57:50 AM	PH3 valve closed
9/8/2010	11:57:50 AM	SiCl4 pre valve closed
9/8/2010	11:57:50 AM	SiCl4 post valve closed
9/8/2010	11:57:50 AM	Bubbler valve closed
9/8/2010	11:57:50 AM	Helium valve opened
9/8/2010	11:57:50 AM	Main Vac valve opened
9/8/2010	11:57:50 AM	Bypass valve opened
9/8/2010	11:57:50 AM	Helium MFC set to  100.000000
9/8/2010	11:57:50 AM	H2 MFC set to  0.000000
9/8/2010	11:57:50 AM	BCl3 MFC set to  0.000000
9/8/2010	11:57:50 AM	PHl3 MFC set to  0.000000
9/8/2010	11:57:50 AM	SiCl4 MFC set to  0.000000
9/8/2010	11:57:50 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	11:57:50 AM	Tube furnace set to 0
9/8/2010	11:58:50 AM	Helium valve closed
9/8/2010	11:58:50 AM	H2 valve closed
9/8/2010	11:58:50 AM	BCl3 valve closed
9/8/2010	11:58:50 AM	PH3 valve closed
9/8/2010	11:58:50 AM	SiCl4 pre valve closed
9/8/2010	11:58:50 AM	SiCl4 post valve closed
9/8/2010	11:58:50 AM	Bubbler valve closed
9/8/2010	11:58:50 AM	Main Vac valve opened
9/8/2010	11:58:50 AM	Bypass valve opened
9/8/2010	11:58:50 AM	Helium MFC set to  0.000000
9/8/2010	11:58:50 AM	H2 MFC set to  0.000000
9/8/2010	11:58:50 AM	BCl3 MFC set to  0.000000
9/8/2010	11:58:50 AM	PHl3 MFC set to  0.000000
9/8/2010	11:58:50 AM	SiCl4 MFC set to  0.000000
9/8/2010	11:58:50 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	11:58:50 AM	Tube furnace set to 0
9/8/2010	11:59:50 AM	H2 valve closed
9/8/2010	11:59:50 AM	BCl3 valve closed
9/8/2010	11:59:50 AM	PH3 valve closed
9/8/2010	11:59:50 AM	SiCl4 pre valve closed
9/8/2010	11:59:50 AM	SiCl4 post valve closed
9/8/2010	11:59:50 AM	Bubbler valve closed
9/8/2010	11:59:50 AM	Helium valve opened
9/8/2010	11:59:50 AM	Main Vac valve opened
9/8/2010	11:59:50 AM	Bypass valve opened
9/8/2010	11:59:50 AM	Helium MFC set to  100.000000
9/8/2010	11:59:50 AM	H2 MFC set to  0.000000
9/8/2010	11:59:50 AM	BCl3 MFC set to  0.000000
9/8/2010	11:59:50 AM	PHl3 MFC set to  0.000000
9/8/2010	11:59:50 AM	SiCl4 MFC set to  0.000000
9/8/2010	11:59:50 AM	Bypass solenoid MFC set to  0.000000
9/8/2010	11:59:51 AM	Tube furnace set to 0
9/8/2010	12:00:51 PM	Helium valve closed
9/8/2010	12:00:51 PM	H2 valve closed
9/8/2010	12:00:51 PM	BCl3 valve closed
9/8/2010	12:00:51 PM	PH3 valve closed
9/8/2010	12:00:51 PM	SiCl4 pre valve closed
9/8/2010	12:00:51 PM	SiCl4 post valve closed
9/8/2010	12:00:51 PM	Bubbler valve closed
9/8/2010	12:00:51 PM	Main Vac valve opened
9/8/2010	12:00:51 PM	Bypass valve opened
9/8/2010	12:00:51 PM	Helium MFC set to  0.000000
9/8/2010	12:00:51 PM	H2 MFC set to  0.000000
9/8/2010	12:00:51 PM	BCl3 MFC set to  0.000000
9/8/2010	12:00:51 PM	PHl3 MFC set to  0.000000
9/8/2010	12:00:51 PM	SiCl4 MFC set to  0.000000
9/8/2010	12:00:51 PM	Bypass solenoid MFC set to  0.000000
9/8/2010	12:00:51 PM	Tube furnace set to 0
9/8/2010	12:01:51 PM	H2 valve closed
9/8/2010	12:01:51 PM	BCl3 valve closed
9/8/2010	12:01:51 PM	PH3 valve closed
9/8/2010	12:01:51 PM	SiCl4 pre valve closed
9/8/2010	12:01:51 PM	SiCl4 post valve closed
9/8/2010	12:01:51 PM	Bubbler valve closed
9/8/2010	12:01:51 PM	Helium valve opened
9/8/2010	12:01:51 PM	Main Vac valve opened
9/8/2010	12:01:51 PM	Bypass valve opened
9/8/2010	12:01:51 PM	Helium MFC set to  100.000000
9/8/2010	12:01:51 PM	H2 MFC set to  0.000000
9/8/2010	12:01:51 PM	BCl3 MFC set to  0.000000
9/8/2010	12:01:51 PM	PHl3 MFC set to  0.000000
9/8/2010	12:01:51 PM	SiCl4 MFC set to  0.000000
9/8/2010	12:01:51 PM	Bypass solenoid MFC set to  0.000000
9/8/2010	12:01:51 PM	Tube furnace set to 0
9/8/2010	12:02:51 PM	Helium valve closed
9/8/2010	12:02:51 PM	H2 valve closed
9/8/2010	12:02:51 PM	BCl3 valve closed
9/8/2010	12:02:51 PM	PH3 valve closed
9/8/2010	12:02:51 PM	SiCl4 pre valve closed
9/8/2010	12:02:51 PM	SiCl4 post valve closed
9/8/2010	12:02:51 PM	Bubbler valve closed
9/8/2010	12:02:51 PM	Main Vac valve opened
9/8/2010	12:02:51 PM	Bypass valve opened
9/8/2010	12:02:51 PM	Helium MFC set to  0.000000
9/8/2010	12:02:51 PM	H2 MFC set to  0.000000
9/8/2010	12:02:51 PM	BCl3 MFC set to  0.000000
9/8/2010	12:02:51 PM	PHl3 MFC set to  0.000000
9/8/2010	12:02:51 PM	SiCl4 MFC set to  0.000000
9/8/2010	12:02:51 PM	Bypass solenoid MFC set to  0.000000
9/8/2010	12:02:51 PM	Tube furnace set to 0
9/8/2010	12:03:51 PM	H2 valve closed
9/8/2010	12:03:51 PM	BCl3 valve closed
9/8/2010	12:03:51 PM	PH3 valve closed
9/8/2010	12:03:51 PM	SiCl4 pre valve closed
9/8/2010	12:03:51 PM	SiCl4 post valve closed
9/8/2010	12:03:51 PM	Bubbler valve closed
9/8/2010	12:03:51 PM	Helium valve opened
9/8/2010	12:03:51 PM	Main Vac valve opened
9/8/2010	12:03:51 PM	Bypass valve opened
9/8/2010	12:03:51 PM	Helium MFC set to  100.000000
9/8/2010	12:03:51 PM	H2 MFC set to  0.000000
9/8/2010	12:03:51 PM	BCl3 MFC set to  0.000000
9/8/2010	12:03:51 PM	PHl3 MFC set to  0.000000
9/8/2010	12:03:51 PM	SiCl4 MFC set to  0.000000
9/8/2010	12:03:51 PM	Bypass solenoid MFC set to  0.000000
9/8/2010	12:03:51 PM	Tube furnace set to 0
9/8/2010	12:04:51 PM	Helium valve closed
9/8/2010	12:04:51 PM	H2 valve closed
9/8/2010	12:04:51 PM	BCl3 valve closed
9/8/2010	12:04:51 PM	PH3 valve closed
9/8/2010	12:04:51 PM	SiCl4 pre valve closed
9/8/2010	12:04:51 PM	SiCl4 post valve closed
9/8/2010	12:04:51 PM	Bubbler valve closed
9/8/2010	12:04:51 PM	Main Vac valve opened
9/8/2010	12:04:51 PM	Bypass valve opened
9/8/2010	12:04:51 PM	Helium MFC set to  0.000000
9/8/2010	12:04:51 PM	H2 MFC set to  0.000000
9/8/2010	12:04:51 PM	BCl3 MFC set to  0.000000
9/8/2010	12:04:51 PM	PHl3 MFC set to  0.000000
9/8/2010	12:04:51 PM	SiCl4 MFC set to  0.000000
9/8/2010	12:04:51 PM	Bypass solenoid MFC set to  0.000000
9/8/2010	12:04:52 PM	Tube furnace set to 0
9/8/2010	12:05:52 PM	H2 valve closed
9/8/2010	12:05:52 PM	BCl3 valve closed
9/8/2010	12:05:52 PM	PH3 valve closed
9/8/2010	12:05:52 PM	SiCl4 pre valve closed
9/8/2010	12:05:52 PM	SiCl4 post valve closed
9/8/2010	12:05:52 PM	Bubbler valve closed
9/8/2010	12:05:52 PM	Helium valve opened
9/8/2010	12:05:52 PM	Main Vac valve opened
9/8/2010	12:05:52 PM	Bypass valve opened
9/8/2010	12:05:52 PM	Helium MFC set to  100.000000
9/8/2010	12:05:52 PM	H2 MFC set to  0.000000
9/8/2010	12:05:52 PM	BCl3 MFC set to  0.000000
9/8/2010	12:05:52 PM	PHl3 MFC set to  0.000000
9/8/2010	12:05:52 PM	SiCl4 MFC set to  0.000000
9/8/2010	12:05:52 PM	Bypass solenoid MFC set to  0.000000
9/8/2010	12:05:52 PM	Tube furnace set to 0
9/8/2010	12:06:52 PM	Helium valve closed
9/8/2010	12:06:52 PM	H2 valve closed
9/8/2010	12:06:52 PM	BCl3 valve closed
9/8/2010	12:06:52 PM	PH3 valve closed
9/8/2010	12:06:52 PM	SiCl4 pre valve closed
9/8/2010	12:06:52 PM	SiCl4 post valve closed
9/8/2010	12:06:52 PM	Bubbler valve closed
9/8/2010	12:06:52 PM	Main Vac valve opened
9/8/2010	12:06:52 PM	Bypass valve opened
9/8/2010	12:06:52 PM	Helium MFC set to  0.000000
9/8/2010	12:06:52 PM	H2 MFC set to  0.000000
9/8/2010	12:06:52 PM	BCl3 MFC set to  0.000000
9/8/2010	12:06:52 PM	PHl3 MFC set to  0.000000
9/8/2010	12:06:52 PM	SiCl4 MFC set to  0.000000
9/8/2010	12:06:52 PM	Bypass solenoid MFC set to  0.000000
9/8/2010	12:06:52 PM	Tube furnace set to 0
9/8/2010	12:06:53 PM	Run finished at 12:06 PM
9/8/2010	12:32:10 PM	Helium MFC set to  100.000000
9/8/2010	12:32:13 PM	Bypass valve closed
9/8/2010	12:32:13 PM	Main Vac valve closed
9/8/2010	12:32:25 PM	Bypass valve opened
9/8/2010	12:32:25 PM	Main Vac valve opened
9/8/2010	12:32:27 PM	Helium valve opened
9/8/2010	12:32:48 PM	Helium valve closed
9/8/2010	12:33:37 PM	Recipe started at 12:33 PM
9/8/2010	12:33:37 PM	Helium valve closed
9/8/2010	12:33:37 PM	BCl3 valve closed
9/8/2010	12:33:37 PM	PH3 valve closed
9/8/2010	12:33:37 PM	SiCl4 pre valve closed
9/8/2010	12:33:37 PM	SiCl4 post valve closed
9/8/2010	12:33:37 PM	Main Vac valve closed
9/8/2010	12:33:37 PM	Bypass valve closed
9/8/2010	12:33:37 PM	Bubbler valve closed
9/8/2010	12:33:37 PM	H2 valve opened
9/8/2010	12:33:37 PM	Helium MFC set to  0.000000
9/8/2010	12:33:37 PM	H2 MFC set to  500.000000
9/8/2010	12:33:37 PM	BCl3 MFC set to  0.000000
9/8/2010	12:33:37 PM	PHl3 MFC set to  0.000000
9/8/2010	12:33:37 PM	SiCl4 MFC set to  0.000000
9/8/2010	12:33:37 PM	Bypass solenoid MFC set to  0.000000
9/8/2010	12:33:37 PM	Tube furnace set to 0
9/8/2010	12:34:58 PM	Helium valve closed
9/8/2010	12:34:58 PM	BCl3 valve closed
9/8/2010	12:34:58 PM	PH3 valve closed
9/8/2010	12:34:58 PM	SiCl4 pre valve closed
9/8/2010	12:34:58 PM	SiCl4 post valve closed
9/8/2010	12:34:58 PM	Main Vac valve closed
9/8/2010	12:34:58 PM	Bypass valve closed
9/8/2010	12:34:58 PM	H2 valve opened
9/8/2010	12:34:58 PM	Bubbler valve opened
9/8/2010	12:34:58 PM	Helium MFC set to  0.000000
9/8/2010	12:34:58 PM	H2 MFC set to  500.000000
9/8/2010	12:34:58 PM	BCl3 MFC set to  0.000000
9/8/2010	12:34:58 PM	PHl3 MFC set to  0.000000
9/8/2010	12:34:58 PM	SiCl4 MFC set to  0.000000
9/8/2010	12:34:58 PM	Bypass solenoid MFC set to  0.000000
9/8/2010	12:34:58 PM	Tube furnace set to 1000
9/8/2010	12:54:58 PM	Helium valve closed
9/8/2010	12:54:58 PM	BCl3 valve closed
9/8/2010	12:54:58 PM	PH3 valve closed
9/8/2010	12:54:58 PM	Main Vac valve closed
9/8/2010	12:54:58 PM	Bypass valve closed
9/8/2010	12:54:58 PM	H2 valve opened
9/8/2010	12:54:58 PM	SiCl4 pre valve opened
9/8/2010	12:54:58 PM	SiCl4 post valve opened
9/8/2010	12:54:58 PM	Bubbler valve opened
9/8/2010	12:54:58 PM	Helium MFC set to  0.000000
9/8/2010	12:54:58 PM	H2 MFC set to  500.000000
9/8/2010	12:54:58 PM	BCl3 MFC set to  0.000000
9/8/2010	12:54:58 PM	PHl3 MFC set to  0.000000
9/8/2010	12:54:58 PM	SiCl4 MFC set to  50.000000
9/8/2010	12:54:58 PM	Bypass solenoid MFC set to  0.000000
9/8/2010	12:54:58 PM	Tube furnace set to 1000
9/8/2010	1:14:58 PM	H2 valve closed
9/8/2010	1:14:58 PM	BCl3 valve closed
9/8/2010	1:14:58 PM	PH3 valve closed
9/8/2010	1:14:58 PM	SiCl4 pre valve closed
9/8/2010	1:14:58 PM	SiCl4 post valve closed
9/8/2010	1:14:58 PM	Main Vac valve closed
9/8/2010	1:14:58 PM	Bypass valve closed
9/8/2010	1:14:58 PM	Helium valve opened
9/8/2010	1:14:58 PM	Bubbler valve opened
9/8/2010	1:14:58 PM	Helium MFC set to  500.000000
9/8/2010	1:14:58 PM	H2 MFC set to  0.000000
9/8/2010	1:14:58 PM	BCl3 MFC set to  0.000000
9/8/2010	1:14:58 PM	PHl3 MFC set to  0.000000
9/8/2010	1:14:58 PM	SiCl4 MFC set to  0.000000
9/8/2010	1:14:58 PM	Bypass solenoid MFC set to  0.000000
9/8/2010	1:14:59 PM	Tube furnace set to 950
9/8/2010	1:19:59 PM	H2 valve closed
9/8/2010	1:19:59 PM	BCl3 valve closed
9/8/2010	1:19:59 PM	PH3 valve closed
9/8/2010	1:19:59 PM	SiCl4 pre valve closed
9/8/2010	1:19:59 PM	SiCl4 post valve closed
9/8/2010	1:19:59 PM	Main Vac valve closed
9/8/2010	1:19:59 PM	Bypass valve closed
9/8/2010	1:19:59 PM	Helium valve opened
9/8/2010	1:19:59 PM	Bubbler valve opened
9/8/2010	1:19:59 PM	Helium MFC set to  500.000000
9/8/2010	1:19:59 PM	H2 MFC set to  0.000000
9/8/2010	1:19:59 PM	BCl3 MFC set to  0.000000
9/8/2010	1:19:59 PM	PHl3 MFC set to  0.000000
9/8/2010	1:19:59 PM	SiCl4 MFC set to  0.000000
9/8/2010	1:19:59 PM	Bypass solenoid MFC set to  0.000000
9/8/2010	1:19:59 PM	Tube furnace set to 900
9/8/2010	1:24:59 PM	H2 valve closed
9/8/2010	1:24:59 PM	BCl3 valve closed
9/8/2010	1:24:59 PM	PH3 valve closed
9/8/2010	1:24:59 PM	SiCl4 pre valve closed
9/8/2010	1:24:59 PM	SiCl4 post valve closed
9/8/2010	1:24:59 PM	Main Vac valve closed
9/8/2010	1:24:59 PM	Bypass valve closed
9/8/2010	1:24:59 PM	Helium valve opened
9/8/2010	1:24:59 PM	Bubbler valve opened
9/8/2010	1:24:59 PM	Helium MFC set to  500.000000
9/8/2010	1:24:59 PM	H2 MFC set to  0.000000
9/8/2010	1:24:59 PM	BCl3 MFC set to  0.000000
9/8/2010	1:24:59 PM	PHl3 MFC set to  0.000000
9/8/2010	1:24:59 PM	SiCl4 MFC set to  0.000000
9/8/2010	1:24:59 PM	Bypass solenoid MFC set to  0.000000
9/8/2010	1:24:59 PM	Tube furnace set to 850
9/8/2010	1:29:59 PM	H2 valve closed
9/8/2010	1:29:59 PM	BCl3 valve closed
9/8/2010	1:29:59 PM	PH3 valve closed
9/8/2010	1:29:59 PM	SiCl4 pre valve closed
9/8/2010	1:29:59 PM	SiCl4 post valve closed
9/8/2010	1:29:59 PM	Main Vac valve closed
9/8/2010	1:29:59 PM	Bypass valve closed
9/8/2010	1:29:59 PM	Helium valve opened
9/8/2010	1:29:59 PM	Bubbler valve opened
9/8/2010	1:29:59 PM	Helium MFC set to  500.000000
9/8/2010	1:29:59 PM	H2 MFC set to  0.000000
9/8/2010	1:29:59 PM	BCl3 MFC set to  0.000000
9/8/2010	1:29:59 PM	PHl3 MFC set to  0.000000
9/8/2010	1:29:59 PM	SiCl4 MFC set to  0.000000
9/8/2010	1:29:59 PM	Bypass solenoid MFC set to  0.000000
9/8/2010	1:29:59 PM	Tube furnace set to 800
9/8/2010	1:34:59 PM	H2 valve closed
9/8/2010	1:34:59 PM	BCl3 valve closed
9/8/2010	1:34:59 PM	PH3 valve closed
9/8/2010	1:34:59 PM	SiCl4 pre valve closed
9/8/2010	1:34:59 PM	SiCl4 post valve closed
9/8/2010	1:34:59 PM	Main Vac valve closed
9/8/2010	1:34:59 PM	Bypass valve closed
9/8/2010	1:34:59 PM	Helium valve opened
9/8/2010	1:34:59 PM	Bubbler valve opened
9/8/2010	1:34:59 PM	Helium MFC set to  500.000000
9/8/2010	1:34:59 PM	H2 MFC set to  0.000000
9/8/2010	1:34:59 PM	BCl3 MFC set to  0.000000
9/8/2010	1:34:59 PM	PHl3 MFC set to  0.000000
9/8/2010	1:34:59 PM	SiCl4 MFC set to  0.000000
9/8/2010	1:34:59 PM	Bypass solenoid MFC set to  0.000000
9/8/2010	1:35:00 PM	Tube furnace set to 750
9/8/2010	1:40:00 PM	H2 valve closed
9/8/2010	1:40:00 PM	BCl3 valve closed
9/8/2010	1:40:00 PM	PH3 valve closed
9/8/2010	1:40:00 PM	SiCl4 pre valve closed
9/8/2010	1:40:00 PM	SiCl4 post valve closed
9/8/2010	1:40:00 PM	Main Vac valve closed
9/8/2010	1:40:00 PM	Bypass valve closed
9/8/2010	1:40:00 PM	Helium valve opened
9/8/2010	1:40:00 PM	Bubbler valve opened
9/8/2010	1:40:00 PM	Helium MFC set to  500.000000
9/8/2010	1:40:00 PM	H2 MFC set to  0.000000
9/8/2010	1:40:00 PM	BCl3 MFC set to  0.000000
9/8/2010	1:40:00 PM	PHl3 MFC set to  0.000000
9/8/2010	1:40:00 PM	SiCl4 MFC set to  0.000000
9/8/2010	1:40:00 PM	Bypass solenoid MFC set to  0.000000
9/8/2010	1:40:00 PM	Tube furnace set to 700
9/8/2010	1:45:00 PM	H2 valve closed
9/8/2010	1:45:00 PM	BCl3 valve closed
9/8/2010	1:45:00 PM	PH3 valve closed
9/8/2010	1:45:00 PM	SiCl4 pre valve closed
9/8/2010	1:45:00 PM	SiCl4 post valve closed
9/8/2010	1:45:00 PM	Main Vac valve closed
9/8/2010	1:45:00 PM	Bypass valve closed
9/8/2010	1:45:00 PM	Helium valve opened
9/8/2010	1:45:00 PM	Bubbler valve opened
9/8/2010	1:45:00 PM	Helium MFC set to  500.000000
9/8/2010	1:45:00 PM	H2 MFC set to  0.000000
9/8/2010	1:45:00 PM	BCl3 MFC set to  0.000000
9/8/2010	1:45:00 PM	PHl3 MFC set to  0.000000
9/8/2010	1:45:00 PM	SiCl4 MFC set to  0.000000
9/8/2010	1:45:00 PM	Bypass solenoid MFC set to  0.000000
9/8/2010	1:45:00 PM	Tube furnace set to 0
9/8/2010	2:05:00 PM	Helium valve closed
9/8/2010	2:05:00 PM	H2 valve closed
9/8/2010	2:05:00 PM	BCl3 valve closed
9/8/2010	2:05:00 PM	PH3 valve closed
9/8/2010	2:05:00 PM	SiCl4 pre valve closed
9/8/2010	2:05:00 PM	SiCl4 post valve closed
9/8/2010	2:05:00 PM	Main Vac valve closed
9/8/2010	2:05:00 PM	Bypass valve closed
9/8/2010	2:05:00 PM	Bubbler valve closed
9/8/2010	2:05:00 PM	Helium MFC set to  0.000000
9/8/2010	2:05:00 PM	H2 MFC set to  0.000000
9/8/2010	2:05:00 PM	BCl3 MFC set to  0.000000
9/8/2010	2:05:00 PM	PHl3 MFC set to  0.000000
9/8/2010	2:05:00 PM	SiCl4 MFC set to  0.000000
9/8/2010	2:05:00 PM	Bypass solenoid MFC set to  0.000000
9/8/2010	2:05:00 PM	Tube furnace set to 0
9/8/2010	2:05:00 PM	Run finished at 2:05 PM
9/8/2010	2:22:04 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/8/2010	2:22:04 PM	Recipe started at 2:22 PM
9/8/2010	2:22:04 PM	H2 valve closed
9/8/2010	2:22:04 PM	BCl3 valve closed
9/8/2010	2:22:04 PM	PH3 valve closed
9/8/2010	2:22:04 PM	SiCl4 pre valve closed
9/8/2010	2:22:04 PM	SiCl4 post valve closed
9/8/2010	2:22:04 PM	Main Vac valve closed
9/8/2010	2:22:04 PM	Bypass valve closed
9/8/2010	2:22:04 PM	Bubbler valve closed
9/8/2010	2:22:04 PM	Helium valve opened
9/8/2010	2:22:04 PM	Helium MFC set to  500.000000
9/8/2010	2:22:04 PM	H2 MFC set to  0.000000
9/8/2010	2:22:04 PM	BCl3 MFC set to  0.000000
9/8/2010	2:22:04 PM	PHl3 MFC set to  0.000000
9/8/2010	2:22:04 PM	SiCl4 MFC set to  0.000000
9/8/2010	2:22:04 PM	Bypass solenoid MFC set to  0.000000
9/8/2010	2:22:04 PM	Tube furnace set to 0
9/8/2010	2:22:05 PM	Helium valve closed
9/8/2010	2:22:05 PM	H2 valve closed
9/8/2010	2:22:05 PM	BCl3 valve closed
9/8/2010	2:22:05 PM	PH3 valve closed
9/8/2010	2:22:05 PM	SiCl4 pre valve closed
9/8/2010	2:22:05 PM	SiCl4 post valve closed
9/8/2010	2:22:05 PM	Main Vac valve closed
9/8/2010	2:22:05 PM	Bypass valve closed
9/8/2010	2:22:05 PM	Bubbler valve closed
9/8/2010	2:22:05 PM	Helium MFC set to  0.000000
9/8/2010	2:22:05 PM	H2 MFC set to  0.000000
9/8/2010	2:22:05 PM	BCl3 MFC set to  0.000000
9/8/2010	2:22:05 PM	PHl3 MFC set to  0.000000
9/8/2010	2:22:05 PM	SiCl4 MFC set to  0.000000
9/8/2010	2:22:05 PM	Bypass solenoid MFC set to  0.000000
9/8/2010	2:22:05 PM	Tube furnace set to 0
9/8/2010	2:22:05 PM	Run finished at 2:22 PM
9/8/2010	2:22:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/8/2010	3:06:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/8/2010	3:06:08 PM	Recipe started at 3:06 PM
9/8/2010	3:06:08 PM	Helium valve closed
9/8/2010	3:06:08 PM	H2 valve closed
9/8/2010	3:06:08 PM	BCl3 valve closed
9/8/2010	3:06:08 PM	PH3 valve closed
9/8/2010	3:06:08 PM	SiCl4 pre valve closed
9/8/2010	3:06:08 PM	SiCl4 post valve closed
9/8/2010	3:06:08 PM	Main Vac valve closed
9/8/2010	3:06:08 PM	Bubbler valve closed
9/8/2010	3:06:08 PM	Bypass valve opened
9/8/2010	3:06:08 PM	Helium MFC set to  0.000000
9/8/2010	3:06:08 PM	H2 MFC set to  0.000000
9/8/2010	3:06:08 PM	BCl3 MFC set to  0.000000
9/8/2010	3:06:08 PM	PHl3 MFC set to  0.000000
9/8/2010	3:06:08 PM	SiCl4 MFC set to  0.000000
9/8/2010	3:06:08 PM	Bypass solenoid MFC set to  0.000000
9/8/2010	3:06:08 PM	Tube furnace set to 0
9/8/2010	3:06:50 PM	Helium valve closed
9/8/2010	3:06:50 PM	H2 valve closed
9/8/2010	3:06:50 PM	BCl3 valve closed
9/8/2010	3:06:50 PM	PH3 valve closed
9/8/2010	3:06:50 PM	SiCl4 pre valve closed
9/8/2010	3:06:50 PM	SiCl4 post valve closed
9/8/2010	3:06:50 PM	Bubbler valve closed
9/8/2010	3:06:50 PM	Main Vac valve opened
9/8/2010	3:06:50 PM	Bypass valve opened
9/8/2010	3:06:50 PM	Helium MFC set to  0.000000
9/8/2010	3:06:50 PM	H2 MFC set to  0.000000
9/8/2010	3:06:50 PM	BCl3 MFC set to  0.000000
9/8/2010	3:06:50 PM	PHl3 MFC set to  0.000000
9/8/2010	3:06:50 PM	SiCl4 MFC set to  0.000000
9/8/2010	3:06:50 PM	Bypass solenoid MFC set to  0.000000
9/8/2010	3:06:50 PM	Tube furnace set to 0
9/8/2010	3:06:50 PM	Run finished at 3:06 PM
9/8/2010	3:06:50 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/8/2010	7:08:59 PM	Program exited cleanly
9/8/2010	7:11:51 PM	Program started normally
9/8/2010	7:11:51 PM	Helium valve closed
9/8/2010	7:11:51 PM	H2 valve closed
9/8/2010	7:11:51 PM	BCl3 valve closed
9/8/2010	7:11:51 PM	PH3 valve closed
9/8/2010	7:11:51 PM	SiCl4 pre valve closed
9/8/2010	7:11:51 PM	SiCl4 post valve closed
9/8/2010	7:11:51 PM	Main Vac valve closed
9/8/2010	7:11:51 PM	Bypass valve closed
9/8/2010	7:11:51 PM	Bubbler valve closed
9/8/2010	7:11:51 PM	Helium MFC set to  0.000000
9/8/2010	7:11:51 PM	H2 MFC set to  0.000000
9/8/2010	7:11:51 PM	BCl3 MFC set to  0.000000
9/8/2010	7:11:51 PM	PHl3 MFC set to  0.000000
9/8/2010	7:11:51 PM	SiCl4 MFC set to  0.000000
9/8/2010	7:11:51 PM	Bypass solenoid MFC set to  760.000000
9/8/2010	7:11:51 PM	Tube furnace set to 0
9/8/2010	7:11:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/8/2010	7:12:08 PM	Recipe started at 7:12 PM
9/8/2010	7:12:08 PM	Helium valve closed
9/8/2010	7:12:08 PM	H2 valve closed
9/8/2010	7:12:08 PM	BCl3 valve closed
9/8/2010	7:12:08 PM	PH3 valve closed
9/8/2010	7:12:08 PM	SiCl4 pre valve closed
9/8/2010	7:12:08 PM	SiCl4 post valve closed
9/8/2010	7:12:08 PM	Main Vac valve closed
9/8/2010	7:12:08 PM	Bubbler valve closed
9/8/2010	7:12:08 PM	Bypass valve opened
9/8/2010	7:12:08 PM	Helium MFC set to  0.000000
9/8/2010	7:12:08 PM	H2 MFC set to  0.000000
9/8/2010	7:12:08 PM	BCl3 MFC set to  0.000000
9/8/2010	7:12:08 PM	PHl3 MFC set to  0.000000
9/8/2010	7:12:08 PM	SiCl4 MFC set to  0.000000
9/8/2010	7:12:08 PM	Bypass solenoid MFC set to  0.000000
9/8/2010	7:12:08 PM	Tube furnace set to 0
9/8/2010	7:12:08 PM	Helium valve closed
9/8/2010	7:12:08 PM	H2 valve closed
9/8/2010	7:12:08 PM	BCl3 valve closed
9/8/2010	7:12:08 PM	PH3 valve closed
9/8/2010	7:12:08 PM	SiCl4 pre valve closed
9/8/2010	7:12:08 PM	SiCl4 post valve closed
9/8/2010	7:12:08 PM	Bubbler valve closed
9/8/2010	7:12:08 PM	Main Vac valve opened
9/8/2010	7:12:08 PM	Bypass valve opened
9/8/2010	7:12:08 PM	Helium MFC set to  0.000000
9/8/2010	7:12:08 PM	H2 MFC set to  0.000000
9/8/2010	7:12:08 PM	BCl3 MFC set to  0.000000
9/8/2010	7:12:08 PM	PHl3 MFC set to  0.000000
9/8/2010	7:12:08 PM	SiCl4 MFC set to  0.000000
9/8/2010	7:12:08 PM	Bypass solenoid MFC set to  0.000000
9/8/2010	7:12:08 PM	Tube furnace set to 0
9/8/2010	7:12:15 PM	H2 valve closed
9/8/2010	7:12:15 PM	BCl3 valve closed
9/8/2010	7:12:15 PM	PH3 valve closed
9/8/2010	7:12:15 PM	SiCl4 pre valve closed
9/8/2010	7:12:15 PM	SiCl4 post valve closed
9/8/2010	7:12:15 PM	Bubbler valve closed
9/8/2010	7:12:15 PM	Helium valve opened
9/8/2010	7:12:15 PM	Main Vac valve opened
9/8/2010	7:12:15 PM	Bypass valve opened
9/8/2010	7:12:15 PM	Helium MFC set to  100.000000
9/8/2010	7:12:15 PM	H2 MFC set to  0.000000
9/8/2010	7:12:15 PM	BCl3 MFC set to  0.000000
9/8/2010	7:12:15 PM	PHl3 MFC set to  0.000000
9/8/2010	7:12:15 PM	SiCl4 MFC set to  0.000000
9/8/2010	7:12:15 PM	Bypass solenoid MFC set to  0.000000
9/8/2010	7:12:15 PM	Tube furnace set to 0
9/8/2010	7:12:20 PM	Helium valve closed
9/8/2010	7:12:20 PM	H2 valve closed
9/8/2010	7:12:20 PM	BCl3 valve closed
9/8/2010	7:12:20 PM	PH3 valve closed
9/8/2010	7:12:20 PM	SiCl4 pre valve closed
9/8/2010	7:12:20 PM	SiCl4 post valve closed
9/8/2010	7:12:20 PM	Bubbler valve closed
9/8/2010	7:12:20 PM	Main Vac valve opened
9/8/2010	7:12:20 PM	Bypass valve opened
9/8/2010	7:12:20 PM	Helium MFC set to  0.000000
9/8/2010	7:12:20 PM	H2 MFC set to  0.000000
9/8/2010	7:12:20 PM	BCl3 MFC set to  0.000000
9/8/2010	7:12:20 PM	PHl3 MFC set to  0.000000
9/8/2010	7:12:20 PM	SiCl4 MFC set to  0.000000
9/8/2010	7:12:20 PM	Bypass solenoid MFC set to  0.000000
9/8/2010	7:12:20 PM	Tube furnace set to 0
9/8/2010	7:12:25 PM	H2 valve closed
9/8/2010	7:12:25 PM	BCl3 valve closed
9/8/2010	7:12:25 PM	PH3 valve closed
9/8/2010	7:12:25 PM	SiCl4 pre valve closed
9/8/2010	7:12:25 PM	SiCl4 post valve closed
9/8/2010	7:12:25 PM	Bubbler valve closed
9/8/2010	7:12:25 PM	Helium valve opened
9/8/2010	7:12:25 PM	Main Vac valve opened
9/8/2010	7:12:25 PM	Bypass valve opened
9/8/2010	7:12:25 PM	Helium MFC set to  100.000000
9/8/2010	7:12:25 PM	H2 MFC set to  0.000000
9/8/2010	7:12:25 PM	BCl3 MFC set to  0.000000
9/8/2010	7:12:25 PM	PHl3 MFC set to  0.000000
9/8/2010	7:12:25 PM	SiCl4 MFC set to  0.000000
9/8/2010	7:12:25 PM	Bypass solenoid MFC set to  0.000000
9/8/2010	7:12:25 PM	Tube furnace set to 0
9/8/2010	7:12:29 PM	Helium valve closed
9/8/2010	7:12:29 PM	H2 valve closed
9/8/2010	7:12:29 PM	BCl3 valve closed
9/8/2010	7:12:29 PM	PH3 valve closed
9/8/2010	7:12:29 PM	SiCl4 pre valve closed
9/8/2010	7:12:29 PM	SiCl4 post valve closed
9/8/2010	7:12:29 PM	Bubbler valve closed
9/8/2010	7:12:29 PM	Main Vac valve opened
9/8/2010	7:12:29 PM	Bypass valve opened
9/8/2010	7:12:29 PM	Helium MFC set to  0.000000
9/8/2010	7:12:29 PM	H2 MFC set to  0.000000
9/8/2010	7:12:29 PM	BCl3 MFC set to  0.000000
9/8/2010	7:12:29 PM	PHl3 MFC set to  0.000000
9/8/2010	7:12:29 PM	SiCl4 MFC set to  0.000000
9/8/2010	7:12:29 PM	Bypass solenoid MFC set to  0.000000
9/8/2010	7:12:29 PM	Tube furnace set to 0
9/8/2010	7:12:33 PM	H2 valve closed
9/8/2010	7:12:33 PM	BCl3 valve closed
9/8/2010	7:12:33 PM	PH3 valve closed
9/8/2010	7:12:33 PM	SiCl4 pre valve closed
9/8/2010	7:12:34 PM	SiCl4 post valve closed
9/8/2010	7:12:34 PM	Bubbler valve closed
9/8/2010	7:12:34 PM	Helium valve opened
9/8/2010	7:12:34 PM	Main Vac valve opened
9/8/2010	7:12:34 PM	Bypass valve opened
9/8/2010	7:12:34 PM	Helium MFC set to  100.000000
9/8/2010	7:12:34 PM	H2 MFC set to  0.000000
9/8/2010	7:12:34 PM	BCl3 MFC set to  0.000000
9/8/2010	7:12:34 PM	PHl3 MFC set to  0.000000
9/8/2010	7:12:34 PM	SiCl4 MFC set to  0.000000
9/8/2010	7:12:34 PM	Bypass solenoid MFC set to  0.000000
9/8/2010	7:12:34 PM	Tube furnace set to 0
9/8/2010	7:12:36 PM	Helium valve closed
9/8/2010	7:12:36 PM	H2 valve closed
9/8/2010	7:12:36 PM	BCl3 valve closed
9/8/2010	7:12:36 PM	PH3 valve closed
9/8/2010	7:12:36 PM	SiCl4 pre valve closed
9/8/2010	7:12:36 PM	SiCl4 post valve closed
9/8/2010	7:12:36 PM	Bubbler valve closed
9/8/2010	7:12:36 PM	Main Vac valve opened
9/8/2010	7:12:36 PM	Bypass valve opened
9/8/2010	7:12:36 PM	Helium MFC set to  0.000000
9/8/2010	7:12:36 PM	H2 MFC set to  0.000000
9/8/2010	7:12:36 PM	BCl3 MFC set to  0.000000
9/8/2010	7:12:36 PM	PHl3 MFC set to  0.000000
9/8/2010	7:12:36 PM	SiCl4 MFC set to  0.000000
9/8/2010	7:12:36 PM	Bypass solenoid MFC set to  0.000000
9/8/2010	7:12:36 PM	Tube furnace set to 0
9/8/2010	7:12:42 PM	H2 valve closed
9/8/2010	7:12:42 PM	BCl3 valve closed
9/8/2010	7:12:42 PM	PH3 valve closed
9/8/2010	7:12:42 PM	SiCl4 pre valve closed
9/8/2010	7:12:42 PM	SiCl4 post valve closed
9/8/2010	7:12:42 PM	Bubbler valve closed
9/8/2010	7:12:42 PM	Helium valve opened
9/8/2010	7:12:42 PM	Main Vac valve opened
9/8/2010	7:12:42 PM	Bypass valve opened
9/8/2010	7:12:42 PM	Helium MFC set to  100.000000
9/8/2010	7:12:42 PM	H2 MFC set to  0.000000
9/8/2010	7:12:42 PM	BCl3 MFC set to  0.000000
9/8/2010	7:12:42 PM	PHl3 MFC set to  0.000000
9/8/2010	7:12:42 PM	SiCl4 MFC set to  0.000000
9/8/2010	7:12:42 PM	Bypass solenoid MFC set to  0.000000
9/8/2010	7:12:42 PM	Tube furnace set to 0
9/8/2010	7:12:45 PM	Helium valve closed
9/8/2010	7:12:45 PM	H2 valve closed
9/8/2010	7:12:45 PM	BCl3 valve closed
9/8/2010	7:12:45 PM	PH3 valve closed
9/8/2010	7:12:45 PM	SiCl4 pre valve closed
9/8/2010	7:12:45 PM	SiCl4 post valve closed
9/8/2010	7:12:45 PM	Bubbler valve closed
9/8/2010	7:12:45 PM	Main Vac valve opened
9/8/2010	7:12:45 PM	Bypass valve opened
9/8/2010	7:12:45 PM	Helium MFC set to  0.000000
9/8/2010	7:12:45 PM	H2 MFC set to  0.000000
9/8/2010	7:12:45 PM	BCl3 MFC set to  0.000000
9/8/2010	7:12:45 PM	PHl3 MFC set to  0.000000
9/8/2010	7:12:45 PM	SiCl4 MFC set to  0.000000
9/8/2010	7:12:45 PM	Bypass solenoid MFC set to  0.000000
9/8/2010	7:12:46 PM	Tube furnace set to 0
9/8/2010	7:12:49 PM	H2 valve closed
9/8/2010	7:12:49 PM	BCl3 valve closed
9/8/2010	7:12:49 PM	PH3 valve closed
9/8/2010	7:12:49 PM	SiCl4 pre valve closed
9/8/2010	7:12:49 PM	SiCl4 post valve closed
9/8/2010	7:12:49 PM	Bubbler valve closed
9/8/2010	7:12:49 PM	Helium valve opened
9/8/2010	7:12:49 PM	Main Vac valve opened
9/8/2010	7:12:49 PM	Bypass valve opened
9/8/2010	7:12:49 PM	Helium MFC set to  100.000000
9/8/2010	7:12:49 PM	H2 MFC set to  0.000000
9/8/2010	7:12:49 PM	BCl3 MFC set to  0.000000
9/8/2010	7:12:49 PM	PHl3 MFC set to  0.000000
9/8/2010	7:12:49 PM	SiCl4 MFC set to  0.000000
9/8/2010	7:12:49 PM	Bypass solenoid MFC set to  0.000000
9/8/2010	7:12:49 PM	Tube furnace set to 0
9/8/2010	7:12:54 PM	Helium valve closed
9/8/2010	7:12:54 PM	H2 valve closed
9/8/2010	7:12:54 PM	BCl3 valve closed
9/8/2010	7:12:54 PM	PH3 valve closed
9/8/2010	7:12:54 PM	SiCl4 pre valve closed
9/8/2010	7:12:54 PM	SiCl4 post valve closed
9/8/2010	7:12:54 PM	Bubbler valve closed
9/8/2010	7:12:54 PM	Main Vac valve opened
9/8/2010	7:12:54 PM	Bypass valve opened
9/8/2010	7:12:54 PM	Helium MFC set to  0.000000
9/8/2010	7:12:54 PM	H2 MFC set to  0.000000
9/8/2010	7:12:54 PM	BCl3 MFC set to  0.000000
9/8/2010	7:12:54 PM	PHl3 MFC set to  0.000000
9/8/2010	7:12:54 PM	SiCl4 MFC set to  0.000000
9/8/2010	7:12:54 PM	Bypass solenoid MFC set to  0.000000
9/8/2010	7:12:54 PM	Tube furnace set to 0
9/8/2010	7:12:58 PM	H2 valve closed
9/8/2010	7:12:58 PM	BCl3 valve closed
9/8/2010	7:12:58 PM	PH3 valve closed
9/8/2010	7:12:58 PM	SiCl4 pre valve closed
9/8/2010	7:12:58 PM	SiCl4 post valve closed
9/8/2010	7:12:58 PM	Bubbler valve closed
9/8/2010	7:12:58 PM	Helium valve opened
9/8/2010	7:12:58 PM	Main Vac valve opened
9/8/2010	7:12:58 PM	Bypass valve opened
9/8/2010	7:12:58 PM	Helium MFC set to  100.000000
9/8/2010	7:12:58 PM	H2 MFC set to  0.000000
9/8/2010	7:12:58 PM	BCl3 MFC set to  0.000000
9/8/2010	7:12:58 PM	PHl3 MFC set to  0.000000
9/8/2010	7:12:58 PM	SiCl4 MFC set to  0.000000
9/8/2010	7:12:58 PM	Bypass solenoid MFC set to  0.000000
9/8/2010	7:12:58 PM	Tube furnace set to 0
9/8/2010	7:13:06 PM	Helium valve closed
9/8/2010	7:13:06 PM	H2 valve closed
9/8/2010	7:13:06 PM	BCl3 valve closed
9/8/2010	7:13:06 PM	PH3 valve closed
9/8/2010	7:13:06 PM	SiCl4 pre valve closed
9/8/2010	7:13:06 PM	SiCl4 post valve closed
9/8/2010	7:13:06 PM	Bubbler valve closed
9/8/2010	7:13:06 PM	Main Vac valve opened
9/8/2010	7:13:06 PM	Bypass valve opened
9/8/2010	7:13:06 PM	Helium MFC set to  0.000000
9/8/2010	7:13:06 PM	H2 MFC set to  0.000000
9/8/2010	7:13:06 PM	BCl3 MFC set to  0.000000
9/8/2010	7:13:06 PM	PHl3 MFC set to  0.000000
9/8/2010	7:13:06 PM	SiCl4 MFC set to  0.000000
9/8/2010	7:13:06 PM	Bypass solenoid MFC set to  0.000000
9/8/2010	7:13:06 PM	Tube furnace set to 0
9/8/2010	7:13:10 PM	H2 valve closed
9/8/2010	7:13:10 PM	BCl3 valve closed
9/8/2010	7:13:10 PM	PH3 valve closed
9/8/2010	7:13:10 PM	SiCl4 pre valve closed
9/8/2010	7:13:10 PM	SiCl4 post valve closed
9/8/2010	7:13:10 PM	Bubbler valve closed
9/8/2010	7:13:10 PM	Helium valve opened
9/8/2010	7:13:10 PM	Main Vac valve opened
9/8/2010	7:13:10 PM	Bypass valve opened
9/8/2010	7:13:10 PM	Helium MFC set to  100.000000
9/8/2010	7:13:10 PM	H2 MFC set to  0.000000
9/8/2010	7:13:10 PM	BCl3 MFC set to  0.000000
9/8/2010	7:13:10 PM	PHl3 MFC set to  0.000000
9/8/2010	7:13:10 PM	SiCl4 MFC set to  0.000000
9/8/2010	7:13:10 PM	Bypass solenoid MFC set to  0.000000
9/8/2010	7:13:10 PM	Tube furnace set to 0
9/8/2010	7:13:14 PM	Helium valve closed
9/8/2010	7:13:14 PM	H2 valve closed
9/8/2010	7:13:14 PM	BCl3 valve closed
9/8/2010	7:13:14 PM	PH3 valve closed
9/8/2010	7:13:14 PM	SiCl4 pre valve closed
9/8/2010	7:13:14 PM	SiCl4 post valve closed
9/8/2010	7:13:14 PM	Bubbler valve closed
9/8/2010	7:13:14 PM	Main Vac valve opened
9/8/2010	7:13:14 PM	Bypass valve opened
9/8/2010	7:13:14 PM	Helium MFC set to  0.000000
9/8/2010	7:13:14 PM	H2 MFC set to  0.000000
9/8/2010	7:13:14 PM	BCl3 MFC set to  0.000000
9/8/2010	7:13:14 PM	PHl3 MFC set to  0.000000
9/8/2010	7:13:14 PM	SiCl4 MFC set to  0.000000
9/8/2010	7:13:14 PM	Bypass solenoid MFC set to  0.000000
9/8/2010	7:13:14 PM	Tube furnace set to 0
9/8/2010	7:13:16 PM	H2 valve closed
9/8/2010	7:13:16 PM	BCl3 valve closed
9/8/2010	7:13:16 PM	PH3 valve closed
9/8/2010	7:13:16 PM	SiCl4 pre valve closed
9/8/2010	7:13:16 PM	SiCl4 post valve closed
9/8/2010	7:13:16 PM	Bubbler valve closed
9/8/2010	7:13:16 PM	Helium valve opened
9/8/2010	7:13:16 PM	Main Vac valve opened
9/8/2010	7:13:16 PM	Bypass valve opened
9/8/2010	7:13:16 PM	Helium MFC set to  100.000000
9/8/2010	7:13:16 PM	H2 MFC set to  0.000000
9/8/2010	7:13:16 PM	BCl3 MFC set to  0.000000
9/8/2010	7:13:16 PM	PHl3 MFC set to  0.000000
9/8/2010	7:13:16 PM	SiCl4 MFC set to  0.000000
9/8/2010	7:13:16 PM	Bypass solenoid MFC set to  0.000000
9/8/2010	7:13:16 PM	Tube furnace set to 0
9/8/2010	7:13:18 PM	Helium valve closed
9/8/2010	7:13:18 PM	H2 valve closed
9/8/2010	7:13:18 PM	BCl3 valve closed
9/8/2010	7:13:18 PM	PH3 valve closed
9/8/2010	7:13:18 PM	SiCl4 pre valve closed
9/8/2010	7:13:18 PM	SiCl4 post valve closed
9/8/2010	7:13:18 PM	Bubbler valve closed
9/8/2010	7:13:18 PM	Main Vac valve opened
9/8/2010	7:13:18 PM	Bypass valve opened
9/8/2010	7:13:18 PM	Helium MFC set to  0.000000
9/8/2010	7:13:18 PM	H2 MFC set to  0.000000
9/8/2010	7:13:18 PM	BCl3 MFC set to  0.000000
9/8/2010	7:13:18 PM	PHl3 MFC set to  0.000000
9/8/2010	7:13:18 PM	SiCl4 MFC set to  0.000000
9/8/2010	7:13:18 PM	Bypass solenoid MFC set to  0.000000
9/8/2010	7:13:18 PM	Tube furnace set to 0
9/8/2010	7:13:20 PM	H2 valve closed
9/8/2010	7:13:20 PM	BCl3 valve closed
9/8/2010	7:13:20 PM	PH3 valve closed
9/8/2010	7:13:20 PM	SiCl4 pre valve closed
9/8/2010	7:13:20 PM	SiCl4 post valve closed
9/8/2010	7:13:20 PM	Bubbler valve closed
9/8/2010	7:13:20 PM	Helium valve opened
9/8/2010	7:13:20 PM	Main Vac valve opened
9/8/2010	7:13:20 PM	Bypass valve opened
9/8/2010	7:13:20 PM	Helium MFC set to  100.000000
9/8/2010	7:13:20 PM	H2 MFC set to  0.000000
9/8/2010	7:13:20 PM	BCl3 MFC set to  0.000000
9/8/2010	7:13:20 PM	PHl3 MFC set to  0.000000
9/8/2010	7:13:20 PM	SiCl4 MFC set to  0.000000
9/8/2010	7:13:20 PM	Bypass solenoid MFC set to  0.000000
9/8/2010	7:13:20 PM	Tube furnace set to 0
9/8/2010	7:13:22 PM	Helium valve closed
9/8/2010	7:13:22 PM	H2 valve closed
9/8/2010	7:13:22 PM	BCl3 valve closed
9/8/2010	7:13:22 PM	PH3 valve closed
9/8/2010	7:13:22 PM	SiCl4 pre valve closed
9/8/2010	7:13:22 PM	SiCl4 post valve closed
9/8/2010	7:13:22 PM	Bubbler valve closed
9/8/2010	7:13:22 PM	Main Vac valve opened
9/8/2010	7:13:22 PM	Bypass valve opened
9/8/2010	7:13:22 PM	Helium MFC set to  0.000000
9/8/2010	7:13:22 PM	H2 MFC set to  0.000000
9/8/2010	7:13:22 PM	BCl3 MFC set to  0.000000
9/8/2010	7:13:22 PM	PHl3 MFC set to  0.000000
9/8/2010	7:13:22 PM	SiCl4 MFC set to  0.000000
9/8/2010	7:13:22 PM	Bypass solenoid MFC set to  0.000000
9/8/2010	7:13:22 PM	Tube furnace set to 0
9/8/2010	7:13:23 PM	H2 valve closed
9/8/2010	7:13:23 PM	BCl3 valve closed
9/8/2010	7:13:23 PM	PH3 valve closed
9/8/2010	7:13:23 PM	SiCl4 pre valve closed
9/8/2010	7:13:23 PM	SiCl4 post valve closed
9/8/2010	7:13:23 PM	Bubbler valve closed
9/8/2010	7:13:23 PM	Helium valve opened
9/8/2010	7:13:23 PM	Main Vac valve opened
9/8/2010	7:13:23 PM	Bypass valve opened
9/8/2010	7:13:23 PM	Helium MFC set to  100.000000
9/8/2010	7:13:23 PM	H2 MFC set to  0.000000
9/8/2010	7:13:23 PM	BCl3 MFC set to  0.000000
9/8/2010	7:13:23 PM	PHl3 MFC set to  0.000000
9/8/2010	7:13:23 PM	SiCl4 MFC set to  0.000000
9/8/2010	7:13:23 PM	Bypass solenoid MFC set to  0.000000
9/8/2010	7:13:23 PM	Tube furnace set to 0
9/8/2010	7:13:25 PM	Helium valve closed
9/8/2010	7:13:25 PM	H2 valve closed
9/8/2010	7:13:25 PM	BCl3 valve closed
9/8/2010	7:13:25 PM	PH3 valve closed
9/8/2010	7:13:25 PM	SiCl4 pre valve closed
9/8/2010	7:13:25 PM	SiCl4 post valve closed
9/8/2010	7:13:25 PM	Bubbler valve closed
9/8/2010	7:13:25 PM	Main Vac valve opened
9/8/2010	7:13:25 PM	Bypass valve opened
9/8/2010	7:13:25 PM	Helium MFC set to  0.000000
9/8/2010	7:13:25 PM	H2 MFC set to  0.000000
9/8/2010	7:13:25 PM	BCl3 MFC set to  0.000000
9/8/2010	7:13:25 PM	PHl3 MFC set to  0.000000
9/8/2010	7:13:25 PM	SiCl4 MFC set to  0.000000
9/8/2010	7:13:25 PM	Bypass solenoid MFC set to  0.000000
9/8/2010	7:13:25 PM	Tube furnace set to 0
9/8/2010	7:13:26 PM	Run finished at 7:13 PM
9/8/2010	7:13:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/8/2010	7:13:44 PM	Helium valve opened
9/8/2010	7:13:47 PM	Helium MFC set to  100.000000
9/8/2010	7:13:54 PM	Helium valve closed
9/8/2010	10:24:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/8/2010	10:24:44 PM	Recipe started at 10:24 PM
9/8/2010	10:24:44 PM	H2 valve closed
9/8/2010	10:24:44 PM	BCl3 valve closed
9/8/2010	10:24:44 PM	PH3 valve closed
9/8/2010	10:24:44 PM	SiCl4 pre valve closed
9/8/2010	10:24:44 PM	SiCl4 post valve closed
9/8/2010	10:24:44 PM	Main Vac valve closed
9/8/2010	10:24:44 PM	Bypass valve closed
9/8/2010	10:24:44 PM	Bubbler valve closed
9/8/2010	10:24:44 PM	Helium valve opened
9/8/2010	10:24:44 PM	Helium MFC set to  500.000000
9/8/2010	10:24:44 PM	H2 MFC set to  0.000000
9/8/2010	10:24:44 PM	BCl3 MFC set to  0.000000
9/8/2010	10:24:44 PM	PHl3 MFC set to  0.000000
9/8/2010	10:24:44 PM	SiCl4 MFC set to  0.000000
9/8/2010	10:24:44 PM	Bypass solenoid MFC set to  0.000000
9/8/2010	10:24:45 PM	Tube furnace set to 0
9/8/2010	10:48:31 PM	Helium valve closed
9/8/2010	10:48:31 PM	H2 valve closed
9/8/2010	10:48:31 PM	BCl3 valve closed
9/8/2010	10:48:31 PM	PH3 valve closed
9/8/2010	10:48:31 PM	SiCl4 pre valve closed
9/8/2010	10:48:31 PM	SiCl4 post valve closed
9/8/2010	10:48:31 PM	Main Vac valve closed
9/8/2010	10:48:31 PM	Bypass valve closed
9/8/2010	10:48:31 PM	Bubbler valve closed
9/8/2010	10:48:31 PM	Helium MFC set to  0.000000
9/8/2010	10:48:31 PM	H2 MFC set to  0.000000
9/8/2010	10:48:31 PM	BCl3 MFC set to  0.000000
9/8/2010	10:48:31 PM	PHl3 MFC set to  0.000000
9/8/2010	10:48:31 PM	SiCl4 MFC set to  0.000000
9/8/2010	10:48:31 PM	Bypass solenoid MFC set to  0.000000
9/8/2010	10:48:31 PM	Tube furnace set to 0
9/8/2010	10:48:31 PM	Run finished at 10:48 PM
9/8/2010	10:48:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/8/2010	10:52:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/8/2010	10:52:06 PM	Recipe started at 10:52 PM
9/8/2010	10:52:06 PM	Helium valve closed
9/8/2010	10:52:06 PM	H2 valve closed
9/8/2010	10:52:06 PM	BCl3 valve closed
9/8/2010	10:52:06 PM	PH3 valve closed
9/8/2010	10:52:06 PM	SiCl4 pre valve closed
9/8/2010	10:52:06 PM	SiCl4 post valve closed
9/8/2010	10:52:06 PM	Main Vac valve closed
9/8/2010	10:52:06 PM	Bubbler valve closed
9/8/2010	10:52:06 PM	Bypass valve opened
9/8/2010	10:52:06 PM	Helium MFC set to  0.000000
9/8/2010	10:52:06 PM	H2 MFC set to  0.000000
9/8/2010	10:52:06 PM	BCl3 MFC set to  0.000000
9/8/2010	10:52:06 PM	PHl3 MFC set to  0.000000
9/8/2010	10:52:06 PM	SiCl4 MFC set to  0.000000
9/8/2010	10:52:06 PM	Bypass solenoid MFC set to  0.000000
9/8/2010	10:52:07 PM	Tube furnace set to 0
9/8/2010	10:52:49 PM	Helium valve closed
9/8/2010	10:52:49 PM	H2 valve closed
9/8/2010	10:52:49 PM	BCl3 valve closed
9/8/2010	10:52:49 PM	PH3 valve closed
9/8/2010	10:52:49 PM	SiCl4 pre valve closed
9/8/2010	10:52:49 PM	SiCl4 post valve closed
9/8/2010	10:52:49 PM	Bubbler valve closed
9/8/2010	10:52:49 PM	Main Vac valve opened
9/8/2010	10:52:49 PM	Bypass valve opened
9/8/2010	10:52:49 PM	Helium MFC set to  0.000000
9/8/2010	10:52:49 PM	H2 MFC set to  0.000000
9/8/2010	10:52:49 PM	BCl3 MFC set to  0.000000
9/8/2010	10:52:49 PM	PHl3 MFC set to  0.000000
9/8/2010	10:52:49 PM	SiCl4 MFC set to  0.000000
9/8/2010	10:52:49 PM	Bypass solenoid MFC set to  0.000000
9/8/2010	10:52:49 PM	Tube furnace set to 0
9/8/2010	10:52:49 PM	Run finished at 10:52 PM
9/8/2010	10:52:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/8/2010	10:54:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/8/2010	10:54:19 PM	Recipe started at 10:54 PM
9/8/2010	10:54:19 PM	Helium valve closed
9/8/2010	10:54:19 PM	H2 valve closed
9/8/2010	10:54:19 PM	BCl3 valve closed
9/8/2010	10:54:19 PM	PH3 valve closed
9/8/2010	10:54:19 PM	SiCl4 pre valve closed
9/8/2010	10:54:19 PM	SiCl4 post valve closed
9/8/2010	10:54:19 PM	Main Vac valve closed
9/8/2010	10:54:19 PM	Bubbler valve closed
9/8/2010	10:54:19 PM	Bypass valve opened
9/8/2010	10:54:19 PM	Helium MFC set to  0.000000
9/8/2010	10:54:19 PM	H2 MFC set to  0.000000
9/8/2010	10:54:19 PM	BCl3 MFC set to  0.000000
9/8/2010	10:54:19 PM	PHl3 MFC set to  0.000000
9/8/2010	10:54:19 PM	SiCl4 MFC set to  0.000000
9/8/2010	10:54:19 PM	Bypass solenoid MFC set to  0.000000
9/8/2010	10:54:19 PM	Tube furnace set to 0
9/8/2010	10:54:19 PM	Helium valve closed
9/8/2010	10:54:19 PM	H2 valve closed
9/8/2010	10:54:19 PM	BCl3 valve closed
9/8/2010	10:54:19 PM	PH3 valve closed
9/8/2010	10:54:19 PM	SiCl4 pre valve closed
9/8/2010	10:54:19 PM	SiCl4 post valve closed
9/8/2010	10:54:19 PM	Bubbler valve closed
9/8/2010	10:54:19 PM	Main Vac valve opened
9/8/2010	10:54:19 PM	Bypass valve opened
9/8/2010	10:54:19 PM	Helium MFC set to  0.000000
9/8/2010	10:54:19 PM	H2 MFC set to  0.000000
9/8/2010	10:54:19 PM	BCl3 MFC set to  0.000000
9/8/2010	10:54:19 PM	PHl3 MFC set to  0.000000
9/8/2010	10:54:19 PM	SiCl4 MFC set to  0.000000
9/8/2010	10:54:19 PM	Bypass solenoid MFC set to  0.000000
9/8/2010	10:54:20 PM	Tube furnace set to 0
9/8/2010	10:55:20 PM	H2 valve closed
9/8/2010	10:55:20 PM	BCl3 valve closed
9/8/2010	10:55:20 PM	PH3 valve closed
9/8/2010	10:55:20 PM	SiCl4 pre valve closed
9/8/2010	10:55:20 PM	SiCl4 post valve closed
9/8/2010	10:55:20 PM	Bubbler valve closed
9/8/2010	10:55:20 PM	Helium valve opened
9/8/2010	10:55:20 PM	Main Vac valve opened
9/8/2010	10:55:20 PM	Bypass valve opened
9/8/2010	10:55:20 PM	Helium MFC set to  100.000000
9/8/2010	10:55:20 PM	H2 MFC set to  0.000000
9/8/2010	10:55:20 PM	BCl3 MFC set to  0.000000
9/8/2010	10:55:20 PM	PHl3 MFC set to  0.000000
9/8/2010	10:55:20 PM	SiCl4 MFC set to  0.000000
9/8/2010	10:55:20 PM	Bypass solenoid MFC set to  0.000000
9/8/2010	10:55:20 PM	Tube furnace set to 0
9/8/2010	10:56:20 PM	Helium valve closed
9/8/2010	10:56:20 PM	H2 valve closed
9/8/2010	10:56:20 PM	BCl3 valve closed
9/8/2010	10:56:20 PM	PH3 valve closed
9/8/2010	10:56:20 PM	SiCl4 pre valve closed
9/8/2010	10:56:20 PM	SiCl4 post valve closed
9/8/2010	10:56:20 PM	Bubbler valve closed
9/8/2010	10:56:20 PM	Main Vac valve opened
9/8/2010	10:56:20 PM	Bypass valve opened
9/8/2010	10:56:20 PM	Helium MFC set to  0.000000
9/8/2010	10:56:20 PM	H2 MFC set to  0.000000
9/8/2010	10:56:20 PM	BCl3 MFC set to  0.000000
9/8/2010	10:56:20 PM	PHl3 MFC set to  0.000000
9/8/2010	10:56:20 PM	SiCl4 MFC set to  0.000000
9/8/2010	10:56:20 PM	Bypass solenoid MFC set to  0.000000
9/8/2010	10:56:20 PM	Tube furnace set to 0
9/8/2010	10:57:20 PM	H2 valve closed
9/8/2010	10:57:20 PM	BCl3 valve closed
9/8/2010	10:57:20 PM	PH3 valve closed
9/8/2010	10:57:20 PM	SiCl4 pre valve closed
9/8/2010	10:57:20 PM	SiCl4 post valve closed
9/8/2010	10:57:20 PM	Bubbler valve closed
9/8/2010	10:57:20 PM	Helium valve opened
9/8/2010	10:57:20 PM	Main Vac valve opened
9/8/2010	10:57:20 PM	Bypass valve opened
9/8/2010	10:57:20 PM	Helium MFC set to  100.000000
9/8/2010	10:57:20 PM	H2 MFC set to  0.000000
9/8/2010	10:57:20 PM	BCl3 MFC set to  0.000000
9/8/2010	10:57:20 PM	PHl3 MFC set to  0.000000
9/8/2010	10:57:20 PM	SiCl4 MFC set to  0.000000
9/8/2010	10:57:20 PM	Bypass solenoid MFC set to  0.000000
9/8/2010	10:57:20 PM	Tube furnace set to 0
9/8/2010	10:57:36 PM	Run aborted at 10:57 PM
9/8/2010	10:57:36 PM	Helium valve closed
9/8/2010	10:57:36 PM	H2 valve closed
9/8/2010	10:57:36 PM	BCl3 valve closed
9/8/2010	10:57:36 PM	PH3 valve closed
9/8/2010	10:57:36 PM	SiCl4 pre valve closed
9/8/2010	10:57:36 PM	SiCl4 post valve closed
9/8/2010	10:57:36 PM	Bypass valve closed
9/8/2010	10:57:36 PM	Main Vac valve closed
9/8/2010	10:57:36 PM	Bubbler valve closed
9/8/2010	10:57:36 PM	Helium MFC set to  0.000000
9/8/2010	10:57:36 PM	H2 MFC set to  0.000000
9/8/2010	10:57:36 PM	BCl3 MFC set to  0.000000
9/8/2010	10:57:36 PM	PHl3 MFC set to  0.000000
9/8/2010	10:57:36 PM	SiCl4 MFC set to  0.000000
9/8/2010	10:57:37 PM	Tube furnace set to 0
9/8/2010	10:57:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/8/2010	10:57:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/8/2010	10:57:42 PM	Recipe started at 10:57 PM
9/8/2010	10:57:42 PM	Helium valve closed
9/8/2010	10:57:42 PM	H2 valve closed
9/8/2010	10:57:42 PM	BCl3 valve closed
9/8/2010	10:57:42 PM	PH3 valve closed
9/8/2010	10:57:42 PM	SiCl4 pre valve closed
9/8/2010	10:57:42 PM	SiCl4 post valve closed
9/8/2010	10:57:42 PM	Main Vac valve closed
9/8/2010	10:57:42 PM	Bubbler valve closed
9/8/2010	10:57:42 PM	Bypass valve opened
9/8/2010	10:57:42 PM	Helium MFC set to  0.000000
9/8/2010	10:57:43 PM	H2 MFC set to  0.000000
9/8/2010	10:57:43 PM	BCl3 MFC set to  0.000000
9/8/2010	10:57:43 PM	PHl3 MFC set to  0.000000
9/8/2010	10:57:43 PM	SiCl4 MFC set to  0.000000
9/8/2010	10:57:43 PM	Bypass solenoid MFC set to  0.000000
9/8/2010	10:57:43 PM	Tube furnace set to 0
9/8/2010	10:57:43 PM	Helium valve closed
9/8/2010	10:57:43 PM	H2 valve closed
9/8/2010	10:57:43 PM	BCl3 valve closed
9/8/2010	10:57:43 PM	PH3 valve closed
9/8/2010	10:57:43 PM	SiCl4 pre valve closed
9/8/2010	10:57:43 PM	SiCl4 post valve closed
9/8/2010	10:57:43 PM	Bubbler valve closed
9/8/2010	10:57:43 PM	Main Vac valve opened
9/8/2010	10:57:43 PM	Bypass valve opened
9/8/2010	10:57:43 PM	Helium MFC set to  0.000000
9/8/2010	10:57:43 PM	H2 MFC set to  0.000000
9/8/2010	10:57:43 PM	BCl3 MFC set to  0.000000
9/8/2010	10:57:43 PM	PHl3 MFC set to  0.000000
9/8/2010	10:57:43 PM	SiCl4 MFC set to  0.000000
9/8/2010	10:57:43 PM	Bypass solenoid MFC set to  0.000000
9/8/2010	10:57:43 PM	Tube furnace set to 0
9/8/2010	10:57:43 PM	Run finished at 10:57 PM
9/8/2010	10:57:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
